Nrog rau kev nce qib ntawm thev naus laus zis, kev lag luam optoelectronic, tshwj xeeb tshaj yog LED (Light Emitting Diode) thev naus laus zis, tau dhau los ua ib feem tseem ceeb ntawm lub zej zog niaj hnub no lub teeb pom kev zoo, tso saib, thiab kev sib txuas lus. Cov txheej txheem tsim khoom ntawm LEDs muaj ntau kauj ruam tseem ceeb, ntawm cov uas etching ua lub luag haujlwm tseem ceeb hauv kev ua kom ntseeg tau tias cov chip ua haujlwm thiab zoo. Raws li qhov kev thov rau kev ua haujlwm siab dua thiab kev ua tiav zoo dua, kev xaiv cov ntaub ntawv rau etching cuam tshuam rau tag nrho cov txheej txheem. Hauv cov ntsiab lus no, Silicon Carbide (SiC), ua cov khoom siv thauj khoom tshiab, tau txais kev saib xyuas dav dav rau nws daim ntawv thov hauv LED etching.
Tsab xov xwm no tsom mus rau kev siv Silicon Carbide carrier plates hauvCov txheej txheem etching LED, tshuaj xyuas lawv cov txiaj ntsig, cov yam ntxwv, thiab seb cov khoom siv no ua kom zoo dua cov txheej txheem tsim khoom LED li cas.
I. Kev Txheeb Xyuas Txog Cov Txheej Txheem LED Etching
Kev kos duab hauv cov txheej txheem tsim khoom LED yog hais txog cov txheej txheem siv los tsim cov qauv me me ntawm cov khoom siv semiconductor, yog li ua tiav cov khoom siv kho qhov muag thiab hluav taws xob xav tau. Qhov tseeb thiab zoo ntawm cov txheej txheem kos duab cuam tshuam ncaj qha rau kev ua haujlwm ntawm cov chips LED, suav nrog qhov ci ntsa iab, kub xim, thiab kev siv hluav taws xob zoo.
Kev etching tuaj yeem muab faib ua etching qhuav thiab etching ntub. Kev etching qhuav cuam tshuam nrog kev siv plasma lossis lasers rau etching thiab feem ntau yog siv rau kev siv high-precision thiab high-selectivity. Wet etching, ntawm qhov tod tes, siv cov tshuaj lom neeg los etch cov khoom siv thiab feem ntau yog siv rau kev kho mob loj dua. Txawm hais tias hom etching, kev xaiv ntawm cov phaj nqa khoom cuam tshuam rau cov txiaj ntsig etching thiab qhov zoo kawg ntawm cov nti.
II. Kev Taw Qhia Txog Silicon Carbide (SiC)
Silicon Carbide (SiC)yog ib yam khoom sib xyaw ua ke uas muaj silicon (Si) thiab carbon (C). Nws muaj ntau yam khoom zoo heev rau lub cev thiab tshuaj, ua rau nws haum rau kev siv kub siab, muaj zog ntau, thiab muaj zaus ntau. SiC yog ib qho semiconductor dav dav, txhais tau tias nws tuaj yeem ua haujlwm tau zoo hauv qab tej yam kev mob hnyav, xws li hluav taws xob ntau thiab zaus ntau.
Cov yam ntxwv tseem ceeb ntawm SiC muaj xws li:
1. Kev Ua Haujlwm Thermal SiabSiC muaj cov thermal conductivity ntawm 120-170 W/m·K, uas yog siab dua li cov khoom siv silicon (Si). Qhov no tso cai rau SiC kom tshem tawm cov cua sov, tswj kev ruaj khov hauv cov ntawv thov muaj zog siab.
2. Kev Kub Siab Tiv ThaivSiC tuaj yeem tiv taus qhov kub siab heev (ntau tshaj 1000 ° C) yam tsis poob kev ua tau zoo, ua rau nws zoo tagnrho rau cov chaw kub siab.
3. Kev Ruaj Ntseg Tshuaj Zoo heev: SiC tiv taus feem ntau cov tshuaj lom neeg, muab kev tiv thaiv corrosion muaj zog.
4. Qhov Bandgap Dav DavSiC qhov bandgap dav dav tso cai rau nws ua haujlwm tau zoo nyob rau hauv cov xwm txheej high-voltage thiab high-frequency, ua rau nws haum rau ntau yam thev naus laus zis siab heev.
Cov khoom no ua rau SiC yog cov khoom siv cog lus rau kev siv hauv kev tsim khoom LED, tshwj xeeb tshaj yog nyob rau hauv cov txheej txheem etching.
III. Cov txiaj ntsig ntawm Silicon Carbide Carrier Phaj hauv LED Etching
1.Kev Tiv Thaiv Kub Siab
Thaum lub sijhawm ua cov txheej txheem LED etching, tshwj xeeb tshaj yog hauv kev etching qhuav, lub phaj nqa khoom raug rau qhov kub siab vim yog lub zog los ntawm plasma lossis lasers. Cov ntaub ntawv ib txwm muaj xws li silicon (Si) lossis quartz (SiO₂) yuav poob qhov ruaj khov ntawm cov qauv lossis dhau los ntawm kev nthuav dav thermal, ua rau qhov tseeb txo qis. Silicon carbide, nrog nws qhov kev tiv thaiv kub siab zoo dua, tuaj yeem tswj tau qhov ruaj khov hauv qhov chaw kub siab yam tsis muaj kev hloov pauv lossis kev puas tsuaj, ua kom ntseeg tau qhov tseeb ntawm cov txheej txheem etching.
2.Kev Tswj Xyuas Thermal Zoo Dua
Kev tswj cua sov yog qhov tseem ceeb hauv kev tsim khoom LED. Cov chips LED muaj zog loj tsim cov cua sov loj thaum lub sijhawm ua haujlwm, thiab yog tias tsis tau yaj kom zoo, nws tuaj yeem cuam tshuam tsis zoo rau kev ua haujlwm ntawm lub chip. SiC qhov kev ua haujlwm cua sov siab ua rau cua sov tawm ntawm lub chip LED thiab kis mus rau ib puag ncig, uas tsis yog tsuas yog ua kom zoo dua cov teebmeem thermal thaum lub sijhawm etching tab sis kuj txhim kho kev ua haujlwm tag nrho thiab lub neej ntev ntawm LED.
3.Txo Kev Ua Phem thiab Kev Ua Kom Zoo Dua
Thaum lub sijhawm ua cov txheej txheem LED etching, cov khoom siv ntawm lub phaj nqa khoom yuav tsum muaj kev ruaj khov tshuaj lom neeg zoo heev kom tsis txhob muaj kev tsis haum tshuaj nrog cov kua lossis cov pa roj corrosive etching, uas yuav ua rau muaj kev ua qias tuaj lossis cuam tshuam rau qhov tseeb ntawm etching. SiC txoj kev tiv thaiv zoo rau feem ntau cov tshuaj corrosive ua rau nws tswj tau qhov ruaj khov mus sij hawm ntev hauv cov chaw muaj tshuaj lom neeg hnyav. Qhov no ua kom ntseeg tau tias cov txheej txheem etching tseem meej thiab sib xws, thaum zam kev tsis haum tshuaj lom neeg uas yuav cuam tshuam tsis zoo rau LED kev ua haujlwm.
4.Cov Khoom seem Etching tsawg kawg nkaus
Cov ntaub ntawv phaj nqa khoom ib txwm muaj peev xwm ua rau muaj kev cuam tshuam nrog cov neeg sawv cev etching, tso cov seem uas nyuaj rau tshem tawm, uas tuaj yeem ua rau qhov zoo ntawm etching thiab cuam tshuam tsis zoo rau kev ua haujlwm ntawm cov chips LED. SiC, vim nws cov tshuaj lom neeg tsis muaj zog, ua kom tsis txhob muaj cov seem no, ua rau muaj txiaj ntsig zoo dua thiab txhim kho kev ntseeg siab ntawm cov khoom kawg.
5.Kev ruaj khov thiab kev ruaj khov siab
Silicon carbide tsis yog tsuas yog muaj cov khoom zoo heev xwb tab sis kuj muaj lub neej ua haujlwm ntev. Piv rau lwm cov ntaub ntawv, SiC tsis tshua muaj kev qaug zog, laus, lossis puas tsuaj raws sijhawm, txo cov nqi kho thiab hloov pauv zaus. Qhov no ua rau kom muaj kev ruaj khov ntawm cov kab ntau lawm.
IV. Cov Teeb Meem thiab Cov Kev Daws Teeb Meem rau SiC Carrier Plates hauv LED Etching
Txawm hais tias SiC muaj ntau qhov zoo hauv kev txiav LED, muaj qee qhov kev cov nyom. Ua ntej, kev ua SiC nyuaj heev vim nws qhov nyuaj thiab brittleness. Yuav tsum tau ceev faj tshwj xeeb thaum txiav thiab polishing kom tsis txhob muaj kev puas tsuaj rau cov khoom. Qhov thib ob, tus nqi ntawm SiC carrier plates siab dua piv rau cov khoom siv ib txwm muaj, uas yuav ua rau tus nqi tag nrho ntawm LED ntau lawm nce ntxiv.
Txhawm rau daws cov teeb meem no, cov kws tshawb fawb thiab cov engineers tab tom ua haujlwm los txhim kho cov txheej txheem tsim khoom ntawm SiC cov ntaub ntawv thiab tshawb nrhiav cov txheej txheem ua haujlwm tshiab los txo cov nqi tsim khoom thiab txhim kho kev ua haujlwm zoo. Piv txwv li, kev ua kom zoo dua cov txheej txheem loj hlob ntawm cov siv lead ua thiab kev siv cov txheej txheem txiav siab heev tuaj yeem txo cov nqi ntawm SiC carrier plates. Tsis tas li ntawd, cov txheej txheem txheej txheem tshiab tuaj yeem txhim kho qhov ruaj khov thiab kev tiv thaiv corrosion ntawm SiC, ntxiv txhim kho nws cov kev ua tau zoo hauv LED etching.
Lub sijhawm tshaj tawm: Lub Kaum Hli-22-2025