Kev Taw Qhia: Cov Khoom Siv Graphite - Cov Cheebtsam Tseem Ceeb rau Kev Tsim Khoom Kub Hnyav
Hauv thaj chaw ntawm kev tsim khoom siv niaj hnub no, ntau cov txheej txheem tseem ceeb vam khom rau qhov chaw uas muaj cua sov heev. Txij li kev smelting hlau ib txwm mus rau kev tsim cov khoom siv semiconductor tiam thib peb, cov khoom siv hauv cov khoom siv kub siab yuav tsum tsis yog tsuas yog tiv taus qhov chaw kub txog ntau txhiab degrees Celsius tab sis kuj tseem tswj tau cov khoom siv ruaj khov, muaj peev xwm hloov pauv cua sov zoo heev, thiab muaj kev pheej hmoo tsawg kawg nkaus ntawm kev ua qias tuaj.
Cov khoom siv graphitetau tshwm sim ua ib chav kawm tseem ceeb ntawm cov khoom kub siab kom ua tau raws li cov kev xav tau kev lag luam no.
Ib txwm muaj, cov graphite crucibles feem ntau yog siv los tuav thiab hloov cov khoom siv molten thaum lub sijhawm smelting ntawm cov hlau xws li kub, nyiaj, tooj liab, thiab txhuas. Txawm li cas los xij, nrog rau kev loj hlob sai ntawm cov khoom tsim khoom siab heev - suav nrog kev lag luam semiconductor, cov khoom siv hluav taws xob muaj zog, thiab cov khoom siv hluav taws xob tshiab - kev siv graphite crucibles tau nthuav dav ntau dua li cov metallurgy ib txwm muaj.
Niaj hnub no, cov khoom siv graphite uas muaj purity siab tau dhau los ua cov khoom tseem ceeb hauv:
- SiC ib leeg-siv lead ua kev loj hlob;
- Kev tsim cov khoom siv semiconductor siv lead ua;
- Kev npaj cov khoom siv photovoltaic silicon;
- Kev kho cua sov kub ntawm lub tshuab nqus tsev;
- Cov tshuab thermal teb rau CVD thiab cov khoom siv epitaxy.
Hauv kev tsim khoom semiconductor, lub graphite crucible tsis yog tsuas yog lub thawv kub xwb; nws yog ib yam khoom tseem ceeb hauv lub thermal field system, nrog rau cov yam ntxwv kev ua tau zoo uas cuam tshuam ncaj qha rau qhov zoo ntawm crystal, qhov kub thiab txias sib xws, thiab kev ruaj khov ntawm cov txheej txheem.
Lub graphite Crucible yog dab tsi?
A graphite crucibleyog ib qho khoom siv uas muaj qhov kub thiab txias heev uas ua los ntawm cov graphite uas muaj qhov huv siab; nws feem ntau yog siv los tuav, ua kom sov, lossis ua ntau yam khoom siv hauv qhov chaw kub heev.
Ua tsaug rau graphite cov khoom tshwj xeeb thermal, hluav taws xob, thiab tshuaj lom neeg, cov crucibles no tuaj yeem ua haujlwm ruaj khov hauv cov chaw uas cov khoom siv hlau ib txwm yuav ua tsis tiav.
Tam sim no, graphite crucibles yog dav siv rau hauv:
- Kev ua hlau muaj nqis;
- Kev tsim cov hlau tsis yog ferrous;
- Kev ua cov hlau nplaum;
- Kev sim hauv chav kuaj kub siab;
- Kev loj hlob ntawm cov siv lead ua semiconductor;
- Kev tsim cov khoom siv hluav taws xob tshiab.
Hauv kev tsim khoom kim heev, qhov tseem ceeb ntawm graphite crucibles yog lawv lub peev xwm los muab qhov chaw ruaj khov, huv si, thiab sib xws heev. Piv txwv li, thaum lub sijhawm silicon carbide (SiC) siv lead ua loj hlob, graphite crucibles yuav tsum ua haujlwm ntev hauv qhov chaw kub siab tshaj 2,000 ° C thaum ua kom ntseeg tau tias:
- Kev hloov pauv cua sov sib xws;
- Kev loj hlob ntawm cov siv lead ua kom ruaj khov;
- Kev kis kab mob tsawg kawg nkaus.
Yog li ntawd, graphite purity siab tau dhau los ua cov khoom siv tseem ceeb.
| Pcov khoom siv hysical ntawmisostatic graphite | ||
| Vaj tse | Chav tsev | Tus nqi ib txwm muaj |
| Qhov Ceev Ntau | g/cm³ | 1.83 |
| Qhov nyuaj | HSD | 58 |
| Kev Tiv Thaiv Hluav Taws Xob | μΩ.m | 10 |
| Lub zog flexural | MPa | 47 |
| Lub zog compressive | MPa | 103 |
| Lub zog tensile | MPa | 31 |
| Young's Modulus | GPa | 11.8 |
| Kev Nthuav Dav Kub (CTE) | 10-6K-1 | 4.6 |
| Kev Ua Kub | W·m-1·K-1 | 130 |
| Qhov Loj Nruab Nrab ntawm Cov Nplej | μm | 8-10 |
| Qhov porosity | % | 10 |
| Cov ntsiab lus tshauv | ppm | ≤5 (tom qab ntxuav) |
Vim li cas Graphite Zoo tagnrho rau Cov Ntawv Thov Kub Siab?
Graphite txoj cai ua ib yam khoom tseem ceeb hauv kev lag luam kub siab yog los ntawm nws cov qauv khoom tshwj xeeb.
Ua los ntawm cov pa roj carbon atoms uas teeb tsa ua ib txheej crystalline, graphite muaj cov khoom siv thermal zoo heev thiab kev ruaj khov tshuaj lom neeg.
Ua ntej, graphite ua tau zoo heev rau kev tiv taus kub heev. Hauv qhov chaw nqus tsev lossis huab cua tsis muaj zog, graphite uas muaj cov khoom huv si tuaj yeem tiv taus kub heev rau lub sijhawm ntev thaum tseem tswj tau qhov zoo ntawm cov qauv. Qhov no ua rau nws tsim nyog rau cov txheej txheem kub heev, xws li kev loj hlob ntawm cov siv lead ua los ntawm semiconductor.
Qhov thib ob, graphite muaj kev ua tau zoo heev ntawm kev ua kom sov. Kev tswj qhov kub thiab txias yog ib qho tseem ceeb uas cuam tshuam rau qhov zoo ntawm cov khoom thaum lub sijhawm tsim cov siv lead ua. Txhua qhov kev hloov pauv ntawm qhov kub thiab txias hauv zos tuaj yeem ua rau:
- Cov teeb meem crystal ntxiv zuj zus;
- Kev tsim kev ntxhov siab;
- Cov khoom siv puas tsuaj.
Graphite qhov kev ua tau zoo tshaj plaws ntawm thermal pab cov khoom siv ua tiav qhov kev faib tawm thermal ntau dua, yog li ua kom cov txheej txheem sib xws.
Tsis tas li ntawd xwb, graphite muaj cov coefficient qis ntawm kev nthuav dav thermal thiab zoo heev tiv taus kev poob siab thermal. Kev tsim khoom kub siab feem ntau yuav tsum tau ua kom sov thiab txias sai; graphite ua rau cov qauv puas tsuaj los ntawm kev ntxhov siab thermal, ua rau lub neej ua haujlwm ntev dua.
Tib lub sijhawm, graphite uas muaj cov khoom huv si zoo heev qhia tau tias nws ruaj khov zoo heev. Hauv cov chaw tsim khoom semiconductor, kev ua qias tuaj ntawm cov khoom siv yog ib qho tseem ceeb uas cuam tshuam rau cov khoom tsim tawm. Los ntawm kev txo cov khoom tsis huv thiab ua kom cov qauv khoom zoo dua, graphite uas muaj cov khoom huv si txo cov txheej txheem ua qias tuaj thiab ua kom cov khoom siv lead ua huv si.
Cov Txheej Txheem Tsim Khoom ntawm High-Purity Graphite Crucibles
Cov graphite crucibles ua tau zoo tsis yog tsuas yog qhov tshwm sim ntawm kev ua tiav yooj yim xwb; lawv tau tsim los ntawm kev npaj cov khoom siv nruj, kev kho kub siab, thiab kev ua haujlwm raug.
Cov txheej txheem tsim khoom feem ntau pib nrog kev xaiv cov khoom siv graphite uas muaj cov khoom ntshiab siab.
Cov khoom siv raw no feem ntau suav nrog roj av coke, pitch coke, thiab lwm yam khoom siv carbon uas muaj cov pa roj carbon ntau. Rau cov ntawv thov semiconductor, yuav tsum muaj kev tswj hwm nruj rau:
- Kev huv ntawm cov pa roj carbon;
- Cov ntsiab lus ntawm cov hlau tsis huv;
- Qhov loj ntawm cov noob;
- Cov khoom siv ceev.
Tom qab cov khoom siv raw raug tsoo, sib tsoo, thiab sieve, lawv raug sib xyaw nrog cov binder thiab tom qab ntawd puab ua cov qauv crucible thawj zaug.
Rau cov ntawv thov semiconductor siab kawg, cov thev naus laus zis isostatic pressing tau txais kev pom zoo dav dav vim tias nws ua rau cov khoom siv sib npaug ntau dua thiab cov khoom siv kho tshuab ruaj khov.
Lub crucible uas tsim tau dhau los ntawm cov txheej txheem ci kom txhim kho cov khoom siv zog thiab ruaj khov nws cov qauv sab hauv.
Tom qab ntawd, cov txheej txheem graphitization hloov cov qauv carbon tsis sib haum xeeb mus rau hauv cov qauv siv lead ua graphite uas tau txiav txim siab zoo hauv qab qhov kub thiab txias heev.
Cov txheej txheem no txiav txim siab qhov khoom kawg:
- Kev ua tau zoo ntawm cov cua sov;
- Hluav taws xob tiv taus;
- Lub zog kho tshuab;
- Kev ruaj khov kub.
Thaum kawg, nyob ntawm seb daim ntawv thov tshwj xeeb xav tau dab tsi, lub graphite crucible raug:
- CNC machining precision;
- Kev kho qhov chaw;
- Kev tshuaj xyuas qhov ntev;
- Kev kho mob ntxuav / purification.
Cov kauj ruam no ua kom lub crucible ua tau raws li qhov yuav tsum tau ua kom raug thiab muaj kev ntseeg siab ntawm cov khoom siv semiconductor.
Cov ntawv thov ntawm Graphite Crucibles hauv Semiconductor Manufacturing
Nrog rau kev txhim kho ntawm cov thev naus laus zis semiconductor tiam thib peb, qhov tseem ceeb ntawm graphite crucibles hauv kev tsim khoom siab heev txuas ntxiv mus.
1. Skev loj hlob ntawm ilicon carbide (SiC) siv lead ua
Ua ib yam khoom siv semiconductor tiam thib peb, SiC muaj cov txiaj ntsig xws li:
- Lub zog hluav taws xob tawg siab;
- Kev ua tau zoo ntawm cov cua sov;
- Kev txav mus los ntawm cov hluav taws xob siab;
...thiab siv dav hauv cov tsheb siv hluav taws xob tshiab, cov khoom siv hluav taws xob, thiab cov tshuab hluav taws xob rov ua dua tshiab.
Tam sim no, kev tsim cov khoom siv SiC siv rau kev lag luam feem ntau siv txoj kev Physical Vapor Transport (PVT).
2. Cov txheej txheem PVT
SiC hmoov sublimes nyob rau hauv ib puag ncig kub siab;
Cov khoom siv roj silicon thiab carbon tsiv teb tsaws chaw;
Cov siv lead ua SiC thaum kawg tsim rau ntawm qhov chaw ntawm cov noob siv lead ua.
Tag nrho cov txheej txheem yuav tsum tau tswj hwm kom meej ntawm:
- Kev hloov pauv kub;
- Kev faib tawm ntawm thaj chaw thermal;
- Cov huab cua.
Hauv cov txheej txheem no, lub graphite crucible ua lub luag haujlwm tseem ceeb, suav nrog:
- Tuav cov khoom siv SiC raw;
- Pab txhawb kev hloov pauv cua sov;
- Kev ruaj khov ntawm lub tshav kub.
3. Lwm cov txheej txheem
Dhau li ntawm SiC crystal growth, graphite crucibles thiab lwm yam graphite Cheebtsam kuj tseem siv rau hauv:
- Kev tsim khoom ntawm monocrystalline silicon;
- Kev loj hlob ntawm cov siv lead ua los ntawm photovoltaic;
- Cov khoom siv semiconductor epitaxy;
- Cov txheej txheem CVD kub siab.
Hauv cov ntawv thov no, cov ntaub ntawv graphite pab cov khoom siv tswj kom muaj qhov chaw kub thiab ruaj khov dua, yog li ua kom cov khoom zoo thiab ua haujlwm tau zoo dua.
Xaus Lus: Cov Khoom Siv Graphite Ua Rau Kev Tsim Khoom Kub Siab Rau Tiam Tom Ntej
Txij li kev smelting hlau ib txwm mus rau kev tsim cov khoom siv semiconductor crystal siab heev, kev hloov pauv ntawm graphite crucibles qhia txog kev xav tau ntawm kev lag luam rau cov ntaub ntawv ua tau zoo uas loj hlob tuaj.
Rau kev lag luam semiconductor,cov khoom siv graphitetsis yog tsuas yog cov khoom uas tiv taus kub siab xwb; lawv yog:
Cov ntaub ntawv tseem ceeb uas ua kom muaj kev ruaj khov ntawm thaj chaw thermal, txhim kho qhov zoo ntawm cov siv lead ua, thiab tsav kev nce qib ntawm cov thev naus laus zis tsim khoom.
Siv kev txawj ntse ntau yam hauv cov khoom siv graphite, cov txheej txheem kub siab, thiab kev tsim khoom raug, VET Energy tseem cog lus tias yuav muab cov kev daws teeb meem graphite txhim khu kev qha thiab ua tau zoo rau cov neeg siv khoom thoob plaws ntiaj teb semiconductor, lub zog tshiab, thiab cov khoom lag luam siab.
Lub sijhawm tshaj tawm: Lub Yim Hli-10-2026