Ihe achọrọ n'ụlọ ọrụ semiconductor maka ihe graphite dị oke elu, obere nha nke graphite nwere oke nkenke, oke okpomọkụ, ike dị elu, obere mfu na uru ndị ọzọ, dịka: ngwaahịa graphite sintered ebu.Ebe ọ bụ na akụrụngwa graphite eji eme ihe n'ụlọ ọrụ semiconductor (gụnyere ihe na-ekpo ọkụ na ihe ndị na-egbu mmiri ha) dị mkpa iji nagide usoro ikpo ọkụ na oyi ugboro ugboro, iji mee ka ọrụ nke ngwa graphite dịkwuo ogologo, ọ na-achọkarị ka ihe ndị e ji graphite mee nwee arụmọrụ kwụsiri ike na ọrụ mmetụta na-eguzogide okpomọkụ.
01 Ngwa Graphite maka uto kristal semiconductor
Usoro niile e ji akụ kristal semiconductor na-arụ ọrụ n'okpuru oke okpomọkụ na gburugburu ebe obibi na-emebi emebi. A na-ejikarị ihe ndị dị na ọkụ kristal na-eguzogide okpomọkụ na nke na-eguzogide nchara, dịka ihe na-ekpo ọkụ, ihe mkpuchi, silinda mkpuchi, silinda nduzi, elektrọd, ihe njide ihe mkpuchi, elektrọd, ihe nkpuchi elektrọd, wdg.
Anyị nwere ike imepụta akụkụ graphite niile nke ngwaọrụ mmepụta kristal, nke enwere ike inye n'otu n'otu ma ọ bụ n'ime set, ma ọ bụ akụkụ graphite ahaziri iche nke nha dị iche iche dịka ihe ndị ahịa chọrọ si dị. Enwere ike ịtụ nha ngwaahịa n'ebe a na-arụ ọrụ, ọdịnaya ntụ nke ngwaahịa emechara nwere ike ịdị obere.karịa 5ppm.
02 Ngwa Graphite maka epitaxy semiconductor
Usoro Epitaxial na-ezo aka n'ịbawanye nke oyi akwa nke ihe kristal otu nwere otu nhazi lattice dị ka ihe ndabere dị na otu kristal substrate. N'usoro epitaxial, a na-ebu wafer na diski graphite. Arụmọrụ na ịdị mma nke diski graphite na-arụ ọrụ dị mkpa na ịdị mma nke oyi akwa epitaxial nke wafer. N'ọhịa nke mmepụta epitaxial, a chọrọ ọtụtụ graphite dị ọcha nke ukwuu na ntọala graphite dị ọcha nke nwere mkpuchi SIC.
Ntọala graphite nke ụlọ ọrụ anyị maka semiconductor epitaxy nwere ọtụtụ ngwa, nwere ike ijikọ ọtụtụ ngwa eji eme ihe na ụlọ ọrụ ahụ, ma nwee ịdị ọcha dị elu, mkpuchi otu, ndụ ọrụ dị mma, yana iguzogide kemịkalụ dị elu na nkwụsi ike okpomọkụ.
03 Ngwa Graphite maka itinye ion
Ntinye ion na-ezo aka n'usoro nke ime ka oghere plasma nke boron, phosphorus na arsenic dịkwuo ngwa ngwa ruo ike ụfọdụ, wee gbanye ya n'ime akwa elu nke ihe wafer iji gbanwee ihe onwunwe nke oyi akwa elu. A ga-eji ihe dị ọcha dị elu mee ihe ndị dị na ngwaọrụ ntinye ion nke nwere ezigbo iguzogide okpomọkụ, njikwa okpomọkụ, obere nchara nke ion na-akpata na obere ọdịnaya adịghị ọcha. Graphite dị elu na-emezu ihe achọrọ maka ngwa ahụ, enwere ike iji ya maka ọkpọkọ ụgbọ elu, ọtụtụ oghere, elektrọd, mkpuchi elektrọd, ọkpọkọ, ihe nkwụsị beam, wdg. nke ngwa ntinye ion.
Anyị enweghị ike inye mkpuchi ihe mkpuchi graphite maka igwe dị iche iche e tinyere ion, kamakwa anyị nwere ike inye elektrọd graphite dị ọcha na isi iyi ion nwere oke nguzogide nchara nke nkọwapụta dị iche iche. Ụdị ndị a na-etinye: Eaton, Azcelis, Quatum, Varian, Nissin, AMAT, LAM na ngwaọrụ ndị ọzọ. Na mgbakwunye, anyị nwekwara ike inye ngwaahịa seramiiki, tungsten, molybdenum, aluminom na akụkụ ndị a kpuchiri ekpuchi.
04 Ihe mkpuchi graphite na ndị ọzọ
Ihe mkpuchi okpomọkụ eji eme ihe na ngwaọrụ mmepụta semiconductor gụnyere ihe siri ike graphite, ihe dị nro, akwụkwọ graphite, akwụkwọ graphite, na eriri graphite.
Ihe niile anyị ji emepụta bụ graphite e si mba ọzọ abata, nke a pụrụ ịkpụ dịka nha nke onye ahịa chọrọ ma ọ bụ ree ya n'ozuzu ya.
A na-eji tray carbon-carbon eme ihe dị ka ihe e ji ekpuchi ihe nkiri n'usoro mmepụta nke mkpụrụ ndụ silicon monocrystalline nke anyanwụ na polycrystalline. Ụkpụrụ ọrụ bụ: tinye chip silicon n'ime tray CFC wee ziga ya n'ime ọkpọkọ ọkụ iji hazie mkpuchi ihe nkiri ahụ.
