Izidingo zemboni ye-semiconductor zezinto ze-graphite ziphakeme kakhulu, ubukhulu bezinhlayiya ezincane ze-graphite bunokunemba okuphezulu, ukumelana nokushisa okuphezulu, amandla aphezulu, ukulahlekelwa okuncane nezinye izinzuzo, njenge: isikhunta semikhiqizo ye-graphite e-sintered.Ngenxa yokuthi imishini ye-graphite esetshenziswa embonini ye-semiconductor (kufaka phakathi ama-heater kanye nama-dies awo acwebezelayo) iyadingeka ukuze imelane nezinqubo zokushisa nokupholisa eziphindaphindwayo, ukuze kwandiswe impilo yesevisi yemishini ye-graphite, ngokuvamile kuyadingeka ukuthi izinto ze-graphite ezisetshenziswayo zibe nokusebenza okuzinzile kanye nomsebenzi wokumelana nokushisa.
01 Izesekeli ze-Graphite zokukhula kwekristalu ye-semiconductor
Zonke izinqubo ezisetshenziselwa ukukhulisa amakristalu e-semiconductor zisebenza ngaphansi kwezinga lokushisa eliphezulu kanye nendawo egqwalisayo. Indawo eshisayo yesithando sokukhulisa ikristalu ivame ukuhlonyiswa ngezingxenye ze-graphite ezihlanzekile kakhulu ezingamelani nokushisa kanye nokugqwala, njenge-heater, i-crucible, i-insulation cylinder, i-guide cylinder, i-electrode, i-crucible holder, i-electrode nut, njll.
Singakhiqiza zonke izingxenye ze-graphite zamadivayisi okukhiqiza ikristalu, ezinganikezwa ngazinye noma ngamasethi, noma izingxenye ze-graphite ezenziwe ngokwezifiso zobukhulu obuhlukahlukene ngokuya ngezidingo zamakhasimende. Usayizi wemikhiqizo ungalinganiswa endaweni, futhi okuqukethwe komlotha wemikhiqizo eqediwe kungaba ngaphansi.kune-5ppm.
02 Izesekeli ze-Graphite ze-semiconductor epitaxy
Inqubo ye-Epitaxial ibhekisela ekukhuleni kwengqimba yezinto zekristalu eyodwa ezinelungiselelo elifanayo le-lattice njenge-substrate ku-substrate eyodwa yekristalu. Enqubweni ye-epitaxial, i-wafer ilayishwa kudiski ye-graphite. Ukusebenza kanye nekhwalithi yediski ye-graphite kudlala indima ebalulekile ekhwalithini yengqimba ye-epitaxial ye-wafer. Emkhakheni wokukhiqizwa kwe-epitaxial, kudingeka i-graphite eningi ehlanzekile kakhulu kanye nesisekelo se-graphite ehlanzekile kakhulu esine-SIC coating.
Isisekelo se-graphite senkampani yethu se-semiconductor epitaxy sinezinhlelo zokusebenza eziningi ezahlukene, singafanelana nemishini eminingi esetshenziswa kakhulu embonini, futhi sinobumsulwa obuphezulu, ukumbozwa okufanayo, impilo yesevisi enhle kakhulu, kanye nokumelana okuphezulu kwamakhemikhali kanye nokuqina kokushisa.
03 Izesekeli ze-Graphite zokufakelwa kwe-ion
Ukufakelwa kwe-ion kubhekisela enkambisweni yokusheshisa umsebe we-plasma we-boron, i-phosphorus kanye ne-arsenic emandleni athile, bese uwufaka engqimbeni engaphezulu kwezinto ze-wafer ukuze ushintshe izakhiwo zezinto zengqimba engaphezulu. Izingxenye zedivayisi yokufakelwa kwe-ion kumele zenziwe ngezinto ezihlanzekile kakhulu ezinokumelana nokushisa okuhle kakhulu, ukuqhuba ukushisa, ukugqwala okuncane okubangelwa umsebe we-ion kanye nokuqukethwe okungcolile okuphansi. I-graphite ehlanzekile kakhulu ihlangabezana nezidingo zohlelo lokusebenza, futhi ingasetshenziswa epayipini lokundiza, izimbobo ezahlukahlukene, ama-electrode, izembozo ze-electrode, amapayipi, iziphetho ze-beam, njll. zemishini yokufakelwa kwe-ion.
Asikwazi nje kuphela ukunikeza isembozo sokuvikela i-graphite semishini ehlukahlukene yokufaka ama-ion, kodwa futhi sihlinzeka ngama-electrode e-graphite ahlanzekile kakhulu kanye nemithombo ye-ion enokumelana nokugqwala okuphezulu kwemininingwane ehlukahlukene. Amamodeli asebenzayo: i-Eaton, i-Azcelis, i-Quatum, i-Varian, i-Nissin, i-AMAT, i-LAM kanye neminye imishini. Ngaphezu kwalokho, singaphinde sinikeze ngemikhiqizo ye-ceramic efanayo, i-tungsten, i-molybdenum, i-aluminium kanye nezingxenye ezimboziwe.
04 Izinto zokuvimbela i-Graphite nezinye
Izinto zokuvikela ukushisa ezisetshenziswa emishinini yokukhiqiza ye-semiconductor zifaka phakathi i-graphite hard felt, i-soft felt, i-graphite foil, iphepha le-graphite, kanye nentambo ye-graphite.
Zonke izinto zethu zokusetshenziswa ziyi-graphite ezingenisiwe, ezinganqunywa ngokuya ngobukhulu obuthile bezidingo zamakhasimende noma zithengiswe zizonke.
Ithreyi yekhabhoni-khabhoni isetshenziswa njengesithwali sokumbozwa kwefilimu enqubweni yokukhiqizwa kwamaseli e-silicon e-monocrystalline yelanga kanye namaseli e-silicon e-polycrystalline. Isimiso esisebenzayo yilesi: faka i-silicon chip kuthreyi ye-CFC bese uyithumela eshubhu lesithando ukuze icubungule ukumbozwa kwefilimu.
