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Cov Kev daws teeb meem cua sov Graphite siab-purity rau Semiconductor Epitaxy

Cov Kev daws teeb meem cua sov Graphite siab-purity rau Semiconductor Epitaxy

Hauv cov txheej txheem semiconductor kub siab xws li MOCVD (Metal-Organic Chemical Vapor Deposition) thiab SiC epitaxial kev loj hlob, kev tswj hwm thermal teb ncaj qha txiav txim siab qhov tuab ntawm zaj duab xis deposition, doping concentration, thiab qhov kawg wafer yield. Raws li lub hauv paus thermal teb Cheebtsam, lubLub Tshuab Cua Sov Graphite Uas Muaj Peev Xwm Siabyuav tsum ua haujlwm ruaj khov thiab txuas ntxiv mus rau qhov kub thiab txias tshaj 1600 ° C hauv cov txheej txheem roj corrosive heev. Ua ke cov ntaub ntawv kawm txog cov neeg siv khoom siv nrog kev paub txog cov khoom tseem ceeb, tsab xov xwm no muab kev tshuaj xyuas tob txog cov txiaj ntsig kev siv tshuab, kev tsim qauv, thiab lub luag haujlwm tseem ceeb ntawm cov cua sov graphite siab hauv kev tsim khoom semiconductor wafer.

Kev Txheeb Xyuas Txog Kev daws teeb meem & Cov Ntsuas Tseem Ceeb

Kev Lag Luam Txheej Txheem Kev daws teeb meem tseem ceeb Cov Txiaj Ntsig Uas Tau Pom Zoo
3rd Gen Semiconductor (SiC / GaN Epitaxy) 6″ / 8″ SiC High-Temp Epitaxial CVD Isotropic Graphite Rhaub + 150μm CVD SiC Txheej Kev Sib Xws ±0.8% | Qhov Tsis Zoo -85% | Txuag tau €85,000/xyoo

Vim li cas ho xaiv High-Purity Graphite Heater rau MOCVD Systems?

Cov Ntsiab Lus Tseem Ceeb: Cov cua sov graphite purity siab xa cov thermal conductivity zoo heev thiab kev faib tawm qhov kub thiab txias meej, tshem tawm cov kev ntxhov siab thermal gradient hauv chav tshuaj tiv thaiv kom ntseeg tau tias cov txheej epitaxial zoo loj hlob.

Hauv cov txheej txheem tseem ceeb xws li MOCVD thiab GaN/SiC epitaxy, txawm tias qhov kub thiab txias me me (>2°C) tuaj yeem ua rau muaj kev hloov pauv ntawm qhov ntev lossis cov teeb meem siv lead ua hauv txheej epitaxial. Siv cov khoom siv hluav taws xob siab (100–150 W/m·K) thiab cov coefficient qis heev ntawm kev nthuav dav thermal (CTE), cov ntaub ntawv graphite siab-purity du thiab sai ua kom sov sib npaug thoob plaws tag nrho cov susceptor thiab wafer nto.

Kev Sib Npaug Kub thiab Kev Tswj Xyuas Ntau Thaj Chaw

Yuav kom tiv thaiv kev poob hluav taws xob thermal ntawm ntug ntawm lub epitaxy chamber, cov cua sov graphite purity siab feem ntau suav nrog kev tsim qauv tswj kub ntau thaj chaw ywj pheej. Los ntawm kev hloov kho qhov tsis kam, cov engineers kho cov cheeb tsam hla circuit thiab kev tiv thaiv hluav taws xob raws li cov yam ntxwv poob thermal ntawm lub chamber flow field. Qhov no tswj qhov kub thiab txias sib txawv thoob plaws thaj chaw loj hlob wafer nruj me ntsis hauv ± 1 ° C, lav qhov sib xws hluav taws xob thoob plaws txhua lub wafers ntawm lub disk.

Kev Tswj Xyuas Cov Tshauv Thiab Kev Paub Tseeb Txog Ib Puag Ncig Uas Pure Heev

Cov txheej txheem epitaxy semiconductor muaj kev nkag siab zoo heev rau cov hlau tsis huv. Cov graphite kev lag luam txheem muaj cov hlau tsis xws luag xws li hlau (Fe), nickel (Ni), thiab tooj liab (Cu), uas yooj yim volatilize thiab diffuse rau hauv txheej epitaxial ntawm qhov kub siab, ua rau lub zog hluav taws xob tawg thiab kev txav mus los ntawm cov neeg nqa khoom puas tsuaj. Cov cua sov graphite siab-purity dhau los ntawm cov txheej txheem purification kub siab, txo cov tshauv tag nrho kom qis dua 5 ppm (thiab qis dua 2 ppm rau qib semiconductor siab), tiv thaiv kev sib kis ntawm epitaxial wafers los ntawm cov thermal teb impurities ntawm qhov chaw.

Cov Khoom Siv Hluav Taws Xob Graphite Qib Siab hauv Kev Ua Haujlwm Wafer Semiconductor

Cov Ntsiab Lus Tseem Ceeb: Cov qauv graphite geometric zoo tshaj plaws ua ke nrog cov khoom siv kub siab tsis zoo txo ​​​​​​cov kev hloov pauv ntawm cov khoom thiab kev ua tsis tiav ntawm kev qaug zog thaum lub sijhawm ua haujlwm kub ntau zaus.

Cov khoom siv cua sov semiconductor raug cua sov thiab txias sai sai los ntawm qhov kub hauv chav tsev mus txog ntau txhiab degrees Celsius. Tsis zoo li cov xov hlau cua sov (xws li tungsten lossis molybdenum), uas feem ntau rov ua dua, ua brittle, lossis sag thaum kub siab, graphite muaj cov yam ntxwv tshwj xeeb: lub zog nce ntxiv nrog rau qhov kub thiab txias.

Lub Zog Kho Tshuab Thaum Kub Siab thiab Kev Tiv Thaiv Kev Nkees ntawm Cov Qauv

Lub zog tensile thiab flexural ntawm cov ntaub ntawv graphite nce ntxiv thaum qhov kub nce siab, nce mus txog ntawm 2000 ° C thiab 2500 ° C. Cov yam ntxwv no ua kom ntseeg tau tias cov cua sov graphite tsis raug kev txom nyem los ntawm kev sib txhuam lossis kev tawg ntawm cov qauv hauv qab kev kub hnyiab thiab kev ua haujlwm kub siab. Yog li ntawd, kev ruaj khov ntawm kev tiv thaiv hluav taws xob tau khaws cia rau lub sijhawm ua haujlwm ntev, txo qis lub sijhawm txij nkawm tsis tau npaj tseg.

Kev Siv Tshuab 3D Uas Muaj Kev Ntsuas Zoo Thiab Cov Qauv Circuit Uas Nyuaj

Cov reactors semiconductor niaj hnub xav tau cov qauv me me heev. Cov graphite uas muaj purity siab muaj peev xwm ua tau zoo heev thiab tuaj yeem ua tiav los ntawm kev siv 5-axis CNC machining uas muaj qhov tseeb siab rau hauv cov qauv circuit uas nyuaj heev - xws li cov qauv threaded peb theem, txoj kev serpentine folded, thiab dual-helix staggered circuits. Cov qauv geometric no ua rau thaj chaw kub tshaj plaws hauv qhov chaw tsawg, ua tiav cov zis hluav taws xob siab nrog cov teebmeem inductance qis.

Cov Kev Ua Tau Zoo Tseem Ceeb ntawm SiC Coated Graphite Heaters

Cov Ntsiab Lus Tseem Ceeb: Cov txheej txheem CVD SiC (Silicon Carbide) ntom ntom thaiv tag nrho cov tshuaj lom neeg tawm tsam thiab hydrogen etching los ntawm cov pa roj hnyav, ua rau lub tshuab cua sov siv tau ntev dua.

Yuav kom tiv taus cov txheej txheem ib puag ncig hnyav dua - xws li cov huab cua kub siab hydrogen txo cov pa lossis cov pa roj etching uas muaj chlorine / fluorine - tso cov txheej txheem Silicon Carbide ntom ntom (CVD SiC Coating) rau ntawm qhov chaw ntawm cov graphite substrate siab-purity tau dhau los ua cov kev daws teeb meem tus qauv kev lag luam.

Kev Tiv Thaiv Hydrogen Etching thiab Zero Particle Shedding

Thaum lub sijhawm SiC thiab Silicon epitaxy, cov concentration siab ntawm H2Cov roj ua rau cov graphite uas tsis tau coated ntau dhau ntawm qhov kub siab (hydrogen etching ua rau cov roj methane), ua rau qhov chaw graphite xoob, yooj yim tawg, thiab ua rau muaj cov khoom me me. Ib txheej CVD SiC tuab 100% kaw cov qhov me me ntawm qhov chaw graphite, cais cov roj av tawm tag nrho thiab tsim kom muaj ib puag ncig txheej txheem huv si nrog xoom cov khoom me me poob.

Kev Ruaj Khov Hauv Cov Xov Xwm Uas Muaj Zog Thiab Kev Txo Tus Nqi Tag Nrho ntawm Kev Muaj Tswv (TCO)

Hauv cov chaw ua tshuaj uas muaj cov pa roj ua haujlwm ntau heev xws li HCl thiab NH43, CVD SiC txheej txheem ua rau pom tias muaj tshuaj lom neeg zoo dua. Nws tsis tsuas yog tiv thaiv cov graphite substrate los ntawm kev xeb xwb tab sis kuj ua rau lub voj voog hloov pauv ntawm cov khoom cua sov ntev dua (feem ntau ua rau lub neej ua haujlwm ntau dua 200%). Qhov no txo ​​qis tus nqi tag nrho ntawm kev muaj (TCO) thiab tus nqi amortized ib wafer ntawm lub semiconductor fab.

Kev Kawm Txog Cov Ntaub Ntawv: Kev daws teeb meem Thermal Uniformity thiab Particle Contamination hauv SiC Epitaxy

Cov Ntsiab Lus Tseem Ceeb: Los ntawm kev kho kom haum rau peb-cheeb tsam graphite cua sov nrog 150μm CVD SiC txheej, VET Zog tau daws qhov teeb meem ntawm ntug zaj duab xis tawg thiab cov teeb meem me me rau cov neeg siv khoom 6-nti SiC epitaxy.

Cov Teeb Meem Mob ntawm Cov Neeg Siv Khoom:Ib lub tuam txhab tsim khoom semiconductor epitaxy tiam 3 uas nto moo hauv lub teb chaws Yelemees tau ntsib ob qho teeb meem tseem ceeb thaum lub sijhawm loj hlob ntawm 6-nti SiC epitaxial (qhov kub ntawm cov txheej txheem 1650 ° C, H2+ TCS huab cua): Ua ntej, qhov sib txawv ntawm cov txheej epitaxial tuab ntawm cov npoo wafer tau txog li ± 3.8%, ua rau cov cuab yeej ntug tsis ua haujlwm. Qhov thib ob, lub tshuab cua sov graphite OEM thawj tau pom tias muaj hydrogen etching thiab spalling ntawm qhov chaw tom qab tsuas yog 120 teev ntawm kev siv, ua rau muaj kev nce ntxiv ntawm cov khoom me me poob rau hauv chav tshuaj tiv thaiv - dhau qhov zoo ntawm qhov tsis zoo los ntawm 3 × qhov nruab nrab.

Kev Kuaj Xyuas Zog VET & Kev daws teeb meem tshwj xeeb

Thaum koom tes, pab pawg tsim khoom VET Energy tau ua qhov kev sim ua ke electro-thermal thiab fluid-flow coupled simulations ntawm lub tshuab cua sov OEM qub. Kev kuaj mob qhia tau tias tsis muaj kev them nyiaj hluav taws xob txaus ntawm ntug thiab micro-pores / thermal stress cracks hauv SiC txheej (txheej tuab tsuas yog 60μm nrog kev nplaum tsis zoo). Ua teb, VET Energy tau muab kev daws teeb meem engineering:

  • Kev Txhim Kho Cov Qauv Thermal Field:Siv txoj kev tsim qauv tswj kev tiv thaiv 3-cheeb tsam ywj pheej, ua kom qhov geometric cua sov hla-seem me dua 8% ze ntug dissipation zones kom txhawb nqa lub zog hauv zos.
  • Kev Txhim Kho Cov Khoom Siv Uas Muaj Kev Ntshiab Siab:Xaiv cov graphite isotropic isostatic siab uas muaj cov tshauv tsawg dua 2 ppm, phim cov coefficient ntawm thermal expansion (CTE) nrog rau SiC txheej (CTE phim >98%).
  • Kev Txhim Kho Txheej Txheem CVD SiC:Siv cov txheej txheem CVD deposition uas zoo dua, ua rau SiC txheej tuab nce mus txog 150 ± 10 μm nrog cov qauv noob uas ntom, tsis muaj qhov pore uas muaj peev xwm tiv taus 1700 ° CH4.2yaug.

Cov Txiaj Ntsig ntawm Kev Siv thiab Tus Nqi Rau Cov Neeg Siv Khoom

Tom qab 30 hnub sib law liag ntawm kev txheeb xyuas cov kab ntau lawm, tus neeg siv khoom tau tshaj tawm txog kev txhim kho kev ua tau zoo heev: qhov sib npaug ntawm cov tuab epitaxial puv wafer (suav nrog 3 hli ntug tsis suav nrog) tau zoo dua qub los ntawm±3.8% txog ±0.8%lub tshuab cua sov ua haujlwm tas li rautshaj 400 teevtsis muaj kev tawg ntawm txheej lossis qhov chaw tawg; qhov tsis zoo ntawm cov khoom me me hauv ib chav (> 0.5μm) tautxo los ntawm 85%Qhov no ncaj qha ua rau muaj 12% nce ntxiv ntawm cov khoom siv hluav taws xob prime chip rau ib lub wafer thiab txo cov nqi kho khoom siv txhua xyoo los ntawm kwv yees li€85,000.

Cov Lus Nug Feem Ntau

1. Vim li cas cov cua sov graphite uas muaj cov khoom huv si tsis tuaj yeem hloov pauv tag nrho cov cua sov hlau ncaj qha?
Cov graphite uas muaj purity siab oxidizes sai sai thaum muaj oxygen ntawm qhov kub siab (oxidation tseem ceeb pib saum 400 ° C). Yog li ntawd, nws tsuas yog siv tau rau hauv cov chamber kaw uas muaj lub tshuab nqus tsev, roj inert (piv txwv li, Ar, N2)2), lossis txo qis heev (piv txwv li, H2) ib puag ncig. Hauv cov chaw muaj oxygen, tseem xav tau cov khoom siv cua sov tshwj xeeb uas yog hlau lossis ceramic.
2. Qhov tuab thiab qhov sib npaug ntawm CVD SiC txheej cuam tshuam li cas rau cov cua sov graphite?
Yog tias cov txheej txheej nyias dhau (<80μm) lossis tsis sib xws, cov qhov me me yuav raug nthuav tawm, ua rau cov pa roj nkag mus rau hauv cov substrate uas ua rau muaj hydrogen etching thiab flaking hauv zos. Ntawm qhov tod tes, yog tias cov txheej txheej tuab dhau (>200μm), qhov sib txawv me ntsis CTE ntawm graphite thiab SiC tuaj yeem tsim cov kab nrib pleb thermal thaum lub sijhawm ua kom sov / txias sai. Feem ntau, cov txheej txheem CVD SiC ntom ntom, tsis muaj qhov tsis zoo ntawm 120–150 μm muab qhov sib npaug zoo tshaj plaws.
3. Dab tsi ua rau muaj kev hloov pauv ntawm kev tiv thaiv hluav taws xob hauv cov cua sov graphite, thiab cov neeg siv khoom yuav saib xyuas nws li cas?
Feem ntau qhov kev hloov pauv ntawm qhov tsis kam yog tshwm sim los ntawm kev txo qis ntawm thaj chaw hla vim yog kev ua kom tsis muaj zog lossis kev puas tsuaj ntawm cov tshuaj lom neeg mus sij hawm ntev los ntawm cov pa roj acid / alkali muaj zog, lossis kev tawg me me sab hauv. Cov neeg siv khoom tuaj yeem saib xyuas lub tshuab cua sov lub sijhawm tiag tiag V / I (voltage / tam sim no) tsis kam nkhaus; yog tias pom qhov tsis kam hloov pauv ntau dua ± 5%, nws qhia txog qhov ua tsis tiav ntawm cov txheej txheem lossis kev puas tsuaj ntawm cov khoom siv, xav tau kev tshuaj xyuas thiab hloov pauv raws sijhawm.

Kev xaiv cov cua sov graphite zoo thiab huv si yog qhov tseem ceeb rau kev ua kom muaj kev ua haujlwm thermal zoo, kev tswj qhov kub kom raug, thiab cov wafer zoo dua hauv kev tsim khoom semiconductor niaj hnub no. Peb caw koj kom paub ntau ntxiv txog peb cov khoom siv thermal field thiab customizedSiC Coated Graphite Rhaubcov kev daws teeb meem, lossis tshawb nrhiav peb covCov Khoom Siv Semiconductorcov kab khoom kom zoo dua koj cov epitaxy yield thiab thermal field reliability.
Lub sijhawm tshaj tawm: Lub Yim Hli-11-2026
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