Cov Cheebtsam Txheej Txheem CVD SiC rau Silicon Epitaxy (Si Epi)

Ua kom raug rau cov txheej txheem tso cov khoom siv ib zaug thiab cov khoom siv Silicon Epitaxial, peb cov CVD SiC coated susceptors, satellite disks, thiab cov khoom siv thermal field muab cov thermal uniformity zoo heev thiab xoom outgassing. Cov txheej txheem txheej txheem cubic β-SiC siab-density encapsulates tag nrho cov graphite substrate siab-purity, tiv thaiv cov roj reactive etching (SiH₄, SiH₂Cl₂, HCl) thiab lav qhov tsis muaj hlau tsis huv ultra-low (< 5 ppm) thaum lub sijhawm ua haujlwm Si Epi kub siab (1000 ° C - 1200 ° C).