Litlhoko tsa indasteri ea semiconductor tsa litlhoko tsa thepa ea graphite li phahame haholo, boholo ba likaroloana tse nyane tsa graphite bo na le ho nepahala ho phahameng, ho hanyetsa mocheso o phahameng, matla a phahameng, tahlehelo e nyane le melemo e meng, joalo ka: hlobo ea lihlahisoa tsa graphite tse sintered.Ka lebaka la hore disebediswa tsa graphite tse sebediswang indastering ya semiconductor (ho kenyeletswa le di-heater le di-dies tsa tsona tse sintered) di hlokahala ho mamella ditshebetso tse pheta-phetoang tsa ho futhumatsa le ho phodisa, e le ho eketsa bophelo ba tshebeletso ya disebediswa tsa graphite, hangata ho hlokahala hore disebediswa tsa graphite tse sebediswang di be le tshebetso e tsitsitseng le tshebetso e hanelang mocheso.
Lisebelisoa tsa Graphite bakeng sa kholo ea kristale ea semiconductor
Mekhoa eohle e sebelisoang ho holisa likristale tsa semiconductor e sebetsa tlas'a mocheso o phahameng le tikoloho e senyang. Sebaka se chesang sa onto ea kholo ea kristale hangata se na le likarolo tsa graphite tse hanelang mocheso le tse hanelang mafome, tse kang hitara, crucible, insulation cylinder, guide cylinder, electrode, crucible holder, electrode nut, jj.
Re ka hlahisa likarolo tsohle tsa graphite tsa lisebelisoa tsa tlhahiso ea kristale, tse ka fanoang ka bonngoe kapa ka lihlopha, kapa likarolo tsa graphite tse ikhethileng tsa boholo bo fapaneng ho latela litlhoko tsa bareki. Boholo ba lihlahisoa bo ka lekanngoa sebakeng seo, 'me boleng ba molora oa lihlahisoa tse felileng bo ka ba tlase.ho feta 5ppm.
Lisebelisoa tsa Graphite tsa 02 bakeng sa epitaxy ea semiconductor
Ts'ebetso ea Epitaxial e bolela kholo ea lera la thepa e le 'ngoe ea kristale e nang le tokisetso e tšoanang ea lattice le substrate holim'a substrate e le 'ngoe ea kristale. Ts'ebetsong ea epitaxial, wafer e kenngoa holim'a disk ea graphite. Ts'ebetso le boleng ba disk ea graphite li bapala karolo ea bohlokoa boleng ba lera la epitaxial la wafer. Tšimong ea tlhahiso ea epitaxial, ho hlokahala graphite e ngata e hloekileng haholo le motheo oa graphite e hloekileng haholo o nang le SIC coating.
Setsi sa graphite sa k'hamphani ea rona bakeng sa epitaxy ea semiconductor se na le mefuta e mengata ea lits'ebetso, se ka bapisoa le boholo ba lisebelisoa tse sebelisoang haholo indastering, 'me se na le bohloeki bo phahameng, se koahetsoe ka mokhoa o ts'oanang, bophelo bo botle ba ts'ebeletso, le khanyetso e phahameng ea lik'hemik'hale le botsitso ba mocheso.
Lisebelisoa tsa Graphite bakeng sa ho kenngoa ha ion
Ho kenngoa ha ion ho bolela ts'ebetso ea ho potlakisa khanya ea plasma ea boron, phosphorus le arsenic ho ea ho matla a itseng, ebe e kenngoa ka har'a lera la holim'a thepa ea wafer ho fetola litšobotsi tsa thepa ea lera la holim'a metsi. Likarolo tsa sesebelisoa sa ho kenngoa ha ion li lokela ho etsoa ka thepa e hloekileng haholo e nang le khanyetso e ntle ea mocheso, conductivity ea mocheso, ts'enyeho e fokolang e bakoang ke khanya ea ion le litaba tse tlase tsa litšila. Graphite e hloekileng haholo e fihlela litlhoko tsa ts'ebeliso, 'me e ka sebelisoa bakeng sa tube ea sefofane, likheo tse fapaneng, li-electrode, likoahelo tsa electrode, likhoerekhoere, li-terminator tsa mahlaseli, jj. tsa lisebelisoa tsa ho kenngoa ha ion.
Ha re kgone feela ho fana ka sekoahelo sa graphite bakeng sa mechini e fapaneng ya ho kenya di-ion, empa hape re ka fana ka di-electrode tsa graphite tse hlwekileng haholo le mehlodi ya di-ion tse nang le kganyetso e phahameng ya mafome ya ditlhaloso tse fapaneng. Mehlala e sebetsang: Eaton, Azcelis, Quatum, Varian, Nissin, AMAT, LAM le disebediswa tse ding. Ho phaella moo, re ka boela ra fana ka dihlahiswa tse tshwanang tsa ceramic, tungsten, molybdenum, aluminium le dikarolo tse manehilweng.
04 Lisebelisoa tsa ho kenya mocheso oa Graphite le tse ling
Lisebelisoa tsa ho thibela mocheso tse sebelisoang lisebelisoa tsa tlhahiso ea semiconductor li kenyelletsa graphite hard felt, soft felt, graphite foil, pampiri ea graphite le thapo ea graphite.
Lisebelisoa tsohle tsa rona tse tala ke graphite e tsoang kantle ho naha, e ka sehoang ho latela boholo bo itseng ba litlhoko tsa moreki kapa ea rekisoa kaofela.
Terei ea khabone-khabone e sebelisoa e le sesebelisoa sa ho koahela filimi ts'ebetsong ea tlhahiso ea lisele tsa silicon tse nang le monocrystalline ea letsatsi le li-silicon tse nang le polycrystalline. Molao-motheo o sebetsang ke ona: kenya chip ea silicon ka tereing ea CFC ebe u e romela ka har'a tube ea sebōpi ho sebetsana le sekoahelo sa filimi.
