SiC Coated Graphite Carriers, sic txheej, SiC txheej coated ntawm Graphite substrate rau Semiconductor

Silicon carbide coatedLub graphite disk yog los npaj cov txheej tiv thaiv silicon carbide rau ntawm qhov chaw ntawm graphite los ntawm kev tso cov pa tshuaj lossis tshuaj lom neeg thiab txau. Cov txheej tiv thaiv silicon carbide uas tau npaj tseg tuaj yeem sib txuas nrog cov graphite matrix, ua rau qhov chaw ntawm graphite puag ntom thiab tsis muaj qhov khoob, muab cov graphite matrix tshwj xeeb, suav nrog kev tiv thaiv oxidation, acid thiab alkali tsis kam, tiv thaiv kev yaig, tiv thaiv corrosion, thiab lwm yam. Tam sim no, Gan txheej yog ib qho ntawm cov khoom tseem ceeb tshaj plaws rau kev loj hlob epitaxial ntawm silicon carbide.

Silicon carbide semiconductor yog cov khoom siv tseem ceeb ntawm cov semiconductor dav dav uas tsim tshiab. Nws cov khoom siv muaj cov yam ntxwv ntawm kev tiv taus kub siab, kev tiv taus voltage siab, zaus siab, lub zog siab thiab kev tiv taus hluav taws xob. Nws muaj qhov zoo ntawm kev hloov pauv sai thiab kev ua haujlwm siab. Nws tuaj yeem txo cov khoom siv hluav taws xob ntau, txhim kho kev hloov pauv hluav taws xob thiab txo cov khoom ntim. Nws feem ntau yog siv hauv kev sib txuas lus 5g, kev tiv thaiv lub tebchaws thiab kev lag luam tub rog. Lub tshav pob RF sawv cev los ntawm aerospace thiab lub tshav pob hluav taws xob hluav taws xob sawv cev los ntawm cov tsheb fais fab tshiab thiab "kev tsim kho tshiab" muaj kev cia siab ua lag luam meej thiab muaj txiaj ntsig zoo hauv ob qho tib si pej xeem thiab tub rog.

Silicon carbide substrate yog cov khoom siv tseem ceeb ntawm cov semiconductor tshiab uas tau tsim dav dav. Silicon carbide substrate feem ntau yog siv rau hauv cov khoom siv hluav taws xob microwave, hluav taws xob hluav taws xob thiab lwm yam teb.. Nws yog nyob rau ntawm qhov kawg ntawm qhov dav dav ntawm cov saw hlau semiconductor kev lag luam thiab yog cov khoom siv tseem ceeb thiab yooj yim. Silicon carbide substrate tuaj yeem muab faib ua ob hom: semi insulating thiab conductive. Ntawm lawv, semi insulating silicon carbide substrate muaj resistivity siab (resistivity ≥ 105 Ω · cm). Semi insulating substrate ua ke nrog heterogeneous gallium nitride epitaxial ntawv tuaj yeem siv ua cov khoom siv ntawm RF khoom siv, uas feem ntau yog siv hauv 5g kev sib txuas lus, kev tiv thaiv lub teb chaws thiab kev lag luam tub rog hauv cov xwm txheej saum toj no; Lwm qhov yog conductive silicon carbide substrate nrog resistivity qis (qhov ntau yam resistivity yog 15 ~ 30m Ω · cm). Lub epitaxy homogeneous ntawm conductive silicon carbide substrate thiab silicon carbide tuaj yeem siv ua cov khoom siv rau cov khoom siv fais fab. Cov xwm txheej tseem ceeb ntawm daim ntawv thov yog tsheb fais fab, lub zog fais fab thiab lwm yam teb.