Tlhahiso ea semiconductor e sebetsa moo ho kopanang libaka tse nepahetseng haholo le tse feteletseng. Mekhoa e kang epitaxy, kholo ea kristale, le ho kenngoa ha mocheso o phahameng khafetsa ho feta 1000°C, moo esita le liphetoho tse nyane tsa mocheso li ka fetolelang liphetoho tse ka lekanngoang botenya ba filimi, kabo ea dopant, le ts'ebetso ea sesebelisoa qetellong. Moelelong ona, thepa e nolofalletsang tikoloho e tsitsitseng le e ka phetoang ea mocheso ha se ea thusang - ke ea motheo.
Har'a lisebelisoa tsena,graphite e ikutloae hlahile e le sesebelisoa sa bohlokoa sa taolo ea mocheso lits'ebetsong tse tsoetseng pele tsa semiconductor. Hangata e hlokomolohuoa ha e bapisoa le li-wafer kapa lisebelisoa tsa ho boloka mocheso, litsamaiso tsa ho kenya graphite ka har'a graphite—haholo-holo graphite e hloekileng haholo e ikutloang bakeng sa ho kenya mocheso—li bapala karolo ea bohlokoa ho bolokeng botsitso ba ts'ebetso, ho ntlafatsa chai, le ho tšehetsa phetoho ho ea ho li-semiconductor tse nang le lekhalo le leholo joalo ka SiC le GaN.
Sebopeho sa Thepa sa Graphite Felt
Graphite felt, eo ka linako tse ling e bitsoangfelt ea fiber ea khabone, ke thepa e bobebe, e nang le masoba e entsoeng ka likhoele tsa khabone tse tšoasitsoeng tse hloekisitsoeng ka mocheso ho fihlela bohloeki bo phahameng le botsitso ba sebopeho. Ho latela mekhoa ea ts'ebetso, e ka fanoa e le sesebelisoa se bonolo sa ho thibela ho ruruha,graphite e thata e ikutloa, kapa graphite hard felt, e 'ngoe le e 'ngoe e etselitsoe litlhoko tse itseng tsa mocheso le tsa mechini.
Se khethollang graphite insulation felt ho thepa e tloaelehileng ea insulation ke motsoako oa eona o ikhethang oa thepa. E bontša conductivity e tlase haholo ea mocheso, e nolofalletsang ho boloka mocheso hantle esita le libakeng tse nang le mocheso o phahameng haholo. Ka nako e ts'oanang, e boloka botsitso ba sebopeho mochesong o fetang 2000°C moeeng o sa sebetseng kapa o fokotsang. Ho se sebetse ha eona ka lik'hemik'hale le maemo a tlase a litšila - haholo-holo thepa ea sehlopha sa semiconductor - e netefatsa kotsi e fokolang ea tšilafalo, e leng ntho ea bohlokoa lits'ebetsong tsa tlhahiso ea pele.
Litšebelisong tse tsoetseng pele, graphite e nang le bohloeki bo phahameng bakeng sa ho thibela mocheso e ntlafatsoa haholoanyane ho fokotsa litšila tsa tšepe ho ea maemong a ppm kapa esita le a sub-ppm. Boemo bona ba bohloeki bo tsamaisana le litlhoko tse thata tsa taolo ea tšilafalo ea masela a sejoale-joale a semiconductor, haholo-holo lits'ebetsong tse kenyeletsang li-semiconductor tse kopaneng.
Likopo Mekhoeng ea Bohlokoa ea Semiconductor
Tšebeliso ea bohlokoa ka ho fetisisa ea graphite felt e ho bokhoni ba eona ba ho etsa meralo le ho tsitsisa masimo a mocheso ho pholletsa le mefuta e mengata ea lits'ebetso tsa mocheso o phahameng. Kholong ea epitaxial, ebang ke bakeng sa silicon, silicon carbide, kapa gallium nitride, ho boloka kabo e ts'oanang ea mocheso ho pholletsa le bokaholimo ba wafer ho bohlokoa. Graphite felt hangata e kopantsoe le reactor e le lera le sireletsang mocheso, le phuthetsoeng ho potoloha likarolo tsa ho futhumatsa, kapa le beoa ka mor'a li-sensor. Ka ho fokotsa li-gradient tsa mocheso oa radial le axial, e nolofalletsa sekhahla se tsitsitseng sa kholo le thepa e ts'oanang ea thepa, e amang ka kotloloho ts'ebetso ea sesebelisoa le chai.
Ho epitaxy ea silicon carbide, moo mocheso oa ts'ebetso o ka atamelang 1600°C, felt ea graphite e fetoha ea bohlokoa haholo. Karolo ea eona e fetela ka nģ'ane ho insulation e bonolo; e bopa profil ea mocheso ka mafolofolo ka har'a reactor, e netefatsa likarabelo tse tsitsitseng tsa mouoane le ho fokotsa khatello ea mocheso ho li-wafer. Ntle le taolo e joalo, litaba tse kang ho se tšoane ha botenya, warpage ea wafer, le ho thehoa ha sekoli li bonahala haholo.
Mekhoa ea kholo ea kristale e totobatsa bohlokoa ba maano a graphite felt. Mekhoeng e kang ho tsamaisoa ha mouoane oa 'mele (PVT) bakeng sa SiC kapa ts'ebetso ea Czochralski bakeng sa silicon, gradient ea mocheso ka har'a kamore ea kholo e etsa qeto ea boleng ba kristale. Mona, graphite felt e thata kapa graphite felt e atisa ho sebelisoa ho theha libaka tse laoloang tsa ho thibela mocheso. Ka ho fetola bongata ba felt, botenya le sebopeho, baenjiniere ba ka lokisa phallo ea mocheso hantle, ka hona ba susumetsa sekhahla sa kholo ea kristale, bongata ba sekoli, le boleng ba boule ka kakaretso. Kholong ea kristale ea SiC, tsamaiso e joalo ea mocheso e amana ka ho toba le phokotso ea li-micropipe le ho falla.
Graphite e ikutloae boetse e bapala karolo e tšehetsang empa e le ea bohlokoa ho tsamaisong ea ho boloka mouoane oa lik'hemik'hale (CVD) le lits'ebetsong tsa ho boloka mouoane oa lik'hemik'hale tsa tšepe-organic (MOCVD). Jwalo ka ha ho ikutloa ha graphite insulation, e thusa ho boloka tikoloho e tsitsitseng ea mocheso ka har'a reactor, e fokotsa tahlehelo ea mocheso le ho fokotsa litlamorao tsa lebota le batang. Sena se tlatsetsa ho ntlafatseng ho ts'oana ha ho boloka le ho pheta-pheta ha ts'ebetso, haholo-holo libakeng tse kholo tsa tlhahiso.
Lits'ebetsong tsa ho annealing le ho hasanya mocheso o phahameng, haholo-holo tse amanang le li-semiconductors tse nang le lekhalo le leholo, graphite felt e thusa ho boloka matla le botsitso ba mocheso. Ka ho fokotsa ho qhalana ha mocheso, e lumella lionto ho boloka mocheso o tsitsitseng ka ho kenya matla a tlase, ha ka nako e ts'oanang e fokotsa khatello ea potoloho ea mocheso likarolong tsa ts'ebetso.
Ka ntle ho tlhahiso ea wafer, graphite felt e sebelisoa haholo ts'ebetsong ea thepa e holimo, ho kenyeletsoa le ho sila phofo, tlhahiso ea ceramic, le ho hloekisa likarolo tsa graphite. Ts'ebetso tsena, le hoja li sa bonahale kamehla ka har'a lesela la semiconductor, li bohlokoa bakeng sa ho hlahisa thepa e sebetsang hantle e tšehetsang tlhahiso ea lisebelisoa tse tsoetseng pele.
Mekhoa: Ho ea ho Bohloeki bo Phahameng le Kopanyo ea Ts'ebetso
Ha indasteri ea li-semiconductor e ntse e fetoha ho ea lits'ebetsong tse thata haholo—haholo-holo likoloing tsa motlakase, matla a nchafatsoang, le lisebelisoa tsa elektroniki tse sebelisang maqhubu a phahameng—litlhoko tse behiloeng thepa ea taolo ea mocheso li ntse li thatafala le ho feta. Mokhoa ona o bonahala haholo-holo ka lebaka la ho amoheloa ka potlako ha mahlale a SiC le GaN, moo mocheso o phahameng oa ts'ebetso le lifensetere tse thata tsa ts'ebetso li hlokang ts'ebetso e phahameng ea ho kenya mocheso.
E 'ngoe ea lintlafatso tsa bohlokoa ka ho fetisisa ke ho sutumelletsa ho ea thepa e hloekileng haholo. Graphite e nang le bohloeki bo phahameng bakeng sa ho thibela mocheso e ntse e etsoa ka maemo a litšila a tlase ho fihlela maemo a tšilafalo a masela a moloko o latelang. Ka nako e ts'oanang, boqapi ba meaho bo kang graphite e tiileng le graphite e thata bo nolofalletsa taolo e nepahetseng ea tšimo ea mocheso le bophelo ba nako e telele ba tšebeletso.
Mokhoa o mong oa bohlokoa ke ho kopanngoa ha liphahlo tse sireletsang, tse kang silicon carbide (SiC), holim'a libaka tse nang le graphite felt. Liphahlo tsena li ntlafatsa khanyetso ea oxidation, li fokotsa tlhahiso ea likaroloana, 'me li atolosa ho tšoarella ha ts'ebetso, li sebetsana le tse ling tsa mefokolo ea setso ea thepa ea ho thibela e thehiloeng khaboneng.
Ha re sheba pele,graphite e ikutloaho lebeletsoe hore e fetohe ho tloha setsing sa ho thibela ho kenella ka har'a motlakase se sa sebetseng ho ea karolong e entsoeng ka boqapi haholoanyane ea moralo oa lisebelisoa tsa semiconductor. Ka ts'ebetso e tsoetseng pele ea thepa le ho e etsa ka mokhoa o ikhethileng, e tla tsoela pele ho tšehetsa ho phehella ha indasteri katleho e phahameng, ts'epo e kholoanyane le taolo e tiileng ea ts'ebetso.
Nako ea poso: Mmesa-17-2026