Ib nrab thawj zaug -SiC epitaxial khoom siv qhov chaw

Kev Piav Qhia Luv:

SiC coated graphite qhov chaw rau SiC epitaxial khoom siv los ntawm LPE Ltalis

Kev taw qhia khoom thiab siv: SiC epitaxial khoom siv tshuaj tiv thaiv chamber lwm qhov ntawm lub tsheb, tswj qhov kub thiab txias

Qhov chaw ntawm cov khoom siv: hauv chav ua tshuaj tiv thaiv, tsis txhob sib cuag ncaj qha nrog lub wafer

Cov khoom tseem ceeb ntawm lub zog: cov khoom siv hluav taws xob

Kev ua lag luam tseem ceeb: cov tsheb fais fab tshiab