Kushandiswa uye hunhu hwesilicon carbide CVD coating

Silicon carbide (SiC)chinhu chinogara kwenguva refu chinozivikanwa nekuoma kwacho kwakanyanya, kupisa kwakanyanya, uye kuramba ngura yemakemikari. Pakati penzira dzakasiyana-siyana dzekushandisa SiC pamusoro,Kuputira kweCVD SiC(Chemical Vapor Deposition of silicon carbide) inoonekwa zvakanyanya nekuda kwekugona kwayo kugadzira machira akafanana, akachena zvakanyanya ane kunamira kwakanaka. Iyi tekinoroji yakakosha mukushandiswa kwakasiyana-siyana kwemaindasitiri, kunyanya munzvimbo dzinopisa zvakanyanya uye dzine makemikari akaomarara.

Mashandisirwo eCVD SiC Coating

IyoKuputira kweCVD SiCMaitiro aya anoshandiswa zvakanyanya mumaindasitiri akati wandei nekuda kwekushanda kwaro kwakasiyana-siyana uye mabhenefiti aro. Chimwe chezvinhu zvikuru zvinoshandiswa mukugadzira semiconductor, uko zvinhu zvakaputirwa neSiC zvinobatsira kuchengetedza nzvimbo dzakapfava panguva yekugadzira wafer. Midziyo yakaputirwa neCVD SiC, yakaita se susceptors, rings, uye wafer carriers, inoita kuti pave nekugadzikana pakupisa kwakanyanya uye inodzivirira kusvibiswa panguva dzekugadzira dzakakosha.

Muindasitiri yezvendege,Kuputira kweCVD SiCinoiswa pazvinhu zvinopisa zvakanyanya uye zvinomanikidzwa nemagetsi. Kupfeka uku kunotambanudza hupenyu hwema turbine blades nemakamuri ekupisa, ayo anoshanda mumamiriro ezvinhu akaoma. Pamusoro pezvo, CVD SiC inowanzo shandiswa mukugadzira magirazi nemidziyo yemaziso nekuda kwehunhu hwayo hwekugadzika uye kugadzikana kwekupisa.

Imwe nzira huru yekushandisa CVD SiC ndeyekushandisa makemikari. Pano, machira eSiC anodzivirira zvinhu zvakaita sezviyero zvinochinja-chinja kupisa, zvisimbiso, uye mapombi kubva kuzvinhu zvinoparadza. Pamusoro peSiC hapachisina maacid nemabhesi, zvichiita kuti ive yakakodzera nzvimbo dzinogara kwenguva refu dzemakemikari.

Kuiswa kweCVD Epitaxial muBarrel Reactor

Hunhu hweCVD SiC Coating

Hunhu hweCVD SiC coating ndihwo hunoita kuti ishande zvakanaka mukushandiswa uku. Chimwe chezvinhu zvikuru hunhu hwayo kuomarara kwayo, kuri pedyo nedhaimani paMohs hardness scale. Kuomarara uku kwakanyanya kunoita kuti CVD SiC coating isapararire zvakanyanya pakusakara nekukweshwa, zvichiita kuti ive yakakodzera munzvimbo dzine friction yakawanda.

Pamusoro pezvo, SiC ine mafambiro ekupisa akanaka kwazvo, izvo zvinoita kuti zvikamu zvakaputirwa zvirambe zvakanaka kunyangwe kana tembiricha yakakwira. Izvi zvakakosha zvikuru mukushandiswa kwema semiconductor uye mundege, uko zvinhu zvinofanirwa kutsungirira kupisa kwakanyanya uku zvichichengetedza simba rechimiro.

Kusashanda kwemakemikari kweCVD SiC coating ndeimwe mukana unoshamisa. Inodzivirira oxidation, ngura, uye makemikari ane zvinhu zvinokatyamadza, zvichiita kuti ive coating yakakodzera michina yekugadzirisa makemikari. Uyezve, coefficient yayo shoma yekuwedzera kwekupisa inoita kuti nzvimbo dzakaputirwa dzirambe dzakagadzirwa uye dzichishanda kunyangwe mumamiriro ekupisa.

Mhedziso

Muchidimbu, CVD SiC coating inopa mhinduro yakasimba uye inoshanda zvakanyanya kumaindasitiri anoda zvinhu zvinogona kutsungirira kupisa kwakanyanya, kushushikana kwemakemikari, uye ngura yemakemikari. Mashandisirwo ayo anotangira pakugadzira semiconductor kusvika pakugadzira makemikari mundege, uko hunhu hweSiC—hwakadai sekuomarara, kugadzikana kwekupisa, uye kuramba makemikari—zvakakosha pakubudirira kwekushanda. Sezvo maindasitiri achiramba achisundira miganhu yekushanda uye kuvimbika, CVD SiC coating icharamba iri tekinoroji yakakosha yekuvandudza kugara kwenguva refu kwezvikamu uye kurarama kwenguva refu.

Nekushandisa hunyanzvi hwevagadziri vane hunyanzvi vakaita sevet-china, makambani anogona kuwana machira eCVD SiC emhando yepamusoro anoenderana nezvinodiwa zvakanyanya zvemaindasitiri emazuva ano.


Nguva yekutumira: Zvita-18-2023
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