Ucwaningo Lwesibonelo: Ukuthuthukisa Isivuno Sokudonsa Ngekristalu le-CZ kanye Nesikhathi Sokuphila Ngeziqhumane Zegrafiti Ezihlanzekile Kakhulu

Umholi Wobunjiniyela:UDkt. Marcus kanye nethimba le-VET Crystal Thermal Field kanye ne-High-Purity Materials Engineering Umbiko Wobuchwepheshe:Ucwaningo Lwezinto Zokwenza Izinto Ze-VET Semiconductor kanye Nokuthuthukiswa Kwezinqubo (Umbiko No.: VET-CS-2025-SAG04)

Isifinyezo Sabaphathi kanye Nokubuka Konke Kwephrojekthi Imboni:Ukukhiqizwa kwe-Wafer ye-Semiconductor kanye ne-Photovoltaic Ikhasimende:I-S-AG (Umkhiqizi Ohamba Phambili We-300mm Semiconductor Wafer Wafer, eJalimane) Inqubo:I-Czochralski (CZ) 12-Inch Monocrystalline Silicon Crystal Pulling Isixazululo:I-High-Density High-Purity Isostatic Graphite Crucible (Umlotha < 5 ppm) + 5-Axis Precision CNC Machining + FEA Thermal Modeling Imiphumela Elinganisiwe:Isivuno sokudonsa amakristalu sikhuphuke ngo-14.2%, impilo yenkonzo yokubethela i-graphite yandiswa ngo-25%, futhi ukungcola okuncibilikisiwe kwehliswe ngaphansi kwezinga elijwayelekile lemboni.

Ekukhuleni kwe-silicon e-monocrystalline yaseCzochralski (CZ), i-graphite crucible isebenza njengengxenye eyinhloko ethwala umthwalo kanye nokushisa esekela i-quartz crucible kanye ne-silicon encibilikisiwe (>1,450°C). Ubumsulwa bayo kanye nokusebenza kokucindezeleka kokushisa kunquma ngqo isivuno sokudonsa ikristalu kanye nezakhiwo zikagesi. Izinto ze-graphite ezivamile zivame ukubangela ukuguqulwa kwe-quartz crucible, ukusabalala kokungcola kwensimbi, kanye nokungcola okuncibilikisiwe kwe-silicon. Lolu cwaningo luchaza indlela ithimba eliphezulu lobunjiniyela bensimu yokushisa e-VET elenze ngayo ngokwezifiso i-high-purity isostatic graphite crucibles ye-S-AG (eJalimane), ukuxazulula ukungcola kokungcola kanye nezinselele zokucindezeleka kokushisa ngaphansi kwamazinga okushisa aphezulu kakhulu ukuze kufezwe ukusebenza kahle okukhulu kwezindleko.

Umfanekiso 1: Umdwebo wokufakwa kwe-VET high-purity isostatic graphite crucible ngaphakathi kwesithando sokudonsa ikristalu saseCzochralski (CZ)

Indlela Izinhlayiya Ze-Graphite Ezihlanzekile Ezinciphisa Ngayo Ukungcola Nokushiyeka Ku-CZ Silicon

Isiphetho Esiyinhloko: Izitsha ze-graphite ezicwebezelayo ezihlanzekile kakhulu ezinokuqukethwe komlotha <5 ppm zivimba ngempumelelo ukusabalala kwe-trace metal element ekuncibilikeni kwe-silicon, zinciphisa kakhulu amazinga okuqhekeka kwekristalu futhi zandise impilo yokuthwala izinto ezincane.

1. Amaphuzu Obuhlungu Besicelo Namakhasimende

Ngesikhathi isebenzisa izitofu zokudonsa i-silicon ezingama-intshi angu-300 (300mm) ze-semiconductor-grade CZ endaweni yayo eJalimane, ikhasimende i-S-AG libhekane nokwehla okukhulu kokuphila kwe-ingot minority carrier kanye namazinga aphezulu okuhlukana konqenqema. Ukuhlolwa kwembule ukuthi ukungcola komlotha okumbalwa (B, Fe, Cu) ngaphakathi kwezitsha zokugcoba ze-graphite ezivamile kwangena ezindongeni ze-quartz crucible ngesikhathi sokudonsa okuqhubekayo emazingeni okushisa angaphezu kuka-1,450°C. Lezi zingcolisi zasakazeka ngqo ekuncibilikeni kwe-silicon, zaphazamisa ubuqotho besakhiwo sekristalu futhi zavimbela ama-wafer ukuthi ahlangabezane nezindinganiso zekhwalithi ze-SEMI C12 kanye ne-ISO 9001.

2. Isixazululo Sobunjiniyela Nokusetshenziswa Kwenqubo

Ithimba lobunjiniyela be-VET linikeze izitsha ze-graphite ezi-isostatic ezixinene kakhulu ezihlanzwe ngegesi ye-halogen ejulile eshisa kakhulu:

• Ukukhethwa Kwezinto Nokuhlanzwa Okujulile:I-graphite ethambile (usayizi wezinhlamvu ≤ 8 μm) kanye ne-high-density (≥ 1.85 g/cm³) isostatic yahlanzwa esithandweni se-vacuum ngomjikelezo wegesi we-halogen oshisa kakhulu wamahora angu-72, okwenza inani lomlotha lehle liye ku-<5 ppm.
• Ukuhlolwa Kweqembu Le-GDMS:I-High-resolution Glow Discharge Mass Spectrometry (GDMS) yasetshenziswa ukuhlola ukungcola kwensimbi okuyinhloko i-batch-by-batch, ukuqinisekisa ukuthi izinto ezingcolisayo eziyinhloko zehlisiwe zibe amazinga e-ppb (bheka ithebula ledatha ngezansi).

Isici Sokungcola	I-Graphite Ejwayelekile Ekhishwe	I-VET High-Purity Isostatic Graphite	Izinga le-S-AG (SEMI C12)
Umlotha Ophelele	≈ 150 ppm	< 3.8 ppm	< 5.0 ppm
Insimbi (Fe)	12.5 ppm	18 ppb	< 50 ppb
Ithusi (Cu)	3.2 ppm	< 5 ppb	< 10 ppb
I-Boron (B)	1.8 ppm	12 ppb	< 20 ppb
I-Nickel (Ni)	4.1 ppm	15 ppb	< 30 ppb

Ngemva kokusetshenziswa komkhiqizo, ukungcoliswa kokungcola kwe-silicon melt kwehle ngaphezu kuka-85%, kuyilapho isilinganiso sokuphila kwe-ingot minority carrier sikhuphuke ngo-32%. Vakashela i-website yethu.[Indawo Yokuhlola Igesi Ye-Halogen Enokushisa Okuphezulu kanye Ne-GDMS]ukuhlola imininingwane yobuchwepheshe enemininingwane.

Umfanekiso 2: Ukuqhathaniswa kokusatshalaliswa kwempilo yonke kwenkampani encane ngaphambi nangemva kokusebenzisa izitsha ze-graphite ze-VET ezihlanzekile kakhulu e-S-AG

Ukuthuthukisa Izakhiwo Zensimu Yokushisa kanye Nokumelana Nokushaqeka Kokushisa Nge-Isostatic Graphite Crucibles

Isiphetho Esiyinhloko: Ukushisa okufanayo kwe-isotropic okuhlanganiswe namandla aphezulu omshini kuvimbela ngempumelelo ukuguquguquka kwe-crucible kanye nokukhiqizwa kwe-micro-crack ngesikhathi sokujikeleza okuphindaphindiwe kokushisa.

1. Amaphuzu Obuhlungu Besicelo Namakhasimende

Izitsha zokuqala ze-graphite ezikhishwe yi-S-AG zazivame ukuzwa ukwanda kokushisa kwe-radial okungalingani, ukuqhekeka kodonga, noma ukuwohloka kwezansi ngemva kwemijikelezo eminingi yokushisa. Lokhu kwaholela ekucindezelekeni okungalingani kanye nokuthamba/ukuwa kwe-quartz crucible yangaphakathi eshisa kakhulu, okwabangela ukuvalwa kwesithando. Isikhathi sokuphila esimaphakathi se-graphite crucible sasingaphansi kwemijikelezo yokushisa engu-180, okwaholela ezindlekweni ezinkulu zokulungisa kanye nezindleko zesikhathi sokungasebenzi.

2. Isixazululo Sobunjiniyela Nokusetshenziswa Kwenqubo

Ukuze kuxazululwe ukuguquguquka kokucindezeleka kokushisa okuphezulu, uDkt. Marcus wahola ithimba lobunjiniyela be-VET ngenqubo ejwayelekile yokushintshana enezigaba ezintathu:

[Isigaba 1: Ukuxilongwa] • Ukumodela kwe-FEA Thermal • Ukuhlela Kahle kwe-CTE (4.8×10−&sup6;/K)

[Isigaba 2: Ukukhiqiza] • Ukucindezela Okubandayo Okungashintshi • Amandla Okugobeka angu-45 MPa

[Isigaba 3: Ukuqinisekiswa] • Isivivinyo Sezinsuku Ezingama-60 Esizeni • Imijikelezo Yokushisa Engaphezu Kuka-220

• Ukuhlolwa Kwesakhiwo Nokufaniswa Kokushisa (Ukuxilongwa):Ithimba lenze imodeli ye-Finite Element Analysis (FEA) kuma-thermal gradients e-S-AG futhi lahlela kabusha ukwakheka kwe-graphite crucible okuhlukaniswe ngezicucu ezintathu. Ukwakheka kwezinto kulungiswe ukuze kuhambisane ne-Coefficient of Thermal Expansion (CTE) ku-4.8×10−&sup6;/K, kwafinyelela ukuhambisana okuphezulu ne-quartz liner ku-1,450°C futhi kwasusa ukucindezeleka kokucindezela ngomshini.
• Ukwakha Nokuchwephesha Okunamandla Aphezulu (Ukukhiqiza):I-Cold Isostatic Pressing (CIP) ikhiqize amabhlogo e-graphite anamandla okuguquguquka angu-45 MPa. Umshini wokulungisa i-CNC oqondile ongu-5-axis (± 0.01mm tolerance) uqinisekisile ukuthi izingxenye zimelana nemithelela yomshini kanye nokushaqeka kokushisa lapho zilayishwa amakhulu amakhilogremu eshaja ye-silicon.
• Ukuhlolwa Kwasendaweni Nokuqinisekiswa Kwesikhathi Sokuphila (Ukuqinisekiswa):I-S-AG yenze isivivinyo esiqhubekayo sezinsuku ezingama-60 eJalimane. Ngemva kwemijikelezo yokushisa engaphezu kuka-220 (cishe amahora angu-1,500 ekushiseni okukhulu), ubukhulu baqhubeka bungenazo izinguquko ngaphandle kokuqhekeka okuncane, kwaqeda ngempumelelo ukuvalwa kwesithando okubangelwa ukwehluleka kokubethela.

Umfanekiso 3: Umshini wokugaya we-VET 5-axis ngokunemba kwe-CNC kanye nokuhamba komsebenzi wokuhlola ubumsulwa be-spectrometry ye-GDMS

Ukusetshenziswa Kokulawulwa Kokucindezeleka Kokushisa Okuqondile ku-CZ Monocrystalline Silicon Growth

Isiphetho Esiyinhloko: Ukuthuthukisa ukulingana kwejometri kanye nokusatshalaliswa kokushisa kuqinisa ukuxhumana okuqinile noketshezi, kunciphisa ukuguquguquka kokuhlushwa komoya-mpilo ngesikhathi sokukhula kwekristalu okude.

1. Amaphuzu Obuhlungu Besicelo Namakhasimende

Ngesikhathi sokudonsa isikhathi eside ama-ingots e-silicon agcwele kakhulu noma angenasici angamasentimitha angu-12, ukungalingani kokucindezeleka kokushisa esibonakalayo se-solid-liquid kubangela ukuminyana kwe-convection. Lokhu kuholela ekushintsheni kokuhlushwa kwe-oxygen ye-axial kanye ne-radial, kunciphisa isivuno se-annealing ngesikhathi sokusika okulandelayo kwe-wafer.

2. Ukusetshenziswa Kobuchwepheshe kanye Nenani

• Ukulingisa Insimu Yokushisa:Ukulingisa kwe-FEA kudwebe izindlela zokuqhuba ukushisa eziphakathi kuka-1,450°C no-1,550°C, okuthuthukisa i-gradient yobukhulu bodonga olukwazi ukubethelwa.
• Ukulawula Ukubekezelelana Kokufana:Ukubekezelelana kobukhulu bodonga kwakulinganiselwe ngaphakathi kuka-±0.005mm, okwandisa ukulingana kokushisa ngo-18%.

Ngokulawula ukucindezeleka kokushisa okunembile, i-S-AG ithole ukuthuthuka okungu-22% ekulinganeni kokuhlushwa kwe-oxygen ye-ingot axial, ukwanda okungu-8% kwesivinini sokudonsa, kanye nokwehla okuphawulekayo kokukhubazeka kokuphuma. Ukuze uthole imininingwane yezingxenye, hlola i-athikili yethu.[Iziqhumane zeGraphite Ezingacwengekile Kakhulu kanye Nezingxenye Zensimu Eshisayo]ikhathalogi yomkhiqizo.

Imibuzo Evame Ukubuzwa (Imibuzo Evame Ukubuzwa)

Isiphetho kanye nenani lekhasimende

Ngokusebenzisa izimbobo ze-graphite ezi-isostatic ze-VET ezihlanzekile kakhulu kanye nezixazululo zensimu yokushisa ezenziwe ngokwezifiso, i-European wafer giant S-AG yanqoba ukusabalala kokungcola kanye nezithiyo zokucindezeleka kokushisa. Imiphumela ebalulekile yephrojekthi ifaka:

• Isivuno sokudonsa i-silicon e-monocrystalline sanda ngo-14.2%
• Impilo yesevisi yengxenye yensimu yokushisa ye-graphite enwetshiwe yi25%(kudlule imijikelezo yokushisa engaphezu kuka-220)
• Ukusetshenziswa kwamandla okuphelele ngekhilogremu ngayinye ye-silicon wafer kuncishiswe cishe11%

Mayelana neThimba Lombhali kanye Nobuchwepheshe UDkt. Marcus — Unjiniyela Omkhulu Wensimu Yokushisa kanye Nezinto Ezithuthukisiwe, i-VET UDkt. Marcus uneminyaka engaphezu kwengu-15 yesipiliyoni se-R&D ekwakhiweni kwensimu yokushisa ye-semiconductor kanye nokuhlanzwa kwe-composite okusekelwe ku-carbon, ogxile ekumodeleni i-CZ furnace thermal stress kanye nokuthuthukiswa kwenqubo ye-graphite ehlanzekile kakhulu (<5 ppm). Lolu cwaningo lusekelwe kudatha yokusebenzisa insimu evela ku-S-AG yeklayenti laseYurophu (Umbiko No: VET-CS-2025-SAG04).

Ukulungele Ukuthuthukisa Insimu Yakho Yokushisa Yesithando Sokushiswa Kwe-CZ? Uma ubhekene namazinga aphezulu okungcola, ukugoba kwe-graphite crucible, noma impilo yenkampani encane ephansi, xhumana nethimba lobunjiniyela le-VET ukuthola amamodeli e-FEA enziwe ngokwezifiso kanye nezixazululo zokufaka esikhundleni sobumsulwa obuphezulu. Ukulungele Ukuthuthukisa Insimu Yakho Yokushisa Yesithando Sokushiswa Kwe-CZ? Uma ubhekene namazinga aphezulu okungcola, ukugoba kwe-graphite crucible, noma impilo yenkampani encane ephansi, xhumana nethimba lobunjiniyela le-VET ukuthola amamodeli e-FEA enziwe ngokwezifiso kanye nezixazululo zokufaka esikhundleni sobumsulwa obuphezulu. Buka Imikhiqizo ye-High-Purity Graphite Cela Isixazululo Esenziwe Ngokwezifiso kanye namasampula e-GDMS