Ⅰ. Okwu Mmalite
Seramiki Silikọn Carbide (Porous SiC)bụ ihe seramiiki dị elu nke na-ejikọta ihe ndị pụrụ iche nke silicon carbide na usoro oghere dị nkọ nke ejiri nlezianya hazie. N'adịghị ka seramiiki SiC dị oke ibu, SiC nwere oghere ndị jikọtara ọnụ na-enye ọrụ ndị ọzọ, gụnyere ikike a na-achịkwa, imewe dị mfe, mkpuchi okpomọkụ, na ikike mbufe mmiri ka mma.
Site na nkwụsi ike okpomọkụ dị mma, iguzogide kemịkalụ, na ntụkwasị obi igwe, seramiiki SiC nke nwere oghere aghọwo ihe dị mkpa na ụlọ ọrụ okpomọkụ dị elu, ọkachasị mmepụta semiconductor, ebe gburugburu usoro chọrọ ịdị ọcha dị elu, iguzogide nchara, na nkwụsi ike ọrụ ogologo oge.
Ⅱ. Njirimara Ihe nke Seramiki Silikọn Carbide Porous
1. Ịkwụsi Ike n'Okpomọkụ Dị Elu
A maara silicon carbide maka arụmọrụ ya dị mma n'okpuru oke okpomọkụ n'ihi njikọ siri ike nke Si-C covalent. Porous SiC na-ejigide iguzosi ike n'ezi ihe n'ebe okpomọkụ dị elu, na-eme ka ọ dabara adaba maka nhazi okpomọkụ semiconductor, sistemụ epitaxy, na ihe ndị mejupụtara ọkụ.
Ọ na-ebelata oke mmụba okpomọkụ ya na oke iguzogide ujo okpomọkụ na-enyere aka belata mgbanwe ma melite nkwụsi ike usoro.
2. Nguzogide Kemịkalụ na Plasma Kachasị Elu
Mmepụta semiconductor gụnyere gas na gburugburu plasma siri ike, gụnyere gas ndị dabere na chlorine, plasma fluorine, na ikuku mmeghachi omume okpomọkụ dị elu.
Seramiki SiC nke porous na-enye:
- Nguzogide oxidation dị mma
- Nkwụsi ike kemịkal dị elu
- Ike siri ike nke mbuze plasma
- Àgwà mmetọ dị ala
Uru ndị a na-enyere aka belata mmepụta ihe dị iche iche ma gbasaa ndụ ihe mejupụtara na akụrụngwa semiconductor.
3. Porosity a na-achịkwa na ike gas na-adịgide
Uru dị mkpa nke SiC nke nwere oghere bụ nhazi oghere ya a na-agbanwe agbanwe. Site n'ịchịkwa nha oghere, nkesa, na njikọ, ndị nrụpụta nwere ike ime ka nguzozi dị n'etiti ike igwe na ikike ikuku dị elu.
Njirimara pụrụ iche a na-eme ka SiC porous rụọ ọrụ dị ka:
- Ihe mgbasa gas
- Nhazi nzacha
- Ihe ndị metụtara njikwa okpomọkụ
Ⅲ. Teknụzụ Nhazi nke Seramiki Silikọn Carbide Porous
Arụmọrụ nke seramiiki SiC nke nwere oghere dabere nke ukwuu n'ụzọ nrụpụta na nhazi obere ihe owuwu.
Mbelata Carbothermal
Usoro ọdịnala a na-emepụta SiC nwere oghere site na mmeghachi omume okpomọkụ dị elu n'etiti ihe ndị nwere silicon na isi iyi carbon. Ọ na-eme ka e nwee usoro SiC dị ọcha nke ukwuu ma nwee ezigbo nkwụsi ike okpomọkụ.
Mmiri Mmiri Sintering
Ngwunye mmiri mmiri na-eji ihe mgbakwunye eme ka njikọ na njupụta nke ihe ndị dị ndụ ka mma. Site n'ịgbanwe okpomọkụ na kemịkalụ mgbakwunye sintering, ndị nrụpụta nwere ike nweta ike mekaniki kachasị mma na nkesa oghere.
Ntinye Mmiri Kemịkal (CVI)
CVI na-ewebata ihe ndị na-ebute gas n'ime ihe owuwu oghere, ebe SiC na-abanye n'elu ime. Usoro a na-eme ka ike nhazi, ịdị ọcha, na ogologo oge okpomọkụ dị elu ka mma.
Ụzọ Ịfụ Ụfụfụ na Nlereanya
Teknụzụ ndị e ji ụfụfụ na template mee na-emepụta usoro oghere dị iche iche site n'ịchịkwa ihe ndị na-emepụta oghere ma ọ bụ ihe nlereanya àjà. Ụzọ ndị a na-enye ohere dị mma na nhazi oghere ahaziri iche.
Ⅳ. Ngwa na Mmepụta Semiconductor
N'ihi njikọta pụrụ iche ya nke ihe ndị dị ka okpomọkụ, kemịkalụ, na nhazi, a na-ejikarị seramiiki SiC nke nwere oghere eme ihe na usoro semiconductor.
Ihe Nkesa Gas
Na sistemụ CVD, PECVD, na ALD, SiC nwere ike ịrụ ọrụ dị ka ihe na-ekesa gas na efere nkesa iji nweta usoro nhazi gas otu ma melite nguzozi nke ihe nkiri.
Ngwa Nhazi Plasma
Na sistemụ nhicha na nhicha plasma, ihe ndị dị na SiC nwere oghere na-enye nguzogide dị elu megide gburugburu plasma na-emebi emebi, na-ebelata mmetọ ihe dị na ya ma na-eme ka ntụkwasị obi nke akụrụngwa ka mma.
Sistemụ SiC na GaN Epitaxy
Maka mmepụta semiconductor nke ọgbọ nke atọ, SiC nwere oghere na-enyere aka na njikwa okpomọkụ ka mma na nkwụsi ike usoro na gburugburu ebe uto epitaxial dị elu.
Ihe eji ejikwa Wafer
Igwe oghere SiC nke na-adịghị mmanankwado waferna-enye ezigbo nkenke, obere mmetọ, yana ezigbo iguzogide kemịkalụ maka nyocha wafer, lithography, na nhazi okpomọkụ.
Ⅴ. Mmechi
Seramiki Silikọn Carbide Porousna-anọchite anya mmalite nkeIhe SiCsite na seramiiki ọdịnala gaa na akụkụ semiconductor na-arụ ọrụ. Site na teknụzụ nhazi dị elu na njikwa nhazi oghere ziri ezi, SiC nke nwere oghere na-enweta nguzozi zuru oke n'etiti ike, ikike ime ihe, arụmọrụ okpomọkụ, na nkwụsi ike kemịkalụ.
Ka mmepụta semiconductor na-aga n'ihu na-aga n'ihu na okpomọkụ dị elu na njikwa mmetọ siri ike, seramiiki SiC ndị nwere oghere ga-arụ ọrụ dị mkpa naSistemụ CVD, akụrụngwa nhazi plasma, njikwa wafer, na teknụzụ mmepụta semiconductor ọgbọ na-abịa.
Oge ozi: Julaị-31-2026