Imashini nini (WBG) igice cya kabiri cyerekanwa na silicon karbide (SiC) na nitride ya gallium (GaN) byitabiriwe n'abantu benshi.Abantu bafite ibyiringiro byinshi kubijyanye no gukoresha karibide ya silicon mumodoka yamashanyarazi hamwe na gride yamashanyarazi, hamwe nuburyo bwo gukoresha nitride ya gallium mugushakisha byihuse.Mu myaka yashize, ubushakashatsi bwakozwe kuri Ga2O3, AlN nibikoresho bya diyama byateye imbere cyane, bituma ibikoresho bya semiconductor ultra-rugari byibandwaho cyane.Muri byo, okiside ya gallium (Ga2O3) nigikoresho kigaragara cyane-cyagutse-cyuma cya semiconductor gifite icyuho cya bande ya 4.8 eV, icyerekezo gikomeye cyo gusenyuka kumurima wa cm 8 MV cm-1, umuvuduko wuzuye wa 2E7cm s-1, nibintu byiza bya Baliga bifite ubuziranenge bwa 3000, byitabirwa cyane mubijyanye na voltage nini na electronique yumuriro mwinshi.
1. Gallium oxyde iranga ibintu
Ga2O3 ifite icyuho kinini (4.8 eV), byitezwe ko izagera kuri voltage nyinshi zidashobora kwihanganira hamwe nubushobozi buhanitse, kandi irashobora kugira ubushobozi bwo guhangana n’umuvuduko mwinshi w’imihindagurikire y’ikigereranyo gito, bigatuma bibandwaho mu bushakashatsi buriho.Mubyongeyeho, Ga2O3 ntabwo ifite ibintu byiza gusa bifatika, ahubwo inatanga uburyo butandukanye bworoshye bwo guhinduranya n-tekinoroji ya doping, ndetse no gukura kwinshi kugiciro gito hamwe na tekinoroji ya epitaxy.Kugeza ubu, ibyiciro bitanu bitandukanye bya kristu byavumbuwe muri Ga2O3, harimo corundum (α), monoclinic (β), spinel ifite inenge (γ), cubic (δ) na orthorhombic (ɛ).Ubushyuhe bwa Thermodynamic ni, murutonde, γ, δ, α, ɛ, na β.Birakwiye ko tumenya ko monoclinic β-Ga2O3 niyo itajegajega cyane cyane ku bushyuhe bwo hejuru, mugihe ibindi byiciro byapimwa hejuru yubushyuhe bwicyumba kandi bikunda guhinduka β icyiciro mubihe byubushyuhe bwihariye.Kubwibyo, iterambere ryibikoresho bishingiye kuri Ga-Ga2O3 byahindutse intego nyamukuru mubijyanye na electronics power mumyaka yashize.
Imbonerahamwe 1 Kugereranya ibintu bimwe na bimwe bya semiconductor
Imiterere ya kristu ya monoclinicβ-Ga2O3 irerekanwa mu mbonerahamwe ya 1. Ibipimo byayo birimo a = 12.21 Å, b = 3.04 Å, c = 5.8 Å, na β = 103.8 °.Ingirabuzimafatizo igizwe na atome ya Ga (I) hamwe na tetrahedral ihindagurika hamwe na atom ya Ga (II) hamwe na octahedral.Hariho uburyo butatu butandukanye bwa atome ya ogisijeni murwego rwa "twist cubic", harimo atom ebyiri zahujwe na O (I) na O (II) hamwe na atome imwe ya O (III).Guhuza ubu bwoko bubiri bwo guhuza atomike biganisha kuri anisotropy ya β-Ga2O3 hamwe nibintu byihariye muri fiziki, kwangirika kwimiti, optique na electronics.
Igishushanyo 1 Igishushanyo mbonera cyimiterere ya monoclinic β-Ga2O3 kristu
Ukurikije ibitekerezo bya bande yingufu, agaciro ntarengwa k'umutwe wa β-Ga2O3 ukomoka kuri reta yingufu ihuye na 4s0 ya Hybrid orbit ya Ga atom.Itandukaniro ryingufu hagati yumubare muto wumurongo wogutwara nurwego rwingufu za vacuum (ingufu za electron affinity) zirapimwa.ni 4 eV.Imashanyarazi ikora neza ya β-Ga2O3 yapimwe nka 0.28–0.33 njyewe hamwe nuburyo bwiza bwa elegitoronike.Nyamara, umurongo wa valence ntarengwa werekana umurongo wa Ek umurongo utagabanije ufite kugabanuka guke cyane hamwe na O2p ya orbitale cyane, byerekana ko ibyobo biherereye cyane.Ibiranga bitera ikibazo gikomeye cyo kugera kuri p-doping muri β-Ga2O3.Nubwo P-doping ishobora kugerwaho, umwobo μ uguma kurwego rwo hasi cyane.2. Gukura kwinshi kwa gallium oxyde ya kristu Kugeza ubu, uburyo bwo gukura bwa β-Ga2O3 ubwinshi bwa kristal substrate ni uburyo bwo gukurura kristu, nka Czochralski (CZ), uburyo bwo kugaburira amafirime yoroheje (Edge -Gusobanura neza-kugaburira film , EFG), Bridgman (rtical cyangwa horizontal Bridgman, HB cyangwa VB) hamwe na zone ireremba (zone ireremba, FZ).Muburyo bwose, Czochralski hamwe nuburyo bwasobanuwe neza bwo kugaburira firime yoroheje biteganijwe ko aribwo buryo bwiza cyane bwo gutanga umusaruro mwinshi wa waferi ya Ga-Ga 2O3 mugihe kiri imbere, kuko zishobora icyarimwe kugera kubunini bunini nubucucike buke.Kugeza ubu, Ubuyapani bwa Novel Crystal Technology bwabonye matrike yubucuruzi yo gukura gushonga β-Ga2O3.
2.1 Uburyo bwa Czochralski
Ihame ryuburyo bwa Czochralski nuko urwego rwimbuto rwabanje gutwikirwa, hanyuma kristu imwe ikururwa gahoro gahoro.Uburyo bwa Czochralski burakomeye cyane kuri β-Ga2O3 bitewe nigiciro cyayo, ubushobozi bunini, hamwe nubwiyongere bukomeye bwa kristu.Ariko, kubera guhangayikishwa nubushyuhe mugihe cyo kwiyongera kwubushyuhe bwo hejuru bwa Ga2O3, guhumeka kwa kristu imwe, ibikoresho bishonga, no kwangirika kwa Ir crucible bizabaho.Nibisubizo byingorabahizi mugushikira d-doping nkeya muri Ga2O3.Kwinjiza urugero rukwiye rwa ogisijeni mukirere gikura nuburyo bumwe bwo gukemura iki kibazo.Binyuze mu gutezimbere, ubuziranenge bwa 2-cm β-Ga2O3 hamwe nubushakashatsi bwa elegitoronike yubusa bwa 10 ^ 16 ~ 10 ^ 19 cm-3 hamwe nubucucike bwa electron bwa cm 160 / Vs bwakuze neza nuburyo bwa Czochralski.
Igishushanyo 2 Kirisiti imwe ya β-Ga2O3 ikura nuburyo bwa Czochralski
2.2 Uburyo bwo kugaburira firime
Uburyo bwo kugaburira amafiriti yoroheje yerekana uburyo bwo kugaburira ibicuruzwa mu bucuruzi bunini bwa Ga2O3 ibikoresho bya kristu.Ihame ryubu buryo nugushira gushonga muburyo bwa capillary, hanyuma gushonga bikazamuka mubibumbano binyuze mubikorwa bya capillary.Hejuru, firime yoroheje ikora kandi ikwirakwira mu mpande zose mugihe ushishikajwe no gutondekanya imbuto.Byongeye kandi, impande zo hejuru zishobora kugenzurwa kugirango habeho kristu muri flake, tebes, cyangwa geometrie yifuza.Uburyo bwasobanuwe neza bwo kugaburira firime ya Ga2O3 itanga umuvuduko wubwiyongere bwihuse na diameter nini.Igishushanyo cya 3 cyerekana igishushanyo cya β-Ga2O3 kristu imwe.Mubyongeyeho, ukurikije ingano yubunini, santimetero 2 na santimetero 4 β-Ga2O3 substrates zifite umucyo mwiza kandi uburinganire bwaracururizwaga, mugihe insimburangingo ya santimetero 6 yerekanwa mubushakashatsi bwogucuruza ejo hazaza.Vuba aha, ibikoresho binini bizenguruka kimwe-kristu yibikoresho nabyo byabonetse hamwe (−201) icyerekezo.Mubyongeyeho, uburyo bwo kugaburira firime β-Ga2O3 nabwo buteza imbere doping yibintu byinzibacyuho, bigatuma ubushakashatsi nogutegura Ga2O3 bishoboka.
Igishushanyo cya 3 β-Ga2O3 kristu imwe ikura nuburyo bwo kugaburira firime
2.3 Uburyo bwa Bridgeman
Muburyo bwa Bridgeman, kristu zakozwe muburyo bukomeye bugenda buhoro buhoro binyuze mubushyuhe.Inzira irashobora gukorwa muburyo butambitse cyangwa buhagaritse, mubisanzwe ukoresheje kuzenguruka gukomeye.Birakwiye ko tumenya ko ubu buryo bushobora cyangwa budashobora gukoresha imbuto za kirisiti.Abakozi ba Bridgman gakondo ntibabura kubona neza uburyo bwo gukura no gushonga kandi bigomba kugenzura ubushyuhe bwuzuye.Uburyo bwa vertical Bridgman bukoreshwa cyane cyane mu mikurire ya β-Ga2O3 kandi buzwiho ubushobozi bwo gukura mu kirere.Mugihe cyuburyo bwa vertical Bridgman uburyo bwo gukura, igihombo rusange cyo gushonga no kubikwa kibikwa munsi ya 1%, bigafasha gukura kwinshi β-Ga2O3 kristu imwe hamwe nigihombo gito.
Igishushanyo 4 Kirisiti imwe ya β-Ga2O3 ikura nuburyo bwa Bridgeman
2.4 Uburyo bwo kureremba
Uburyo bwa kareremba bureremba bukemura ikibazo cyo kwanduza kristu kubikoresho byingenzi kandi bigabanya amafaranga menshi ajyanye nubushyuhe bwo hejuru bwumuriro wa infragre.Muri ubu buryo bwo gukura, gushonga birashobora gushyukwa n itara aho kuba isoko ya RF, bityo bikoroshya ibisabwa mubikoresho bikura.Nubwo imiterere nubwiza bwa kristu ya β-Ga2O3 ikura nuburyo bwa kareremba ireremba bitarakorwa neza, ubu buryo burafungura uburyo butanga ikizere cyo gukura-kwera cyane β-Ga2O3 muburyo bwingengo yimari ya kristu.
Igicapo 5 β-Ga2O3 kristu imwe ikura nuburyo bwo kureremba.
Igihe cyo kohereza: Gicurasi-30-2024