Ⅰ. Kev Taw Qhia
Cov Khoom Siv Uas Muaj Qhov Ntxeem Tau Silicon Carbide (Porous SiC)yog cov khoom siv ceramic siab heev uas muab cov khoom zoo tshaj plaws ntawm silicon carbide nrog cov qauv porous uas tau tsim ua tib zoo. Tsis zoo li cov khoom siv ceramic SiC ntom ntom, porous SiC qhia txog cov qhov sib txuas uas muab cov haujlwm ntxiv, suav nrog kev tswj hwm permeability, kev tsim qauv sib dua, kev rwb thaiv tsev thermal, thiab kev txhim kho kev thauj mus los ntawm cov kua dej.
Nrog kev ruaj khov zoo heev ntawm thermal, kev tiv taus tshuaj lom neeg, thiab kev ntseeg tau ntawm cov khoom siv, cov khoom siv SiC porous tau dhau los ua qhov tseem ceeb hauv kev lag luam kub siab, tshwj xeeb tshaj yog kev tsim khoom semiconductor, qhov twg cov txheej txheem ib puag ncig xav tau kev huv siab, kev tiv taus corrosion, thiab kev ruaj khov ua haujlwm ntev.
Ⅱ. Cov Khoom Siv ntawm Cov Khoom Siv Silicon Carbide Uas Muaj Qhov Ntxeem Tau
1. Kev Ruaj Ntseg Kub Siab
Silicon carbide paub txog nws qhov kev ua tau zoo heev nyob rau hauv qhov kub thiab txias heev vim nws muaj zog Si-C covalent bonding. Porous SiC tswj tau qhov ruaj khov ntawm cov qauv hauv qhov chaw kub siab, ua rau nws tsim nyog rau kev ua cov txheej txheem thermal semiconductor, epitaxy systems, thiab cov khoom siv hauv lub cub tawg.
Nws cov coefficient thermal expansion qis thiab kev tiv taus thermal shock zoo heev pab txo qhov deformation thiab txhim kho kev ruaj khov ntawm cov txheej txheem.
2. Kev Tiv Thaiv Tshuaj thiab Plasma Zoo Tshaj Plaws
Kev tsim cov khoom siv semiconductor suav nrog cov pa roj thiab cov chaw plasma uas muaj zog heev, suav nrog cov pa roj chlorine, cov plasma fluorine, thiab cov chaw kub siab.
Cov khoom siv SiC porous muaj:
- Kev tiv thaiv oxidation zoo heev
- Kev ruaj khov tshuaj lom neeg siab
- Muaj zog tiv thaiv kev tawg ntawm cov ntshav
- Cov yam ntxwv tsis muaj kuab paug tsawg
Cov txiaj ntsig no pab txo cov khoom me me thiab ua kom lub neej ntawm cov khoom siv semiconductor ntev dua.
3. Kev Tswj Porosity thiab Gas Permeability
Qhov zoo tshaj plaws ntawm SiC uas muaj qhov porous yog nws cov qauv pore uas hloov kho tau. Los ntawm kev tswj qhov loj ntawm pore, kev faib tawm, thiab kev sib txuas, cov chaw tsim khoom tuaj yeem ua kom zoo dua qhov sib npaug ntawm lub zog kho tshuab thiab permeability.
Qhov tshwj xeeb no ua rau SiC porous ua haujlwm li:
- Cov ntaub ntawv sib kis roj
- Cov qauv lim dej
- Cov khoom siv tswj kev kub
Ⅲ. Cov Txheej Txheem Ua Haujlwm ntawm Porous Silicon Carbide Ceramics
Kev ua tau zoo ntawm cov khoom siv SiC porous feem ntau nyob ntawm cov txheej txheem tsim khoom thiab kev tsim qauv microstructure.
Kev Txo Qhov Kub thiab Txias
Cov txheej txheem ib txwm no tsim cov SiC uas muaj qhov ntxeem tau los ntawm cov tshuaj tiv thaiv kub siab ntawm cov khoom siv uas muaj silicon thiab cov khoom siv carbon. Nws ua rau muaj cov qauv SiC uas muaj kev ntshiab siab nrog kev ruaj khov thermal zoo heev.
Kev Sintering Theem Ua Kua
Kev sintering ua kua siv cov khoom ntxiv los txhim kho kev sib txuas thiab kev sib sau ua ke ntawm cov khoom me me. Los ntawm kev kho qhov kub thiab tshuaj lom neeg ntxiv, cov chaw tsim khoom tuaj yeem ua tiav qhov zoo tshaj plaws ntawm lub zog kho tshuab thiab kev faib tawm ntawm qhov hws.
Kev Nkag Mus Rau Hauv Paus Tshuaj (CVI)
CVI ua rau cov pa roj ua ntej nkag mus rau hauv cov qauv porous, qhov twg SiC tso rau ntawm cov nto sab hauv. Txoj kev no txhim kho lub zog ntawm cov qauv, kev huv si, thiab kev ua haujlwm kub siab.
Cov Txheej Txheem Ua Npuas Ncauj thiab Cov Qauv
Cov thev naus laus zis ua npuas ncauj thiab cov qauv tsim cov qauv qhov hws sib txawv los ntawm kev tswj cov neeg sawv cev tsim cov qhov hws lossis cov qauv txi. Cov txheej txheem no muab kev nkag tau zoo heev thiab cov qauv qhov hws uas hloov kho tau.
Ⅳ. Cov ntawv thov hauv kev tsim khoom semiconductor
Vim nws txoj kev sib xyaw ua ke ntawm cov khoom siv thermal, tshuaj lom neeg, thiab cov qauv, cov khoom siv SiC porous feem ntau siv rau hauv cov txheej txheem semiconductor.
Cov Cheebtsam Faib Roj
Hauv CVD, PECVD, thiab ALD cov kab ke, SiC uas muaj qhov porous tuaj yeem ua haujlwm ua cov roj diffusers thiab cov phaj faib khoom kom ua tiav cov roj ntws zoo ib yam thiab txhim kho kev sib xws ntawm cov zaj duab xis.
Cov Khoom Siv Ua Plasma
Hauv cov tshuab plasma etching thiab ntxuav, cov khoom SiC uas muaj qhov ntxeem tau muab kev tiv thaiv zoo dua tiv thaiv cov chaw ua haujlwm plasma corrosive, txo cov khoom me me thiab txhim kho kev ntseeg tau ntawm cov khoom siv.
SiC thiab GaN Epitaxial Systems
Rau kev tsim khoom semiconductor tiam thib peb, porous SiC pab txhawb rau kev tswj hwm thermal thiab kev ruaj khov ntawm cov txheej txheem hauv qhov chaw loj hlob epitaxial kub siab.
Cov Cheebtsam Tswj Wafer
Cov khoom siv nqus tsev SiC uas muaj qhov nqus tauthiabkev txhawb nqa wafermuab kev ua haujlwm siab, tsis muaj kuab paug, thiab tiv taus tshuaj lom neeg zoo heev rau kev tshuaj xyuas wafer, lithography, thiab kev ua haujlwm thermal.
Ⅴ. Xaus lus
Cov Khoom Siv Silicon Carbide Uas Muaj Qhov Ntxeem Tausawv cev rau kev hloov pauv ntawmCov ntaub ntawv SiCLos ntawm cov khoom siv ceramic ib txwm mus rau cov khoom siv semiconductor ua haujlwm tau zoo. Los ntawm cov thev naus laus zis ua tiav siab heev thiab kev tswj cov qauv pore kom meej, porous SiC ua tiav qhov sib npaug zoo tagnrho ntawm lub zog, permeability, thermal performance, thiab chemical stability.
Raws li kev tsim khoom semiconductor txuas ntxiv mus rau qhov kub siab dua thiab kev tswj hwm kev ua qias tuaj ntau dua, cov khoom siv SiC porous yuav ua lub luag haujlwm tseem ceeb hauvCov txheej txheem CVD, cov khoom siv ua plasma, kev tuav wafer, thiab cov thev naus laus zis semiconductor tiam tom ntej.
Lub sijhawm tshaj tawm: Lub Xya Hli-31-2026