Quartz Wafer Nkojyog ib lub cuab yeej tseem ceeb hauv kev tsim khoom semiconductor, kev tsim cov photovoltaic cell thiab kev tshawb fawb thiab kev txhim kho cov khoom siv siab heev, tsim los rau kev hloov pauv wafer ruaj khov thiab tso rau hauv cov txheej txheem kub siab. Cov khoom no yog ua los ntawm ultra-high purity fused silica (SiO2), nrog kev tiv taus kub zoo heev, kev ruaj khov tshuaj lom neeg thiab cov yam ntxwv tsis muaj hlau ntau, tsim nyog rau lub cub tawg diffusion, lub cub tawg oxidation, PECVD / LPCVD thiab lwm yam khoom siv, siv dav hauv wafer txheej, ion implantation, kub annealing thiab lwm yam txheej txheem tseem ceeb.
Cov txiaj ntsig tseem ceeb ntawm VET Energy lub nkoj quartz:
- Cov khoom siv purity siab heev
Kev Huv Si ≥99.99%: Cov ntsiab lus tsis huv (Na, K, Fe, thiab lwm yam) <5ppm, zam kev ua qias tuaj ntawm wafer thiab lav qhov ua tau zoo ntawm cov chip.
Cov nag lossis daus tsawg thiab kev nqus dej tsawg: qhov saum npoo yog super-polished (Ra≤0.4μm) kom txo cov khoom me me thiab cov roj seem. - Kev ruaj khov kub siab
Qhov kub txwv: Kub ua haujlwm ntev ntawm 1100 ℃, lub sijhawm luv luv ntawm 1300 ℃, tsis muaj kev hloov pauv, tsis muaj kev nag lossis daus siv lead ua.
Cov coefficient ntawm kev nthuav dav thermal qis (5.5x10-7 / ℃), tiv taus kev poob siab thermal zoo heev, hloov kho tau rau qhov kub nce thiab poob sai (piv txwv li RTP quick annealing). - Kev tsim qauv zoo meej
Qhov precision ± 0.1 hli: phim 2 "txog 12" wafers, qhov yuam kev sib txawv <0.05 hli, kom ntseeg tau tias wafers tsis muaj offset.
Muaj peev xwm thauj khoom siab: Thauj khoom siab tshaj plaws ntawm 50 wafers (hauv cov nqe lus ntawm 12 "wafers) hauv ib lub nkoj, txhawb nqa kev hloov pauv ruaj khov ntawm cov wafers nyias nyias (≥100um). - Kev tsis muaj tshuaj lom neeg
Kev tiv thaiv xeb: Tiv taus cov kua qaub (tshwj tsis yog HF), alkali thiab cov kuab tshuaj organic, sib xws nrog CMP cov txheej txheem ntxuav.
Kev nruj ntawm cov roj zoo heev: Qhov xau <5x10-10 Pa.m3/s, tsim rau qhov chaw nqus tsev thiab tiv thaiv cov pa roj. - Lub neej ntev thiab kev saib xyuas tau zoo
Lub neej ntev ≥ 5000 lub voj voog (ua haujlwm ib txwm), qhov chaw tuaj yeem ntxuav thiab siv dua, txo cov nqi tag nrho.
Tsim qauv modular: txhawb nqa kev hloov pauv ib nrab (piv txwv li ib lub hniav nkoj), txo lub sijhawm tsis ua haujlwm.
Peb muab ob qho tib si pob tshab thiab cov khoom siv khov kho raws li cov neeg siv khoom xav tau:
Ningbo VET Energy Technology Co., Ltd yog ib lub tuam txhab ua lag luam siab heev uas tsom mus rau kev tsim khoom thiab muag cov khoom siv siab heev, cov ntaub ntawv thiab thev naus laus zis suav nrog graphite, silicon carbide, ceramics, kev kho qhov chaw zoo li SiC txheej, TaC txheej, iav carbon txheej, pyrolytic carbon txheej, thiab lwm yam, cov khoom no tau siv dav hauv photovoltaic, semiconductor, lub zog tshiab, metallurgy, thiab lwm yam.
Peb pab neeg kev tshaj lij los ntawm cov tsev kawm tshawb fawb hauv tsev sab saum toj, thiab tau tsim ntau yam thev naus laus zis patented los xyuas kom meej tias cov khoom ua tau zoo thiab zoo, kuj tseem tuaj yeem muab cov neeg siv khoom nrog cov khoom siv tshaj lij.
