Ho tloha ha e sibolloa, silicon carbide e hohetse tlhokomelo e atileng. Silicon carbide e entsoe ka halofo ea liathomo tsa Si le halofo ea liathomo tsa C, tse hokahaneng ka litlamo tsa covalent ka li-electron pairs tse arolelanang sp3 hybrid orbitals. Karolong ea motheo ea sebopeho sa kristale ea eona e le 'ngoe, liathomo tse' nè tsa Si li hlophisitsoe ka mokhoa o tloaelehileng oa tetrahedral, 'me athomo ea C e bohareng ba tetrahedron e tloaelehileng. Ka lehlakoreng le leng, athomo ea Si e ka boela ea nkoa e le setsi sa tetrahedron, kahoo e theha SiC4 kapa CSi4. Sebopeho sa Tetrahedral. Bond ea covalent ho SiC e ionic haholo, 'me matla a silicon-carbon bond a phahame haholo, hoo e ka bang 4.47eV. Ka lebaka la matla a tlase a phoso, likristale tsa silicon carbide li theha habonolo li-polytypes tse fapaneng nakong ea kholo. Ho na le mefuta e fetang 200 e tsebahalang, e ka aroloa ka mekhahlelo e meraro e meholo: cubic, hexagonal le trigonal.
Hona joale, mekhoa e ka sehloohong ea ho hōla ha likristale tsa SiC e kenyelletsa Physical Vapor Transport Method (mokhoa oa PVT), High Temperature Chemical Vapor Deposition (mokhoa oa HTCVD), Mokhoa oa Liquid Phase, joalo-joalo Har'a bona, mokhoa oa PVT o hōlile haholoanyane 'me o loketse ho feta tlhahiso ea boima ba indasteri. .
Mokhoa oo ho thoeng ke oa PVT o bolela ho beha likristale tsa peo ea SiC ka holim'a crucible, le ho beha phofo ea SiC e le lisebelisoa tse tala ka tlaase ho crucible. Sebakeng se koetsoeng sa mocheso o phahameng le khatello e tlase, phofo ea SiC e theoha 'me e nyolohela holimo tlas'a ketso ea mocheso oa mocheso le phapang ea mahloriso. Mokhoa oa ho e isa sebakeng se haufi le kristale ea peo ebe o e khutlisetsa hape ka mor'a hore e fihle boemong ba supersaturated. Mokhoa ona o ka fihlela kholo e laolehang ea boholo ba kristale ea SiC le mefuta e ikhethang ea kristale. .
Leha ho le joalo, ho sebelisa mokhoa oa PVT ho hōlisa likristale tsa SiC ho hloka kamehla ho boloka maemo a loketseng a ho hōla nakong ea nako e telele ea ho hōla, ho seng joalo e tla lebisa ho lefu la lattice, kahoo e ama boleng ba kristale. Leha ho le joalo, khōlo ea likristale tsa SiC e phethoa sebakeng se koetsoeng. Ho na le mekhoa e seng mekae e sebetsang ea ho beha leihlo le mefuta e mengata e fapaneng, kahoo taolo ea ts'ebetso e thata.
Ha ho ntse ho hōla likristale tsa SiC ka mokhoa oa PVT, mokhoa oa ho hōla ha mohato (Step Flow Growth) o nkoa e le mokhoa o ka sehloohong oa khōlo e tsitsitseng ea mofuta o le mong oa kristale.
Liathomo tsa Si tse nang le mouoane le liathomo tsa C li tla hokahana ka mokhoa o ikhethileng le liathomo tse holim'a kristale sebakeng sa kink, moo li tla etsa nucleate le ho hola, ho etsa hore mohato o mong le o mong o phallele pele ka ho bapisa. Ha bophara mohato ka holim'a kristale hole feta diffusion mahala tsela ea adatom, palo e kholo ea adatom ka 'na agglomerate, le tse peli-dimensional sehlekehlekeng-joaloka mokgwa kgolo thehoa tla timetsa mohato phallo kgolo mokgwa wa, ho fella ka ho lahleheloa ke 4H kristale sebopeho tlhahisoleseding, ho fella ka Multiple mefokolo. Ka hona, ho lokisoa ha mekhoa ea ts'ebetso ho tlameha ho finyella taolo ea sebopeho sa mohato oa holim'a metsi, ka hona ho hatella moloko oa bofokoli ba polymorphic, ho finyella morero oa ho fumana mofuta o le mong oa kristale, 'me qetellong o lokisetsa likristale tsa boleng bo phahameng.
Joalo ka mokhoa oa khale oa ho holisa kristale oa SiC, mokhoa oa ho tsamaisa mouoane oa 'mele hajoale ke mokhoa o ka sehloohong oa ho holisa likristale tsa SiC. Ha ho bapisoa le mekhoa e meng, mokhoa ona o na le litlhoko tse tlase tsa lisebelisoa tsa ho hōla, mokhoa o bonolo oa ho hōla, taolo e matla, lipatlisiso tsa tsoelo-pele e batlang e batlile, 'me e se e fihletse kopo ea indasteri. Molemo oa mokhoa oa HTCVD ke hore o ka hola li-conductive (n, p) le li-wafers tse phahameng tsa semi-insulating tse phahameng, 'me li khona ho laola mohopolo oa doping e le hore mahloriso a carrier a ka fetoha pakeng tsa 3 × 1013 ~ 5 × 1019 / cm3. Litsietsi ke moeli o phahameng oa tekheniki le karolo e tlase ea mmaraka. Ha theknoloji ea khōlo ea kristale ea SiC e ntse e tsoela pele ho hōla, e tla bontša bokhoni bo boholo ba ho ntšetsa pele indasteri eohle ea SiC nakong e tlang 'me e ka' na ea e-ba ntlha e ncha ea ho hōla ha SiC crystal.
Nako ea poso: Apr-16-2024