Kugadzirwa kwemasemiconductor kunoshanda panzvimbo dzinosangana nzvimbo dzakanyatsojeka uye nzvimbo dzakanyanya kunyanyisa. Maitiro akadai se epitaxy, kukura kwekristaro, uye annealing yekupisa kwakanyanya nguva dzose anopfuura 1000°C, uko kunyangwe kuchinja kudiki kwekupisa kunogona kushandura mukuchinja kunoyerwa muukobvu hwefirimu, kugoverwa kwedopant, uye pakupedzisira mashandiro emudziyo. Munyaya iyi, zvinhu zvinogonesa nzvimbo dzakagadzikana uye dzinodzokororwa dzekupisa hazvisi zvekubatsira - ndezvekutanga.
Pakati pezvinhu izvi,graphite yakanzwayave chinhu chakakosha chinogonesa kutungamira kupisa mumabasa epamusoro e semiconductor. Kazhinji hazviwanzo tariswa kana zvichienzaniswa ne wafers kana michina yekuisa, masisitimu e graphite insulation—kunyanya graphite yakachena kwazvo yainzwa yekudzivirira kupisa—anoita basa guru mukuchengetedza kugadzikana kwemaitiro, kuvandudza goho, uye kutsigira shanduko kuenda kuma semiconductors ane bandgap yakakura akadai seSiC neGaN.
Rudzi rweGraphite Felt
Graphite felt, dzimwe nguva inonzikabhoni fiber yakanzwa, chinhu chakareruka, chine maburi, chakagadzirwa nefibers dzekabhoni dzakabatwa dzakagadziriswa nekupisa kuti dzive dzakachena uye dzakagadzikana. Zvichienderana nenzira dzekugadzirisa, chinogona kupihwa sefenzi yekudzivirira yakapfava,graphite yakaoma yakanzwa, kana kuti graphite hard felt, imwe neimwe yakagadzirirwa zvinodiwa nekupisa uye zvemakanika.
Chinosiyanisa graphite insulation felt nezvinhu zvemazuva ano zvekuputira imhando yemusanganiswa wayo wehunhu hwakasiyana. Inoratidza kupisa kwakaderera zvakanyanya, zvichiita kuti igare ichipisa zvakanaka kunyangwe munzvimbo dzine tembiricha yakanyanya. Panguva imwe chete, inochengetedza chimiro chayo patembiricha inodarika 2000°C munzvimbo dzisina kusimba kana dzinodzikisa. Kusasimba kwayo kwemakemikari uye kusachena kwakaderera—kunyanya muzvinhu zvemhando yepamusoro—zvinoita kuti pave nenjodzi shoma yekusvibiswa, izvo zvakakosha mukugadzirwa kwepamberi.
Mukushandiswa kwepamusoro-soro, girafiti yakacheneswa zvakanyanya yekudzivirira kupisa inonatswa zvakare kuderedza kusvibiswa kwesimbi kusvika pamazinga eppm kana kunyange pasi peppm. Kuchena uku kunoenderana nezvinodiwa zvakasimba zvekudzora kusvibiswa kwezvigadzirwa zvemazuva ano zve semiconductor, kunyanya mumabasa anosanganisira ma compound semiconductors.
Mashandisirwo muKey Semiconductor Processes
Kushandiswa kukuru kwegraphite felt kuri mukukwanisa kwayo kugadzira nekudzikamisa minda yekupisa mumhando dzakasiyana-siyana dzekupisa kwakanyanya. Mukukura kwe epitaxial, kungave kuri kwesilicon, silicon carbide, kana gallium nitride, kuchengetedza kupararira kwekupisa kwakafanana pamusoro pewafer kwakakosha. Graphite felt inowanzo batanidzwa mureactor sechikamu chinodzivirira kupisa, chakaputirwa nezvinhu zvinodziya, kana kuiswa kumashure kwemasensa. Nekuderedza radial uye axial temperature gradients, inoita kuti kukura kuenderane uye hunhu hwezvinhu zvakafanana, zvichikanganisa zvakananga mashandiro emudziyo uye goho.
Mu silicon carbide epitaxy, uko tembiricha yekushanda inogona kusvika 1600°C, graphite insulation felt inova yakakosha. Basa rayo rinopfuura kuputira nyore; inoumba chimiro chekupisa mukati me reactor, ichivimbisa kugadzikana kwevapor-phase reactions uye kuderedza kushushikana kwekupisa pama wafers. Pasina kudzora kwakadaro, matambudziko akadai sekusaenzana kweukobvu, warpage ye wafer, uye kugadzirwa kwezvikanganiso zvinova pachena zvakanyanya.
Maitiro ekukura kwekristaro anowedzera kuratidza kukosha kwegraphite felt. Munzira dzakadai sekufambisa kwemhepo inodziya (PVT) yeSiC kana maitiro eCzochralski esilicon, kupenya kwekupisa mukati mekamuri yekukura kunosarudza kunaka kwekristaro. Pano, rigid graphite felt kana graphite hard felt inowanzo shandiswa kugadzira nzvimbo dzinodzora insulation. Nekugadzirisa huwandu hwefelt, ukobvu, uye magadzirirwo, mainjiniya vanogona kugadzirisa kuyerera kwekupisa, nokudaro vachikanganisa mwero wekukura kwekristaro, defect density, uye mhando yeboule yese. Mukukura kwekristaro yeSiC, kutonga kwakadaro kwekupisa kunoenderana zvakananga nekudzikiswa kwema micropipes uye dislocations.
Graphite yakanzwaInobatsirawo asi ine basa rakakosha mukuchengetedza vapor deposition yemakemikari (CVD) uye metal-organic chemical vapor deposition (MOCVD) systems. Sezvinoita graphite insulation, inobatsira kuchengetedza nharaunda yekupisa yakagadzikana mukati me reactor, ichideredza kurasikirwa nekupisa uye ichideredza migumisiro ye cold-wall. Izvi zvinobatsira mukuvandudza kufanana kwekuisa uye kudzokorora kwemaitiro, kunyanya munzvimbo dzakakura dzekugadzira.
Mumaitiro ekupisa kwakanyanya uye kupararira, kunyanya ayo ane chekuita nema semiconductors ane bandgap yakakura, graphite felt inobatsira mukushanda zvakanaka kwesimba uye kugadzikana kwekupisa. Nekuderedza kupisa, inobvumira maovheni kuchengetedza tembiricha dzakafanana nemagetsi mashoma, ukuwo ichideredzawo kushushikana kwekupisa pazvikamu zvekushanda.
Kupfuura kugadzira wafer, graphite felt inoshandiswa zvakanyanya mukugadzira zvinhu zvepamusoro, kusanganisira kusvina hupfu, kugadzira ceramic, uye kucheneswa kwezvikamu zvegraphite. Maitiro aya, kunyange asingawanzoonekwa mukati mezvigadzirwa zve semiconductor, akakosha pakugadzira zvinhu zvinoshanda zvakanyanya zvinotsigira kugadzirwa kwemidziyo yepamusoro.
Mafambiro: Kuenda Kukuchena Kwakakwirira uye Kubatanidzwa Kwebasa
Sezvo indasitiri ye semiconductor ichifambira mberi ichienda kune mashandisirwo akaomarara—kunyanya mumotokari dzemagetsi, simba rinodzokororwa, uye magetsi ane frequency yakakwira—zvinodiwa pamidziyo yekutarisira kupisa zviri kuramba zvichiwedzera kuoma. Maitiro aya anoonekwa zvakanyanya mukushandiswa nekukurumidza kwetekinoroji yeSiC neGaN, uko tembiricha yepamusoro yekushanda uye mahwindo ekushanda akasimba zvinoda kushanda kwepamusoro kwekudzivirira kupisa.
Chimwe chezvinhu zvakakosha zvikuru ndechekusimudzira zvinhu zvine hutsanana hwakanyanya. Graphite yakacheneswa zvakanyanya yekudzivirira kupisa iri kugadzirwa nemazinga ekusvibiswa akaderera kuti isangane nezvinodiwa zvezvigadzirwa zvechizvarwa chinotevera. Panguva imwe chete, hunyanzvi hwekuvaka hwakadai segraphite yakagadzika uye graphite yakagadzika yakaoma iri kugonesa kudzora nzvimbo yekupisa zvakanyanya uye hupenyu hwebasa hwakareba.
Imwe nzira yakakosha ndeyekubatanidzwa kwezvipfeko zvinodzivirira, zvakaita sesilicon carbide (SiC), pamusoro pepamusoro pe graphite felt. Zvipfeko izvi zvinowedzera kuramba kwe oxidation, zvinoderedza kugadzirwa kwezvikamu, uye zvinowedzera kugara kwenguva refu kwekushanda, zvichigadzirisa zvimwe zvezvirambidzo zvechinyakare zve carbon-based insulation materials.
Kutarisa mberi,graphite yakanzwainotarisirwa kushanduka kubva pakushandisa nzira yekudzivirira kupisa kuita chikamu chakagadzirwa zvakanyanya chekugadzira michina ye semiconductor. Kuburikidza nekugadzirisa zvinhu zvepamusoro uye kugadzirisa, icharamba ichitsigira kutsvaga kweindasitiri kushanda zvakanaka, kuvimbika kukuru, uye kudzora maitiro kwakasimba.
Nguva yekutumira: Kubvumbi-17-2026