Kua aro nui te marea ki ngā haurua-ā-ira whānui (WBG) e tohuhia ana e te silicon carbide (SiC) me te gallium nitride (GaN). He nui ngā tumanakohanga a te tangata mō ngā tūmanakohanga tono o te silicon carbide i roto i ngā waka hiko me ngā whatunga hiko, tae atu ki ngā tūmanakohanga tono o te gallium nitride i roto i te utu tere. I ngā tau tata nei, kua nui te ahunga whakamua o te rangahau mō ngā rauemi Ga2O3, AlN me te taimana, ā, kua waiho ngā rauemi haurua-ā-ira whānui rawa hei arotahi. I roto i ēnei, ko te gallium oxide (Ga2O3) he rauemi haurua-ā-ira whānui rawa e puta ake ana me te āputa o te 4.8 eV, te kaha o te mara pakaru arorau tata ki te 8 MV cm-1, te tere kukū tata ki te 2E7cm s-1, me te tauwehenga kounga Baliga teitei o te 3000, e aro nui ana ki te marea i roto i te mara o ngā hikohiko hiko ngaohiko teitei me te auau teitei.
1. Ngā āhuatanga o te rauemi waikura kariuma
He nui te āputa roopu o Ga2O3 (4.8 eV), e matapaetia ana ka eke ki ngā kaha teitei o te ngaohiko me te kaha teitei o te mana, ā, ka taea te urutau ki te ngaohiko teitei i te ātete iti, ka waiho hei kaupapa matua o ngā rangahau o nāianei. Hei tāpiri, ehara i te mea he pai noa ngā āhuatanga rauemi o Ga2O3, engari he maha ngā hangarau tāpiri momo-n e taea ai te whakarite, me ngā hangarau tipu papa iti te utu me te epitaxy. Tae noa ki tēnei wā, e rima ngā āhua tioata rerekē kua kitea i roto i te Ga2O3, tae atu ki te corundum (α), te monoclinic (β), te spinel hapa (γ), te cubic (δ) me te orthorhombic (ɛ). Ko ngā pumau thermodynamic, i roto i te raupapa, ko γ, δ, α, ɛ, me te β. He mea tika kia mōhio ko te β-Ga2O3 monoclinic te mea tino pumau, inā koa i ngā pāmahana teitei, ko ētahi atu āhua he metastable i runga ake i te pāmahana rūma, ā, ka huri ki te āhua β i raro i ngā āhuatanga wera motuhake. Nō reira, ko te whanaketanga o ngā taputapu e hangai ana ki te β-Ga2O3 kua noho hei arotahi nui i roto i te ao hikohiko mana i ngā tau tata nei.
Ripanga 1 Whakataurite o ētahi tawhā rauemi haurua-ira
Kei te Ripanga 1 te hanganga tioata o te monoclinicβ-Ga2O3. Kei roto i ōna tawhā whatunga ko te a = 12.21 Å, b = 3.04 Å, c = 5.8 Å, me te β = 103.8°. Kei roto i te pūtau kotahi ngā ngota Ga(I) me te taunga tetrahedral piko me ngā ngota Ga(II) me te taunga octahedral. E toru ngā whakaritenga rerekē o ngā ngota hāora i roto i te rarangi "piko piko", tae atu ki ngā ngota O(I) me O(II) e rua e taunga tapatoru ana, me te ngota O(III) kotahi e taunga tetrahedral ana. Mā te whakakotahitanga o ēnei momo taunga ngota e rua ka hua ake te anisotropy o te β-Ga2O3 me ngā āhuatanga motuhake i roto i te ahupūngao, te waikura matū, te whatu me te hikohiko.
Pikitia 1 Te hoahoa hanganga kauwhata o te tioata β-Ga2O3 monoclinic
Mai i te tirohanga a te ariā o te roopu pūngao, ko te uara iti rawa o te roopu arataki o te β-Ga2O3 i ahu mai i te āhua pūngao e rite ana ki te porowhita ranu 4s0 o te ngota Ga. Ko te rerekētanga pūngao i waenga i te uara iti rawa o te roopu arataki me te taumata pūngao korehau (pūngao hononga irahiko) ka inehia ko te 4 eV. Ko te papatipu irahiko whai hua o te β-Ga2O3 ka inehia ko te 0.28–0.33 me me tōna arataki hiko pai. Heoi, ko te mōrahi o te roopu valence e whakaatu ana i te kōpiko Ek papaku me te piko iti rawa me ngā porowhita O2p tino rohe, e kī ana he hohonu te rohe o ngā kōhao. He wero nui ēnei āhuatanga ki te whakatutuki i te tāpiritanga momo-p i roto i te β-Ga2O3. Ahakoa ka taea te whakatutuki i te tāpiritanga momo-P, ka noho tonu te kōhao μ ki te taumata tino iti. 2. Te tipu o te karaihe kotahi gallium oxide nui Tae noa ki tēnei wā, ko te tikanga tipu o te papa tioata kotahi β-Ga2O3 nui ko te tikanga kukume karaihe, pērā i te Czochralski (CZ), te tikanga whāngai kiriata angiangi tapa-tautuhi (Edge -Defined film-fed, EFG), Bridgman (rtical or horizontal Bridgman, HB, VB rānei) me te hangarau rohe mānu (floating zone, FZ). I roto i ngā tikanga katoa, ko ngā tikanga Czochralski me te whāngai kiriata angiangi tapa-tautuhi e whakaarohia ana ko ngā huarahi tino whai hua mō te hanga papatipu o ngā anga β-Ga 2O3 a muri ake nei, nā te mea ka taea e rātou te whakatutuki i ngā rahinga nui me ngā kiato hapa iti i te wā kotahi. Tae noa ki tēnei wā, kua whakatinanahia e te Novel Crystal Technology o Hapani tētahi matrix arumoni mō te tipu rewa β-Ga2O3.
1.1 Tikanga Czochralski
Ko te mātāpono o te tikanga Czochralski ko te hipoki tuatahi i te paparanga purapura, kātahi ka āta tangohia te tioata kotahi mai i te rewa. Kei te piki haere te hiranga o te tikanga Czochralski mō te β-Ga2O3 nā te mea he iti te utu, he nui ngā kaha, me te tipu teitei o te papa tioata. Heoi, nā te ahotea wera i te wā e tipu ana te Ga2O3 i te pāmahana teitei, ka mimiti ngā tioata kotahi, ngā rauemi rewa, me te kino o te ipu Ir. Ko te hua tēnei o te uaua ki te whakatutuki i te iti o te tāpiri momo-n ki roto i te Ga2O3. Ko te whakauru i te nui o te hāora e tika ana ki te hauātea tipu tētahi huarahi hei whakaoti i tēnei raruraru. Mā te arotau, kua angitu te whakatipu i te β-Ga2O3 2-inihi kounga teitei me te whānuitanga kukū irahiko kore utu o te 10^16~10^19 cm-3 me te kiato irahiko mōrahi o te 160 cm2/Vs e te tikanga Czochralski.
Ahua 2 Tioata kotahi o te β-Ga2O3 i whakatipuria mā te tikanga Czochralski
1.2 Tikanga whāngai kiriata kua tautuhia ki te taha
Ko te tikanga whāngai kiriata angiangi kua tautuhia ki te taha e kiia ana ko te kaitono matua mō te whakaputa arumoni o ngā rauemi karaihe kotahi Ga2O3 whānui-rohe. Ko te kaupapa o tēnei tikanga he whakanoho i te rewa ki roto i tētahi pokepokea me te āputa capillary, ā, ka piki te rewa ki te pokepokea mā te mahi capillary. I te tihi, ka hangaia he kiriata angiangi, ka horapa ki ngā taha katoa i a ia e akiakihia ana kia tioata e te karaihe purapura. Hei tāpiri, ka taea te whakahaere i ngā taha o te tihi pokepokea hei whakaputa tioata i roto i ngā maramara, ngongo, i tētahi āhuahanga e hiahiatia ana rānei. Ko te tikanga whāngai kiriata angiangi kua tautuhia ki te taha o Ga2O3 ka whakarato i ngā tere tipu tere me ngā diameter nui. E whakaatu ana te Pikitia 3 i tētahi hoahoa o tētahi tioata kotahi β-Ga2O3. Hei tāpiri, i runga i te tauine rahi, kua hokohokohia ngā papa β-Ga2O3 2-inihi me te 4-inihi me te māramatanga me te ōritetanga pai, ko te papa 6-inihi e whakaaturia ana i roto i te rangahau mō te hokohoko ā muri ake nei. Nō nā tata nei, kua wātea mai hoki ngā rauemi papatipu karaihe kotahi porowhita nui me te whakatakotoranga (−201). Hei tāpiritanga, ka whakatairangahia hoki e te tikanga whāngai kiriata tautuhi-taha β-Ga2O3 te tāpiringa o ngā huānga konganuku whakawhiti, kia taea ai te rangahau me te whakarite i te Ga2O3.
Ahua 3 β-Ga2O3 tioata kotahi i whakatipuria mā te tikanga whāngai kiriata kua tautuhia ki te taha
1.3 Tikanga Bridgeman
I roto i te tikanga Bridgeman, ka hangaia ngā tioata i roto i tētahi oko whakarewa e nekehia māriretia ana i roto i tētahi pikinga pāmahana. Ka taea te mahi i te tukanga i roto i te aronga whakapae, poutū rānei, mā te whakamahi i tētahi oko hurihuri. He mea nui kia mōhiotia ko tēnei tikanga ka whakamahi, ka kore rānei e whakamahi i ngā purapura tioata. Kāore i te kitea tika ngā tukanga rewa me te tipu tioata e ngā kaiwhakahaere Bridgman tuku iho, ā, me whakahaere tika i ngā pāmahana. Ko te tikanga Bridgman poutū te mea e whakamahia ana mō te tipu o te β-Ga2O3, ā, e mōhiotia ana mō tōna kaha ki te tipu i roto i te taiao hau. I roto i te tukanga tipu o te tikanga Bridgman poutū, ka puritia te ngaronga papatipu katoa o te rewa me te oko whakarewa ki raro i te 1%, ka taea ai te tipu o ngā tioata β-Ga2O3 nui me te iti o te ngaronga.
Ahua 4 Tioata kotahi o te β-Ga2O3 i whakatipuria mā te tikanga Bridgeman
1.4 Tikanga rohe mānu
Mā te tikanga rohe mānu ka ea te raruraru o te poke o te tioata e ngā rauemi para, ā, ka whakaitihia hoki ngā utu nui e pā ana ki ngā para infrared ātete pāmahana teitei. I roto i tēnei tukanga tipu, ka taea te whakamahana i te rewa mā te rama kaua ki te pūtake RF, ā, ka māmā ake ngā whakaritenga mō ngā taputapu tipu. Ahakoa kāore anō kia tino pai te āhua me te kounga tioata o te β-Ga2O3 i whakatipuria mā te tikanga rohe mānu, ka huaki tēnei tikanga i tētahi tikanga whai hua mō te whakatipu i te β-Ga2O3 tino parakore ki roto i ngā tioata takitahi utu iti.
Ahua 5 β-Ga2O3 tioata kotahi i whakatipuria mā te tikanga rohe mānu.
Wā tuku: Mei-30-2024