Ibisabwa n'inganda za semiconductors ku bikoresho bya grafiti ni byinshi cyane, ingano nto ya grafiti ifite imiterere yo hejuru, irwanya ubushyuhe bwinshi, imbaraga nyinshi, igihombo gito n'ibindi byiza, nko: ibumba ry'ibicuruzwa bya grafiti.Kubera ko ibikoresho bya grafiti bikoreshwa mu nganda za semiconductor (harimo n'ibishyushya n'ibyuma byabyo bya sintered) bisabwa kwihanganira ibikorwa byo gushyushya no gukonjesha kenshi, kugira ngo byongere igihe cyo gukora ibikoresho bya grafiti, ubusanzwe bisaba ko ibikoresho bya grafiti bikoreshwa bigira imikorere ihamye n'imikorere idahindagurika yo kwihanganira ubushyuhe.
01 Ibikoresho bya Graphite byo gukura kw'amakristale ya semiconductor
Uburyo bwose bukoreshwa mu guhinga kristu za semiconductor bukora mu gihe cy'ubushyuhe bwinshi n'ikirere cyangiritse. Agace gashyushye k'itanura rikuramo kristu gakunze gushyirwamo ibice bya grafiti birwanya ubushyuhe kandi birwanya ingese, nk'ubushyuhe, icyuma gishyushya, silinda yo gukingira, silinda yo kuyobora, electrode, icyuma gifata, electrode nut, n'ibindi.
Dushobora gukora ibice byose bya grafiti by'ibikoresho bikorerwamo kristu, bishobora gutangwa ukwabyo cyangwa mu matsinda, cyangwa ibice bya grafiti byihariye by'ingano zitandukanye hakurikijwe ibyo abakiriya bakeneye. Ingano y'ibicuruzwa ishobora gupimwa aho bikorerwa, kandi ivu ry'ibicuruzwa byarangiye rishobora kuba rito.kurenza 5ppm.
02 Ibikoresho bya Graphite bya epitaxy ya semiconductor
Uburyo bwa Epitaxial busobanura gukura k'urwego rw'ibikoresho bya kristu imwe bifite imiterere imwe n'iya substrate ku gice cy'icyuma cya kristu imwe. Mu buryo bwa epitaxial, wafer ishyirwa kuri disiki ya graphite. Imikorere n'ubwiza bwa disiki ya graphite bigira uruhare runini mu bwiza bw'urwego rwa epitaxial rwa wafer. Mu rwego rwo gukora epitaxial, hakenewe grafiti nyinshi nziza cyane hamwe n'ishingiro rya grafiti nziza cyane hamwe n'imvange ya SIC.
Ishingiro rya grafiti ry’ikigo cyacu rya epitaxy ya semiconductor rifite uburyo bwinshi bwo gukoresha, rishobora guhuza n’ibikoresho byinshi bikoreshwa mu nganda, kandi rifite isuku nyinshi, rifata neza, rimara igihe kinini rikora, kandi rirwanya imiti myinshi kandi rigatuma ubushyuhe bukomeza kwiyongera.
03 Ibikoresho bya Graphite byo gutera iyoni
Guteranya iyoni bivuga inzira yo kwihutisha umuyoboro wa plasma wa boron, fosifore na arsenic ku ngufu runaka, hanyuma ukayishyira mu gice cyo hejuru cy'ibikoresho bya wafer kugira ngo uhindure imiterere y'ibikoresho by'urwego rwo hejuru. Ibice bigize igikoresho giteranya iyoni bigomba gukorwa mu bikoresho bifite isuku nyinshi kandi birwanya ubushyuhe neza, bitwara ubushyuhe bwinshi, bike biterwa n'umuyoboro wa iyoni n'ibipimo bike by'umwanda. Grafiti ifite isuku nyinshi yujuje ibisabwa mu ikoreshwa, kandi ishobora gukoreshwa ku muyoboro w'indege, imiyoboro itandukanye, electrode, ibifuniko bya electrode, imiyoboro, ibikoresho byo gutera ion, nibindi by'ibikoresho bitera iyoni.
Ntabwo dushobora gutanga gusa igipfundikizo cya grafiti ku mashini zitandukanye zitera ion, ahubwo tunatanga electrode za grafiti nziza cyane n'amasoko ya ion zifite ubudahangarwa bwinshi bwo kwangirika ku bipimo bitandukanye. Imiterere ikoreshwa: Eaton, Azcelis, Quatum, Varian, Nissin, AMAT, LAM n'ibindi bikoresho. Byongeye kandi, dushobora no gutanga ibikoresho bya ceramic, tungsten, molybdenum, aluminiyumu hamwe n'ibice bitwikiriye.
04 Ibikoresho byo gukingira ibyuma bya Graphite n'ibindi
Ibikoresho byo gukingira ubushyuhe bikoreshwa mu gukora ibikoresho bya semiconductor birimo grafiti ikomeye, soft felt, grafiti foil, impapuro za grafiti, n'umugozi wa grafiti.
Ibikoresho byacu byose ni grafiti itumizwa mu mahanga, bishobora gucibwa hakurikijwe ingano yihariye y'ibyo umukiriya akeneye cyangwa bikagurishwa byose hamwe.
Agasanduku ka karuboni-karuboni gakoreshwa nk'igikoresho cyo gutwaramo filime mu gikorwa cyo gukora uturemangingo twa silikoni tw’izuba na silikoni tw’iporisiyoni. Ihame ry’imikorere ni iri: gushyiramo silicon chip mu gasanduku ka CFC hanyuma ukayohereza mu mwobo w’itanura kugira ngo ikoreshwe mu gutunganya filime.
