Cov ntawv thov ntawm CVD SiC Txheej
LubCVD SiC txheejCov txheej txheem no siv dav thoob plaws ntau yam lag luam vim nws muaj peev xwm ua tau ntau yam thiab muaj txiaj ntsig zoo. Ib qho ntawm cov ntawv thov tseem ceeb yog nyob rau hauv kev tsim khoom semiconductor, qhov twg cov khoom sib xyaw SiC-coated pab tiv thaiv cov nplaim mos thaum lub sijhawm ua wafer. Cov khoom siv CVD SiC-coated, xws li susceptors, rings, thiab wafer carriers, ua kom muaj kev ruaj khov ntawm qhov kub thiab txias thiab tiv thaiv kev ua qias tuaj thaum lub sijhawm tsim khoom tseem ceeb.
Hauv kev lag luam aerospace,CVD SiC txheejyog siv rau cov khoom uas raug cua sov thiab kev ntxhov siab heev. Cov txheej txheem no ua rau lub neej ntawm cov hniav turbine thiab cov chav sib txuas ntev dua, uas ua haujlwm nyob rau hauv cov xwm txheej hnyav. Tsis tas li ntawd, CVD SiC feem ntau siv rau hauv kev tsim cov iav thiab cov khoom siv kho qhov muag vim nws cov khoom siv cuam tshuam thiab thermal stability.
Lwm daim ntawv thov tseem ceeb ntawm CVD SiC yog nyob rau hauv kev lag luam tshuaj lom neeg. Ntawm no, SiC coatings tiv thaiv cov khoom xws li cov cua sov sib pauv, cov foob, thiab cov twj tso kua mis los ntawm cov tshuaj corrosive. Qhov chaw SiC tseem tsis cuam tshuam los ntawm cov kua qaub thiab cov hauv paus, ua rau nws zoo tagnrho rau cov chaw uas cov tshuaj lom neeg ruaj khov yog qhov tseem ceeb.
Cov yam ntxwv ntawm CVD SiC Txheej
Cov yam ntxwv ntawm CVD SiC txheej yog qhov ua rau nws ua tau zoo heev hauv cov ntawv thov no. Ib qho ntawm nws cov yam ntxwv tseem ceeb yog nws qhov nyuaj, qeb duas ze rau pob zeb diamond ntawm Mohs hardness scale. Qhov nyuaj heev no ua rau CVD SiC txheej tiv taus kev hnav thiab kev puas tsuaj zoo kawg nkaus, ua rau lawv haum rau cov chaw muaj kev sib txhuam siab.
Tsis tas li ntawd xwb, SiC muaj cov thermal conductivity zoo heev, uas tso cai rau cov khoom coated kom tswj tau lawv qhov kev ua tiav txawm tias nyob rau hauv qhov kub siab. Qhov no yog qhov tseem ceeb tshwj xeeb hauv cov ntawv thov semiconductor thiab aerospace, qhov twg cov ntaub ntawv yuav tsum tiv taus qhov kub siab thaum tseem khaws cov qauv muaj zog.
Qhov tshuaj lom neeg tsis muaj zog ntawm CVD SiC txheej yog lwm qhov zoo dua. Nws tiv taus oxidation, corrosion, thiab tshuaj lom neeg nrog cov tshuaj lom neeg, ua rau nws yog ib txheej zoo tagnrho rau cov khoom siv ua tshuaj. Ntxiv mus, nws cov coefficient qis ntawm thermal expansion ua kom ntseeg tau tias cov nplaim coated khaws lawv cov duab thiab ua haujlwm txawm tias nyob rau hauv cov xwm txheej thermal cycling.
Xaus lus
Hauv kev xaus lus, CVD SiC txheej muab kev daws teeb meem ruaj khov thiab ua tau zoo rau cov lag luam uas xav tau cov ntaub ntawv uas tuaj yeem tiv taus cua sov heev, kev ntxhov siab ntawm lub tshuab, thiab kev xeb ntawm cov tshuaj lom neeg. Nws cov ntawv thov ntau yam los ntawm kev tsim khoom semiconductor mus rau aerospace thiab kev ua cov tshuaj lom neeg, qhov twg cov khoom ntawm SiC - xws li qhov nyuaj, kev ruaj khov thermal, thiab kev tiv thaiv tshuaj lom neeg - yog qhov tseem ceeb rau kev ua haujlwm zoo. Raws li kev lag luam txuas ntxiv thawb cov ciam teb ntawm kev ua tau zoo thiab kev ntseeg siab, CVD SiC txheej yuav tseem yog cov thev naus laus zis tseem ceeb rau kev txhim kho cov khoom siv ruaj khov thiab lub neej ntev.
Los ntawm kev siv cov kev txawj ntse ntawm cov chaw tsim khoom tshwj xeeb xws li vet-china, cov tuam txhab tuaj yeem tau txais cov txheej txheem CVD SiC zoo uas ua tau raws li qhov xav tau ntawm cov txheej txheem kev lag luam niaj hnub.
Lub sijhawm tshaj tawm: Lub Kaum Ob Hlis-18-2023