Kev tsim khoom siv semiconductor ua haujlwm ntawm qhov kev sib tshuam ntawm qhov tseeb heev thiab qhov chaw ib puag ncig hnyav heev. Cov txheej txheem xws li epitaxy, kev loj hlob ntawm crystal, thiab kev kub siab annealing feem ntau tshaj 1000 ° C, qhov twg txawm tias qhov hloov pauv me me ntawm thermal tuaj yeem txhais tau tias muaj kev hloov pauv ntawm cov zaj duab xis tuab, kev faib tawm dopant, thiab thaum kawg ua tau zoo ntawm lub cuab yeej. Hauv cov ntsiab lus no, cov ntaub ntawv uas ua rau muaj qhov chaw ib puag ncig thermal ruaj khov thiab rov ua dua tsis yog kev pab txhawb nqa - lawv yog lub hauv paus.
Ntawm cov ntaub ntawv no,graphite felttau tshwm sim los ua ib qho tseem ceeb ntawm kev tswj hwm thermal hauv cov txheej txheem semiconductor siab heev. Feem ntau tsis quav ntsej piv rau wafers lossis cov khoom siv deposition, cov txheej txheem rwb thaiv tsev graphite - tshwj xeeb tshaj yog cov graphite purity siab rau kev rwb thaiv tsev kub - ua lub luag haujlwm tseem ceeb hauv kev tswj hwm kev ruaj khov ntawm cov txheej txheem, txhim kho cov txiaj ntsig, thiab txhawb kev hloov mus rau cov semiconductors dav dav xws li SiC thiab GaN.
Cov Khoom Siv ntawm Graphite Felt
Graphite felt, qee zaum hu uacarbon fiber ntau, yog ib yam khoom uas muaj qhov ntxeem tau, sib dua uas muaj cov carbon fibers sib xyaw ua ke uas tau kho cua sov kom ua tiav qhov huv siab thiab ruaj khov ntawm cov qauv. Nyob ntawm cov txheej txheem ua tiav, nws tuaj yeem muab los ua cov khoom rwb thaiv tsev mos mos,graphite tawv nqaij, los yog graphite tawv felt, txhua tus tsim rau cov kev xav tau thermal thiab mechanical tshwj xeeb.
Qhov sib txawv ntawm cov khoom siv rwb thaiv tsev graphite thiab cov khoom siv rwb thaiv tsev ib txwm muaj yog nws cov khoom sib xyaw ua ke. Nws ua rau muaj kev ua haujlwm thermal qis heev, ua rau nws khaws tau cua sov zoo txawm tias nyob rau hauv qhov chaw kub heev. Tib lub sijhawm, nws tswj tau qhov ruaj khov ntawm qhov kub tshaj 2000 ° C hauv inert lossis txo cov huab cua. Nws cov tshuaj lom neeg inertness thiab cov qib impurity qis - tshwj xeeb tshaj yog nyob rau hauv cov ntaub ntawv semiconductor - ua kom muaj kev pheej hmoo tsawg kawg nkaus, uas yog qhov tseem ceeb hauv cov txheej txheem tsim khoom pem hauv ntej.
Hauv cov ntawv thov siab heev, cov graphite uas muaj qhov huv si rau kev rwb thaiv tsev kub tau raug ua kom zoo dua kom txo cov khoom tsis huv ntawm cov hlau mus rau ppm lossis txawm tias qis dua ppm. Qib kev huv no sib haum nrog cov kev cai tswj kev ua qias tuaj ntawm cov chaw tsim khoom semiconductor niaj hnub no, tshwj xeeb tshaj yog hauv cov txheej txheem uas muaj cov khoom sib xyaw ua ke.
Cov Ntawv Thov Hauv Cov Txheej Txheem Semiconductor Tseem Ceeb
Daim ntawv thov tseem ceeb tshaj plaws ntawm graphite felt yog nws lub peev xwm los tsim thiab ruaj khov thermal teb thoob plaws ntau yam txheej txheem kub siab. Hauv epitaxial kev loj hlob, txawm tias rau silicon, silicon carbide, lossis gallium nitride, tswj kev faib tawm kub sib npaug thoob plaws qhov chaw wafer yog qhov tseem ceeb. Graphite felt feem ntau yog koom ua ke rau hauv reactor ua ib txheej insulating, qhwv ib puag ncig cov khoom cua sov, lossis muab tso rau tom qab sensors. Los ntawm kev txo qis radial thiab axial kub gradients, nws ua rau cov nqi loj hlob sib xws thiab cov khoom siv sib xws, ncaj qha cuam tshuam rau kev ua haujlwm ntawm lub cuab yeej thiab cov txiaj ntsig.
Hauv silicon carbide epitaxy, qhov twg qhov kub ntawm cov txheej txheem tuaj yeem mus txog 1600 ° C, graphite rwb thaiv tsev xav tias yuav tsum tsis txhob muaj. Nws lub luag haujlwm nthuav dav tshaj qhov rwb thaiv tsev yooj yim; nws nquag ua rau cov qauv thermal hauv lub reactor, ua kom cov tshuaj tiv thaiv vapor-theem ruaj khov thiab txo cov kev ntxhov siab thermal ntawm wafers. Yog tsis muaj kev tswj hwm zoo li no, cov teeb meem xws li cov tuab tsis sib xws, wafer warpage, thiab kev tsim qhov tsis zoo yuav pom tseeb dua.
Cov txheej txheem loj hlob ntawm cov siv lead ua qhia ntxiv txog qhov tseem ceeb ntawm kev siv graphite felt. Hauv cov txheej txheem xws li kev thauj mus los ntawm lub cev (PVT) rau SiC lossis cov txheej txheem Czochralski rau silicon, qhov kub thiab txias hauv chav loj hlob txiav txim siab qhov zoo ntawm cov siv lead ua. Ntawm no, cov graphite felt lossis graphite hard felt feem ntau siv los tsim cov cheeb tsam rwb thaiv tsev tswj hwm. Los ntawm kev kho qhov ceev ntawm cov khoom siv, qhov tuab, thiab kev teeb tsa, cov kws ua haujlwm tuaj yeem kho qhov cua sov, yog li cuam tshuam rau cov nqi loj hlob ntawm cov siv lead ua, qhov ceev ntawm qhov tsis xws luag, thiab qhov zoo ntawm cov boule. Hauv kev loj hlob ntawm cov siv lead ua SiC, kev tswj hwm thermal zoo li no cuam tshuam ncaj qha nrog kev txo qis ntawm cov micropipes thiab dislocations.
Cov khoom siv graphitekuj ua lub luag haujlwm tseem ceeb hauv kev tso pa tshuaj lom neeg (CVD) thiab cov hlau-organic chemical vapor deposition (MOCVD) systems. Raws li cov khoom siv graphite rwb thaiv tsev, nws pab tswj kom muaj qhov chaw sov nyob hauv lub reactor, txo qhov poob cua sov thiab txo cov teebmeem ntawm phab ntsa txias. Qhov no pab txhawb rau kev sib npaug ntawm cov khoom tso tawm thiab cov txheej txheem rov ua dua, tshwj xeeb tshaj yog nyob rau hauv cov chaw tsim khoom loj.
Hauv cov txheej txheem kub siab annealing thiab diffusion, tshwj xeeb tshaj yog cov uas cuam tshuam nrog cov semiconductors dav-bandgap, graphite felt pab txhawb rau kev siv hluav taws xob zoo thiab thermal stability. Los ntawm kev txo qis cua sov dissipation, nws tso cai rau cov cub tawg kom tswj tau qhov kub thiab txias sib xws nrog cov khoom siv hluav taws xob qis dua, thaum tseem txo cov kev ntxhov siab thermal cycling ntawm cov khoom txheej txheem.
Ntxiv rau kev tsim cov wafer, graphite felt siv dav hauv kev ua cov khoom siv sab saud, suav nrog hmoov sintering, ceramic fabrication, thiab kev ntxuav cov khoom graphite. Cov txheej txheem no, txawm hais tias tsis pom tseeb hauv lub semiconductor fab, yog qhov tseem ceeb rau kev tsim cov khoom siv ua tau zoo uas txhawb nqa kev tsim khoom siv siab heev.
Cov Qauv: Mus rau Kev Ntshiab Siab Dua thiab Kev Koom Tes Ua Haujlwm
Raws li kev lag luam semiconductor hloov zuj zus mus rau qhov kev siv ntau dua - tshwj xeeb tshaj yog hauv cov tsheb fais fab, lub zog rov ua dua tshiab, thiab cov khoom siv hluav taws xob siab - cov kev cai tso rau ntawm cov ntaub ntawv tswj kev kub tau dhau los ua qhov nruj dua. Qhov sib txawv no pom tseeb tshwj xeeb hauv kev siv sai ntawm SiC thiab GaN thev naus laus zis, qhov twg qhov kub ua haujlwm siab dua thiab cov txheej txheem nruj dua xav tau kev ua haujlwm rwb thaiv tsev zoo dua.
Ib qho ntawm cov kev txhim kho tseem ceeb tshaj plaws yog kev thawb mus rau cov ntaub ntawv uas muaj cov khoom siv huv siab heev. Cov khoom siv graphite uas muaj cov khoom siv huv siab rau kev rwb thaiv tsev kub tau raug tsim los nrog cov qib tsis huv qis dua kom ua tau raws li cov qauv kev ua qias tuaj ntawm cov khoom siv tiam tom ntej. Tib lub sijhawm, cov qauv tsim kho tshiab xws li cov khoom siv graphite uas ruaj khov thiab cov khoom siv graphite uas nyuaj ua rau muaj kev tswj hwm qhov kub thiab txias zoo dua thiab lub neej ua haujlwm ntev dua.
Lwm qhov tseem ceeb yog kev sib xyaw ua ke ntawm cov txheej tiv thaiv, xws li silicon carbide (SiC), rau ntawm cov nplaim graphite. Cov txheej no ua rau muaj kev tiv thaiv oxidation, txo cov khoom me me, thiab ua kom lub zog ua haujlwm ntev dua, daws qee qhov kev txwv ntawm cov khoom siv rwb thaiv tsev uas muaj carbon.
Saib tom ntej,graphite feltyuav hloov zuj zus los ntawm cov khoom siv rwb thaiv tsev passive mus rau hauv ib qho khoom siv semiconductor uas tau tsim kho kom nquag dua. Los ntawm kev ua cov khoom siv siab heev thiab kev hloov kho kom haum, nws yuav txuas ntxiv txhawb nqa kev lag luam nrhiav kev ua haujlwm zoo dua, kev ntseeg siab dua, thiab kev tswj hwm cov txheej txheem nruj dua.
Lub sijhawm tshaj tawm: Plaub Hlis-17-2026