Jagora Mai Cikakken Bayani Kan Masu Kamuwa Da Zazzabi Mai Girma

A cikin ƙera na'urorin semiconductor na zamani da kuma samar da semiconductor na ƙarni na uku (kamar Silicon Carbide [SiC] da Gallium Nitride [GaN]), tattaunawa a masana'antu galibi ta mayar da hankali ne kan na'urorin lithography na EUV masu matuƙar ci gaba, na'urorin cire ƙwayoyin plasma, ko kuma tsabtar iskar gas mai tsari. Duk da haka, a cikin yanayin tsafta, mai tsananin lalata, da kuma yanayin zafi mai yawa na ɗakin amsawa akwai wani gwarzo mai mahimmanci wanda ba a taɓa jin labarinsa ba: mai hana Graphite.

1. Menene Ma'anar Graphite Susceptor?

A Mai hana graphitewani ɓangare ne na kayan ɗaukar kaya mai inganci wanda aka ƙera daga graphite mai tsabta mai iso ko extruded, wanda galibi yana nuna siffar faifai, aljihu, ko na musammanTsarin siffofi uku da aka ƙera don dacewa da takamaiman ɗakunan amsawa.

A cikin kayan aiki kamar Chemical Vapor Deposition (CVD), Metal-Organic Chemical Vapor Deposition (MOCVD), da Rapid Thermal Processing (RTP), babban aikin dandamalin ɗaukar kaya shine riƙe wafers na semiconductor lafiya yayin da suke aiki a matsayin babban mai musayar zafi. Ta amfani da hanyoyin dumamawa na Graphite susceptor induction, bangaren yana shan Mitar Rediyo (RF) ko makamashin lantarki na microwave cikin sauri kuma yana canza shi zuwa makamashin zafi iri ɗaya, yana sauƙaƙa sarrafa zafin da ya dace na matakin millisecond a saman wafer.

2. Tsarin Kayan Aiki & Tsarin Ƙananan: Me Yasa Ake Amfani da Rufin Graphite + CVD SiC?

Graphite mai ɗanyen da ba a rufe shi ba ba zai iya jure yanayin sinadarai masu ƙarfi da buƙatun tsafta na ƙera semiconductor ba. Masu hana Graphite na zamani masu aiki sosai suna amfani da tsarin haɗakarwa na musamman mai matakai biyu:

(1) Tsarin Graphite Mai Tsabta Mai Tsabta

Ana ƙera babban substrate ta amfani da graphite mai matsewa ta hanyar isostatic. Ta hanyar inganta daidaiton micro crystalline na graphite, yana samun halayen jiki na isotropic, ƙarancin porosity, da ƙarfin lanƙwasa na injiniya mai yawa, yana samar da tushe mai kyau don ƙananan injina masu rikitarwa na wafer.

(2) Rufin Kariya na CVD Silicon Carbide (SiC)

Ta amfani da sinadaran tururin da aka adana, ana shuka wani babban Layer na poly-crystalline B-SiC (yawanci kauri daga 10 zuwa 100 um tare da tsarkin 99.999%) a kan graphite substrate. Wannan rufin yana rufe ƙananan ramukan saman graphite gaba ɗaya, yana hana zubar da ƙwayoyin cuta, kuma yana samar da shinge mai hana shiga daga iskar gas mai lalata kamar HCI, NH,, da mahaɗan fluorinated.

3. Muhimman Halayen Jiki da Bayanan Kayan Aiki

Dangane da gwaje-gwajen dakin gwaje-gwaje masu tsauri da kuma ingantattun ma'aunin masana'antu, masu hana Graphite masu rufin tsafta suna nuna mahimman sigogin jiki masu zuwa:

Fa'idodin Injiniyan Core:

1. Mafi kyawun Juriyar Girgizar Zafi: Yana iya jure wa dumama da sanyaya cikin sauri akai-akai (sama da 1500°C) ba tare da fashewa ko wargajewa ba.

2. Rashin Sinadarai: Ba ya da kariya daga lalacewa daga H2, NH3, iskar gas ta silane, da kuma sinadarai masu tsaftace sinadarai masu tsauri.

3. Daidaita Faɗaɗawar Zafi (CTE): Tsarin ajiyar SiC na mallakar VET Energy yana daidaita yanayin faɗaɗa zafi na murfin SiC tare da tsakiyar graphite, yana hana karyewar murfin a yanayin zafi mai tsanani.

4. Matsayi & Amfani a Tsarin Semiconductor

Babban aminci ga masu hana graphite suna aiki azaman kayan aiki masu ƙarfi a cikin matakai daban-daban na kera semiconductor:

(1) CVD da MOCVD Ci gaban Epitaxial (Epi)

A cikin ƙera GaN LED, na'urar wutar lantarki ta SiC epitaxy, da kuma silicon wafer epi-growth, kauri da daidaiton doping sun dogara sosai akan daidaiton filin zafi. Masu hana graphite suna rarraba zafi daidai gwargwado a cikin saitunan wafer guda ɗaya ko da yawa yayin juyawa, suna danne layukan wafer da damuwa ta zafi ke haifarwa ko zamewa.

(2) Girman Kwalta Guda Ɗaya (Hanyar PVT)

A lokacin girmar lu'ulu'u na Silicon Carbide (SiC) da Sapphire ta hanyar Jirgin Ruwa na Jiki (PVT), mai hana ruwa bayyana yanayin yankin zafi, yana jagorantar samuwar ingot guda ɗaya kai tsaye da rage yawan katsewar ruwa.

(3) Sarrafa Zafi Mai Sauri (RTP) da Zubar da Ruwa

Amfani da ingantaccen dumamawar graphite mai hana ruwa shiga, dandamalin yana ba da damar lokutan amsawar zafi mai sauri da ake buƙata don annealing lattice bayan dasawa da kuma samuwar mahaɗi.

5. Me yasa za a zaɓi makamashin VET?

Tare da buƙatu masu ɗorewa don juriyar sarkar samar da kayayyaki, tsarki mai matuƙar yawa, da kuma tsawaita rayuwar sabis,Makamashin VETya yi fice a matsayin amintaccen abokin aikin injiniya na duniya:

1. Injin Gyaran Ƙananan Na'urori: Cibiyoyin injinan CNC masu axis da yawa suna ba da damar aljihunan wafer masu rikitarwa, ƙananan ramuka, da tashoshin iskar gas na musamman tare da jure wa har zuwa matakin micrometer.

2. Tsarin Ci gaba Mai Tsauri na CVD SiC: Tsarin CVD namu na musamman yana cimma rufin SiC mai kauri da madubi wanda za a iya goge shi da shi wanda ke tsawaita tsawon lokacin aiki na zagayowar zafi da sama da kashi 30%.

3. Muhalli Mai Tsaftacewa Mai Tsafta: Cikakken tsarkakewa da kula da daki yana ba da garantin jimlar abun ciki na toka a ƙasa da 5 ppm, wanda ke gamsar da ƙarfin semiconductor na OEM mai ƙarfiMatsayin Fab.

4. Ingantaccen Kudin Mallaka (CoO): VET Energy yana samar da saurin lokacin jagora tare da rabon farashi-da-aiki mai kyau, yana taimaka wa masu kera guntu su rage kashe kuɗi.