Ukusetshenziswa kanye nezici ze-silicon carbide CVD coating

I-silicon carbide (i-SiC)iyinto eqinile kakhulu eyaziwa ngokuqina kwayo okuphezulu, ukuhanjiswa okuphezulu kokushisa, kanye nokumelana nokugqwala kwamakhemikhali. Phakathi kwezindlela ezahlukahlukene zokufaka i-SiC ezindaweni,Ukugqoka kwe-CVD SiC(Chemical Vapor Deposition of silicon carbide) ivelele ngenxa yekhono layo lokudala izembozo ezifanayo nezihlanzekile kakhulu ezinokunamathela okuhle kakhulu. Lobu buchwepheshe bubalulekile ezinhlobonhlobo zezicelo zezimboni, ikakhulukazi ezindaweni ezinokushisa okuphezulu nezinobuthi bamakhemikhali.

Ukusetshenziswa kwe-CVD SiC Coating

IUkugqoka kwe-CVD SiCInqubo isetshenziswa kabanzi emikhakheni eminingana ngenxa yokuguquguquka kwayo kanye nezinzuzo zokusebenza. Enye yezinhlelo zokusebenza eziyinhloko isekukhiqizweni kwe-semiconductor, lapho izingxenye ezimbozwe yi-SiC zisiza ekuvikeleni izindawo ezibucayi ngesikhathi sokucubungula i-wafer. Imishini embozwe yi-CVD SiC, njenge-susceptors, izindandatho, kanye nezithwali ze-wafer, iqinisekisa ukuzinza kokushisa okuphezulu futhi ivimbela ukungcola phakathi nezigaba zokukhiqiza ezibalulekile.

Embonini yezindiza,Ukugqoka kwe-CVD SiCisetshenziswa ezingxenyeni ezivezwe ekushiseni okukhulu kanye nokucindezeleka komshini. Isembozo sandisa kakhulu impilo yama-turbine blades kanye namakamelo okushisa, asebenza ngaphansi kwezimo ezinzima. Ngaphezu kwalokho, i-CVD SiC ivame ukusetshenziswa ekukhiqizeni izibuko namadivayisi okukhanya ngenxa yezakhiwo zayo zokuqina nokukhanya kokushisa.

Esinye isicelo esibalulekile se-CVD SiC sisembonini yamakhemikhali. Lapha, izembozo ze-SiC zivikela izingxenye ezifana nezishintshi zokushisa, izivalo, namaphampu ezintweni ezibolayo. Ubuso be-SiC abuthinteki ngama-asidi nezisekelo, okwenza kube kuhle ezindaweni lapho ukuqina kwamakhemikhali kubalulekile khona.

Ukufakwa kwe-CVD Epitaxial ku-Barrel Reactor

Izici ze-CVD SiC Coating

Izakhiwo zokugqoka ze-CVD SiC yizo ezenza kube nempumelelo enkulu kulezi zinhlelo zokusebenza. Esinye sezici zayo eziyinhloko ubulukhuni bayo, obufana kakhulu nedayimane esikalini sobulukhuni be-Mohs. Lobu bulukhuni obukhulu bunikeza ukugqoka kwe-CVD SiC ukumelana okuphawulekayo nokuguguleka, okwenza kufanelekele izindawo eziguquguqukayo kakhulu.

Ngaphezu kwalokho, i-SiC inokushisa okuhle kakhulu, okuvumela izingxenye ezimboziwe ukuthi zigcine ubuqotho bazo ngisho nangaphansi kwamazinga okushisa aphezulu. Lokhu kubaluleke kakhulu ekusetshenzisweni kwe-semiconductor kanye ne-aerospace, lapho izinto kufanele zikwazi ukumelana nokushisa okukhulu ngenkathi zigcina amandla esakhiwo.

Ukungasebenzi kwamakhemikhali kwe-CVD SiC coating kungenye inzuzo ephawulekayo. Imelana nokugqwala, ukugqwala, kanye nokusabela kwamakhemikhali ngezinto ezinolaka, okwenza kube yi-coating efanelekile yemishini yokucubungula amakhemikhali. Ngaphezu kwalokho, i-coefficient yayo ephansi yokwanda kokushisa iqinisekisa ukuthi izindawo ezimboziwe zigcina isimo sazo nokusebenza kwazo ngisho nangaphansi kwezimo zokujikeleza kokushisa.

Isiphetho

Ngamafuphi, i-CVD SiC coating inikeza ikhambi eliqinile nelisebenza kahle kakhulu lezimboni ezidinga izinto ezingabekezelela ukushisa okukhulu, ukucindezeleka komshini, kanye nokugqwala kwamakhemikhali. Ukusetshenziswa kwayo kuhluka kusukela ekukhiqizweni kwe-semiconductor kuya ekucutshungulweni kwezindiza kanye namakhemikhali, lapho izakhiwo ze-SiC—njengobulukhuni, ukuzinza kokushisa, kanye nokumelana namakhemikhali—zibalulekile empumelelweni yokusebenza. Njengoba izimboni ziqhubeka nokucindezela imingcele yokusebenza kanye nokuthembeka, i-CVD SiC coating izohlala iwubuchwepheshe obubalulekile bokuthuthukisa ukuqina kwezingxenye kanye nokuphila isikhathi eside.

Ngokusebenzisa ubuchwepheshe babakhiqizi abakhethekile njenge-vet-china, izinkampani zingathola izembozo ze-CVD SiC ezisezingeni eliphezulu ezihlangabezana nezidingo eziqinile zezinqubo zezimboni zanamuhla.


Isikhathi sokuthunyelwe: Disemba 18-2023
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