Uburyo bwo gutunganya Ceramics za Silicon Carbide zifite imyobo n'imiterere yazo

Ⅰ. Intangiriro

Ibumba rya Silicon Carbide (Porous SiC) rifite imyengeni ibikoresho bya keramike bigezweho bihuza imiterere idasanzwe ya karubide ya silikoni n'imiterere y'imyenge yakozwe neza. Bitandukanye na keramike nini ya SiC, SiC ifite imyenge itanga imyenge ihujwe itanga imirimo y'inyongera, harimo kwinjira mu kirere mu buryo bugenzurwa, imiterere yoroheje, ubushyuhe butuma amazi ahora ashyushye arushaho kwiyongera, ndetse n'ubushobozi bwo gutwara amazi.

Bitewe n’ubushyuhe buhamye, ubushobozi bwo guhangana n’ibinyabutabire, no kuba ikoranabuhanga ryizewe, ibibumbano bya SiC bifite imyenge byarushijeho kuba ingenzi mu nganda zikoresha ubushyuhe bwinshi, cyane cyane inganda zikora ibikoresho bya semiconductor, aho imiterere y’ibikorwa isaba ubuziranenge buhanitse, ubushobozi bwo guhangana n’ingufu, no kudahungabana mu mikorere igihe kirekire.

Ⅱ. Imiterere y'ibikoresho bya Ceramics ya Silicon Carbide ifite imyobo

1. Guhagarara neza mu bushyuhe bwinshi

Karubide ya silikoni izwiho gukora neza cyane mu bushyuhe bukabije bitewe n'uko ifite imbaraga zo guhuza Si-C covalent. SiC ifite imyenge ikomeza imiterere yayo mu bushyuhe bwinshi, bigatuma ikoreshwa mu gutunganya ubushyuhe bwa semiconductor, sisitemu za epitaxy, n'ibice by'itanura.

Ingano yayo yo kwaguka k'ubushyuhe buke hamwe no kudahangana neza n'ubushyuhe bifasha kugabanya imihindagurikire y'ikirere no kunoza uburyo ibintu bihora bihagaze.

2. Ubudahangarwa bw'ibinyabutabire n'amaraso mu buryo buhanitse

Gukora semiconductors bikubiyemo imyuka ikaze n'ibidukikije bya plasma, harimo imyuka ishingiye kuri chlorine, plasma ya fluorine, n'ikirere gishyuha cyane.

Ibumba rya SiC rifite imyenge ritanga:

• Ubudahangarwa bwiza cyane bwo kurwanya ogisijeni
• Ubuziranenge bukabije bw'ibinyabutabire
• Ubudahangarwa bukomeye mu isuri ya plasma
• Ibiranga umwanda muke

Izi nyungu zifasha kugabanya gukora ibice by'imashini no kongera igihe cyo kubaho kw'ibice mu bikoresho bya semiconductor.

3. Uburyo bwo kugenzura ubwiyongere bw'amazi n'uburyo gaze inyuramo

Akamaro k'ingenzi ka SiC ifite imyenge ni imiterere yayo y'imyenge ishobora guhinduka. Mu kugenzura ingano y'imyenge, uko ikwirakwira, n'uko ihuzwa, abakora bashobora kunoza uburinganire hagati y'imbaraga za mekanike n'uburyo bwo kwinjira.

Iyi mikorere idasanzwe ituma SiC ifite imyenge ikora nka:

• Ibikoresho byo gukwirakwiza gazi
• Imiterere y'iyungurura
• Ibice byo gucunga ubushyuhe

Ⅲ. Ikoranabuhanga ryo gutunganya Ceramics za Silicon Carbide zifite imyenge

Imikorere y'ibibumbano bya SiC bifite imyobo iterwa ahanini n'uburyo bwo kubitunganya ndetse n'imiterere y'ibibumbano.

Kugabanya Karubohidrati

Ubu buryo busanzwe butanga SiC ifite imyenge binyuze mu gukorana n'ibipimo by'ubushyuhe bwinshi hagati y'ibikoresho birimo silikoni n'isoko ya karuboni. Bituma habaho imiterere ya SiC ifite isuku nyinshi kandi ihamye neza mu bushyuhe.

Gutunganya Igipimo cy'Amazi

Gutunganya amazi hakoreshejwe uburyo bwo gusya ibintu mu buryo bw'amazi (liquid-phase sintering) bikoresha inyongeramusaruro kugira ngo binoze uburyo uduce dufatanya n'ubwinshi bw'udusimba. Mu guhindura ubushyuhe n'ubukonje bw'inyongeramusaruro, abakora ibintu bashobora kugera ku mbaraga za mekanike n'uburyo imyumbati ikwirakwira neza.

Kwinjira mu mwuka w'uburozi (CVI)

CVI ishyira ibintu bibanza bifite imyuka mu miterere ifite imyenge, aho SiC yinjirira ku buso bw'imbere. Ubu buryo bunoza imbaraga z'imiterere, ubuziranenge, no kuramba kw'ubushyuhe bwinshi.

Uburyo bwo gusohora ifuro n'icyitegererezo

Ikoranabuhanga rikoresha ifuro n'ibishushanyo mbonera rirema imiterere y'imyenge ishingiye ku rwego rw'urwego rw'ubuso binyuze mu kugenzura ibintu bikora imyenge cyangwa ibishushanyo mbonera by'ibitambo. Ubu buryo butanga ubushobozi bwo kwinjira neza no gushyiraho imyenge yihariye.

Ⅳ. Porogaramu mu gukora ibikoresho bya semiconductor

Bitewe n'uburyo bwihariye bwo guhuza imiterere y'ubushyuhe, imiti, n'imiterere y'imiterere, ibumba rya SiC rifite imyenge rikoreshwa cyane mu bikorwa bya semiconductor.

Ibice byo gukwirakwiza gaze

Muri sisitemu za CVD, PECVD, na ALD, SiC ifite imyenge ishobora gukora nk'ibikoresho bikwirakwiza gazi n'ibisate bikwirakwiza gazi kugira ngo igere ku rujya n'uruza rw'gazi mu buryo bumwe no kunoza uburyo filime ishyirwamo.

Ibikoresho byo gutunganya plasma

Mu buryo bwo gukata no gusukura plasma, ibice bya SiC bifite imyenge bitanga ubudahangarwa bukomeye ku bidukikije bya plasma byangiza, bigabanya kwanduza uduce duto kandi bikongera ubushobozi bwo gukoresha ibikoresho.

Sisitemu ya SiC na GaN Epitaxy

Ku nganda zikora ibikoresho bya semiconductor byo mu gisekuru cya gatatu, SiC ifite imyenge igira uruhare mu kunoza imicungire y'ubushyuhe no kudahungabana kw'imikorere mu bidukikije bifite ubushyuhe bwinshi.

Ibice byo Gufata Wafer

Udupira two mu bwoko bwa SiC two mu bwoko bwa vacuum tudafite imyengenaibishyigikizo bya waferitanga ubuziranenge bwo hejuru, umwanda muke, kandi irwanya imiti cyane mu kugenzura wafer, lithography, no gutunganya ubushyuhe.

Ⅴ. Umwanzuro

Ibumba rya Silicon Carbide rifite imyobobigaragaza iterambere ryaIbikoresho bya SiCKuva ku byuma bisanzwe by’ibumba kugeza ku bice by’imikorere ya semiconductor. Binyuze mu ikoranabuhanga rigezweho ryo gutunganya no kugenzura neza imiterere y’imyenge, SiC ifite imyenge igera ku buringanire bwiza hagati y’imbaraga, ubushobozi bwo kwinjira mu kirere, imikorere y’ubushyuhe, no kudahungabana kw’imiti.

Mu gihe inganda za semiconductor zikomeje gutera imbere zigana ku bushyuhe bwinshi no kugenzura ihumana cyane, ibumba rya SiC rifite imyenge rizagira uruhare runini muSisitemu za CVD, ibikoresho byo gutunganya plasma, uburyo bwo gufata wafer, n'ikoranabuhanga ryo gukora semiconductor y'iki gihe gitaha.