Ihe mejupụtara CVD SiC maka Silicon Epitaxy (Si Epi)

Ejiri usoro nhazi nke ọma mee ihe maka sistemụ nchekwa otu wafer na nke batch Silicon Epitaxial, ihe nchekwa anyị nke CVD SiC, diski satịlaịtị, na ihe ndị mejupụtara ubi okpomọkụ na-enye otu nha okpomọkụ dị egwu na enweghị gas ọ bụla. Akwa mkpuchi cubic β-SiC dị elu na-ekpuchi ihe mejupụtara graphite dị ọcha nke ukwuu, na-egbochi itching gas reactive (SiH₄, SiH₂Cl₂, HCl) ma na-ekwe nkwa ọkwa adịghị ọcha metal dị ala (<5 ppm) n'oge nhazi Si Epi dị elu (1000°C - 1200°C).