Igwe ọkụ graphite SIC nke dị ogologo ndụ maka MOCVD K465i, Igwe ọkụ graphite maka epitaxy,
Igwe ọkụ graphite a kpụchara akpụcha maka MOCVD , Igwe ọkụ graphite , Igwe ọkụ graphite a kpụchara akpụcha,
Igwe ọkụ graphite SIC dị ogologo ndụ maka MOCVD K465i
A na-eji ihe ndị na-ekpo ọkụ graphite eme ihe n'ime ọkụ dị elu, okpomọkụ ya ruru ogo 2200 na gburugburu ikuku na ogo 3000 na gburugburu gas e tinyere na oxidized.
Isi ihe dị na graphite heater:
1. otu nhazi nke usoro kpo oku.
2. ezigbo ike eletriki na ibu ọkụ eletrik dị elu.
3. iguzogide nchara.
4. enweghị ike ikpochapụ ihe ọkụkụ.
5. ịdị ọcha kemịkalụ dị elu.
6. ike igwe dị elu.
Uru ya bụ na ọ na-arụ ọrụ nke ọma, ọ na-arụkwa ....
Anyị nwere ike imepụta ihe mgbochi oxidation na ogologo ndụ graphite crucible, ebu graphite na akụkụ niile nke ihe na-ekpo ọkụ graphite.
Isi paramita nke ihe na-ekpo ọkụ graphite:
| Nkọwapụta Nkà na ụzụ | VET-M3 |
| Njupụta buru ibu (g/cm3) | ≥1.85 |
| Ọdịnaya ntụ (PPM) | ≤500 |
| Ike nke Osimiri | ≥45 |
| Nguzogide Pụrụ Iche (μ.Ω.m) | ≤12 |
| Ike Flexural (Mpa) | ≥40 |
| Ike Mkpakọ (Mpa) | ≥70 |
| Oke Nha Mkpụrụ (μm) | ≤43 |
| Ọnụọgụ nke Mgbasawanye Okpomọkụ Mm/°C | ≤4.4*10-6 |
Ihe na-ekpo ọkụ graphite maka ọkụ eletrik nwere ihe ndị na-eguzogide okpomọkụ, iguzogide oxidation, ezigbo ike eletriki na ike igwe ka mma. Anyị nwere ike igwe ụdị ihe na-ekpo ọkụ graphite dị iche iche dịka atụmatụ ndị ahịa si dị.


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