Cov kev xav tau ntawm cov khoom siv graphite hauv kev lag luam semiconductor yog qhov tshwj xeeb tshaj yog, qhov loj me ntawm graphite muaj qhov tseeb siab, tiv taus kub siab, muaj zog siab, poob me me thiab lwm yam zoo, xws li: cov khoom graphite sintered pwm.Vim tias cov khoom siv graphite siv hauv kev lag luam semiconductor (suav nrog cov cua sov thiab lawv cov sintered dies) yuav tsum tau tiv taus cov txheej txheem cua sov thiab txias dua, txhawm rau kom txuas ntxiv lub neej kev pabcuam ntawm cov khoom siv graphite, feem ntau yuav tsum tau siv cov khoom siv graphite muaj kev ua haujlwm ruaj khov thiab ua haujlwm tiv taus cua sov.
01 Cov khoom siv graphite rau kev loj hlob ntawm semiconductor crystal
Txhua yam txheej txheem siv los cog cov siv lead ua semiconductor yog ua haujlwm nyob rau hauv qhov kub thiab txias siab thiab ib puag ncig corrosive. Thaj chaw kub ntawm lub cub tawg loj hlob siv lead ua feem ntau yog nruab nrog cov khoom siv graphite uas tiv taus cua sov thiab tiv taus corrosion siab, xws li lub tshuab cua sov, crucible, lub tog raj kheej rwb thaiv tsev, lub tog raj kheej qhia, electrode, crucible holder, electrode nut, thiab lwm yam.
Peb tuaj yeem tsim txhua yam graphite ntawm cov khoom siv tsim khoom siv lead ua, uas tuaj yeem muab ib tus zuj zus lossis ua pawg, lossis kho cov khoom graphite ntawm ntau qhov ntau thiab tsawg raws li cov neeg siv khoom xav tau. Qhov loj ntawm cov khoom tuaj yeem ntsuas tau ntawm qhov chaw, thiab cov tshauv ntawm cov khoom tiav tuaj yeem tsawg dua.tsawg dua 5ppm.
02 Cov khoom siv graphite rau semiconductor epitaxy
Cov txheej txheem Epitaxial hais txog kev loj hlob ntawm ib txheej ntawm cov khoom siv siv lead ua ke nrog tib lub lattice kev npaj zoo li lub substrate ntawm ib lub substrate siv lead ua ke. Hauv cov txheej txheem epitaxial, lub wafer raug thauj mus rau ntawm lub graphite disk. Kev ua tau zoo thiab zoo ntawm lub graphite disk ua lub luag haujlwm tseem ceeb hauv qhov zoo ntawm txheej epitaxial ntawm lub wafer. Hauv kev tsim khoom epitaxial, ntau lub graphite purity ultra-high thiab lub hauv paus graphite purity siab nrog SIC txheej yog qhov xav tau.
Peb lub tuam txhab lub hauv paus graphite rau semiconductor epitaxy muaj ntau yam kev siv, tuaj yeem phim feem ntau ntawm cov khoom siv feem ntau siv hauv kev lag luam, thiab muaj kev ntshiab siab, txheej txheej sib xws, lub neej ua haujlwm zoo heev, thiab kev tiv thaiv tshuaj lom neeg siab thiab kev ruaj khov thermal.
03 Cov khoom siv graphite rau kev cog ion
Kev cog ion yog hais txog cov txheej txheem ntawm kev ua kom cov plasma beam ntawm boron, phosphorus thiab arsenic nrawm mus rau qee lub zog, thiab tom qab ntawd txhaj nws rau hauv txheej saum npoo ntawm cov khoom siv wafer kom hloov cov khoom siv ntawm txheej saum npoo. Cov khoom ntawm cov khoom siv cog ion yuav tsum ua los ntawm cov khoom siv huv siab nrog kev tiv taus cua sov zoo heev, kev ua kom sov, kev xeb tsawg dua los ntawm ion beam thiab cov ntsiab lus tsis huv. Cov graphite huv siab ua tau raws li qhov yuav tsum tau ua ntawm daim ntawv thov, thiab tuaj yeem siv rau lub raj xa dav hlau, ntau qhov txiav, electrodes, electrode npog, conduits, beam terminators, thiab lwm yam ntawm cov khoom siv cog ion.
Peb tsis yog tsuas yog muab cov ntaub thaiv graphite rau ntau yam tshuab ion implantation xwb, tab sis kuj muab cov electrodes graphite purity siab thiab cov chaw ion nrog kev tiv thaiv corrosion siab ntawm ntau yam kev qhia. Cov qauv siv tau: Eaton, Azcelis, Quatum, Varian, Nissin, AMAT, LAM thiab lwm yam khoom siv. Tsis tas li ntawd, peb kuj tuaj yeem muab cov khoom siv ceramic, tungsten, molybdenum, txhuas thiab cov khoom siv coated.
04 Cov ntaub ntawv rwb thaiv tsev graphite thiab lwm yam
Cov ntaub ntawv rwb thaiv tsev siv rau hauv cov khoom siv semiconductor suav nrog graphite tawv, mos mos, graphite ntawv ci, graphite ntawv, thiab graphite hlua.
Tag nrho peb cov khoom siv raw yog cov graphite xa tuaj, uas tuaj yeem txiav raws li qhov loj me ntawm cov neeg siv khoom xav tau lossis muag tag nrho.
Lub tais carbon-carbon yog siv ua lub hnab nqa khoom rau txheej zaj duab xis hauv cov txheej txheem tsim cov hnub ci monocrystalline silicon thiab polycrystalline silicon cell. Lub hauv paus ntsiab lus ua haujlwm yog: ntxig lub silicon chip rau hauv lub tais CFC thiab xa mus rau hauv lub raj cua sov kom ua tiav cov txheej zaj duab xis.
