Ụgbọ Mmiri Wafer Quartzbụ ngwa ọrụ dị mkpa n'ịmepụta semiconductor, mmepụta sel fotovoltaic na nyocha na mmepe ihe dị elu, nke e mere maka mbufe wafer kwụsiri ike na ọnọdụ ya n'ime usoro okpomọkụ dị elu. Ejiri silica a gwakọtara nke ọma (SiO2) mee ngwaahịa a, nke nwere ezigbo iguzogide okpomọkụ, nkwụsi ike kemịkalụ na njirimara mmetọ ígwè dị ala, nke dabara adaba maka ọkụ mgbasa, ọkụ oxidation, PECVD/LPCVD na akụrụngwa ndị ọzọ, nke a na-ejikarị eme ihe na mkpuchi wafer, ntinye ion, annealing okpomọkụ dị elu na usoro isi ndị ọzọ.
Uru Isi nke ụgbọ mmiri quartz nke VET Energy:
- Ihe dị ọcha nke ukwuu nke ukwuu
Ịdị ọcha ≥99.99%: Ọdịnaya adịghị ọcha (Na, K, Fe, wdg.) <5ppm, na-ezere mmetọ wafer ma na-ekwe nkwa na chips ga-amịpụta.
Mmiri na-ezo nke ọma na mmiri na-amịkọrọ: elu ahụ na-egbuke egbuke nke ukwuu (Ra≤0.4μm) iji belata nrapado nke ihe ndị dị ndụ na ihe fọdụrụ na gas. - Okpomọkụ dị elu kwụsie ike
Oke okpomọkụ: Okpomọkụ ọrụ ogologo oge nke 1100℃, oke okpomọkụ dị mkpirikpi nke 1300℃, enweghị mgbanwe, enweghị mmiri ozuzo kristal.
Ọnụọgụ mgbasa okpomọkụ dị ala (5.5x10-7/℃), ezigbo iguzogide ujo okpomọkụ, enwere ike ịgbanwe ya ka ọ dabara na usoro mmụba okpomọkụ na ọdịda ngwa ngwa (dịka ọmụmaatụ RTP ngwa ngwa). - Nhazi nhazi ziri ezi
Nkezi oghere ± 0.1mm: dakọtara wafers 2” ruo 12”, njehie nha nha oghere <0.05mm, na-eme ka wafers ghara inwe mgbanwe ọ bụla.
Ike ibu dị elu: Ibu kachasị nke wafer iri ise (n'ihe gbasara wafer iri na abụọ) n'otu ụgbọ mmiri, nke na-akwado mbufe siri ike nke wafer dị gịrịgịrị (≥100um). - Enweghị ike kemịkalụ
Nguzogide ire ere: Na-eguzogide acid (ma e wezụga HF), mmebi alkali na organic, dakọtara na usoro nhicha CMP.
Oke ike gas: Ọkwa ntapu <5x10-10 Pa.m3/s, nke dabara adaba maka gburugburu ikuku na gas nchekwa. - Ndụ ogologo na mmezi
Ndụ ogologo ndụ ≥ okirikiri 5000 (ọnọdụ ọrụ nkịtị), enwere ike ihicha elu ahụ ugboro ugboro ma jiri ya mee ihe, na-ebelata ọnụ ahịa zuru oke.
Nhazi modular: na-akwado nnọchi akụkụ (dịka ọmụmaatụ ezé otu ụgbọ mmiri), na-ebelata oge ọrụ.
Anyị na-enye ma elu doro anya ma nke e ji kpụọ oyi dịka ihe ndị ahịa chọrọ si dị:
Ningbo VET Energy Technology Co., Ltd bụ ụlọ ọrụ teknụzụ dị elu nke na-elekwasị anya na mmepụta na ire nke ihe ndị dị elu, ihe na teknụzụ gụnyere graphite, silicon carbide, seramiiki, ọgwụgwọ elu dị ka mkpuchi SiC, mkpuchi TaC, mkpuchi carbon iko, mkpuchi carbon pyrolytic, wdg. A na-eji ngwaahịa ndị a eme ihe n'ọtụtụ ebe na fotovoltaic, semiconductor, ike ọhụrụ, metallurgy, wdg.
Ndị otu teknụzụ anyị sitere na ụlọ ọrụ nyocha kacha elu n'ime obodo, ha emepụtakwala ọtụtụ teknụzụ patented iji hụ na ngwaahịa na-arụ ọrụ nke ọma, ha nwekwara ike inye ndị ahịa ihe ngwọta ọkachamara.
