Hauv cov kab tsim khoom siv lead ua SiC, ntau tus engineers tsom mus rau kev tsim thaj chaw kub, cov kab tswj kub, thiab cov hmoov. Txawm li cas los xij, thaum muaj kev hloov pauv ntawm cov khoom, qhov ua rau feem ntau yog rov qab mus rau tib qho khoom - lub crucible. Nws tsis tso tawm lub teeb, tsis tig, thiab tsis tshwm sim ua "qhov tseem ceeb" hauv cov duab kos. Tab sis yog tias ib txheej tev tawm ntawm qhov chaw, ib qho siv lead ua rau qhov chaw tsis raug, lossis muaj cov pa roj carbon ntau dhau los ntawm ib lub ces kaum, qhov tsis zoo uas tshwm sim thoob plaws hauv lub boule ua rau ib yam meej: qhov khoom no tsis yog lub luag haujlwm txhawb nqa.
Qhov muaj ntau zuj zus ntawmCov khoom siv graphite coated SiCHauv cov cub tawg semiconductor siv lead ua kom loj hlob muaj ib qho lus piav qhia yooj yim: qhov kub thiab txias, huab cua, thiab kev thauj khoom siv hauv thaj chaw loj hlob tab tom thawb cov kev txwv ntawm kev ua tau zoo ntawm cov khoom siv. Graphite zoo heev hauv kev tiv thaiv thermal, kev siv tshuab, thiab kev hloov pauv cua sov - tab sis nws los nrog nws tus cwj pwm: volatilization, permeability, kev ua xua tshuaj lom neeg nrog cov pa lossis cov khoom tsis huv, thiab kev pheej hmoo tsis zam ntawm hmoov thiab cov khoom me me. Lub txheej SiC ua haujlwm ua ib qho thaiv tawv tiv thaiv cov teeb meem mob no.
Vim li cas thiaj siv SiC Txheej rau ntawm Graphite Crucibles?
Peb qho laj thawj tseem ceeb:
1. Txo cov pa roj carbon volatilization thiab reactivity
Graphite pib sublimating ntawm qhov kub siab, txawm tias nyob hauv qab cov pa roj inert. Cov pa roj carbon uas tso tawm hloov pauv cov tshuaj lom neeg ntawm cov pa thaum lub sijhawm loj hlob PVT, cuam tshuam rau cov kinetics deposition thiab txhawb kev tsim cov qhov tsis zoo lossis kev loj hlob tsis ruaj khov.
2. Txwv cov chaw ua qias tuaj
Txawm tias cov graphite uas raug nias isostatically high-purity muaj cov qhov me me thiab muaj tus cwj pwm los nqus cov hom xws li cov pa ua ntej, cov khoom seem, lossis cov dej noo. Cov no tuaj yeem tso tawm tom qab thaum lub sijhawm ua haujlwm kub siab, ua rau cov siv lead ua tsis huv. Ib txheej SiC kaw cov qhov me me thiab ua kom ib puag ncig huv si.
3. Ntev lub neej thiab tiv thaiv kev sib txhuam
Tom qab ntau zaus khiav, cov nplaim graphite yuav yooj yim puas tsuaj: hmoov av, tev tawv, tawg me me, thiab cov khoom dai. Cov no ua rau muaj kev sib kis ntawm cov khoom me me thiab txo cov txiaj ntsig. Ib txheej SiC ruaj khov tuaj yeem ncua cov txheej txheem ua tsis tiav no, tswj kev ncaj ncees ntawm qhov chaw thiab kev ntseeg tau.
Kev Tswj Xyuas Txheej Txheem Txheeb Xyuas Kev Ntseeg Tau ntawm Crucible
Txoj kev siv txheej txheem tseem ceeb yog CVD(Kev Tso Pa Tshuaj Lom Zem) ntawm polycrystalline SiC. Nws yog laus thiab ruaj khov. Txawm li cas los xij, muaj ib txheej tsis txaus - qhov sib txawv tiag tiag hauv kev ua haujlwm hauv thaj teb nyob ntawm cov ntsiab lus zoo xws li:
● Kev sib npaug ntawm cov txheej tuab
Cov qauv sib txawv ntawm crucible—cov kauj ruam, cov grooves, cov fillets—tsim cov chaw ntxoov ntxoo lossis cov chaw tso qis uas qhov tuab ntawm txheej txheej tuaj yeem poob qis dua qhov teev tseg. Cov cheeb tsam nyias nyias no ua thawj qhov uas yuav lwj thaum muaj kev ntxhov siab thermal.
Kev daws teeb meem:Tus neeg muab tshuaj pleev xim yuav tsum muaj kev tswj hwm 3D ntws-teb thiab cov txheej txheem tig dynamic kom ntseeg tau tias muaj kev npog sib npaug txawm tias nyob rau ntawm cov khoom nyuaj.
● Kev ceev ntawm txheej thiab kev tshem tawm qhov pinhole
Yog tias CVD cov kev teeb tsa (qhov kub thiab txias, cov pa roj sib piv, lub sijhawm nyob) tsis raug tswj hwm nruj, tej zaum yuav muaj cov qhov me me. Cov no ua rau muaj kev puas tsuaj thaum cov pa roj carbon tawm thiab xeb hauv zos tshwm sim.
Kev Tshawb Pom:Qhov tuab thiab kev kuaj pom tsis txaus. Siv cov kev sim helium xau lossis kev sim poob phaus seem hla ntau lub voj voog kub kom pom qhov porosity zais.
● Lub zog nplaum thiab kev tiv taus kev ntxhov siab thermal
SiC thiab graphite muaj cov coefficients sib txawv ntawm kev nthuav dav thermal. Yog tias qhov kev ntxhov siab seem hauv txheej tsis raug txo qis, lossis qhov roughening / pre-treatment tsis txaus, delamination yuav tshwm sim thaum lub sijhawm thermal cycling.
Cov kev coj ua zoo tshaj plaws:Xyuas kom tseeb tias cov grit-blast thiab ultrasonic ntxuav ua ntej txheej, thiab xyuas kom meej tias muaj kev tiv taus kev ntxhov siab thermal nrog kev hloov pauv lub cub tawg tiag tiag.
Cov Hom Kev Ua Tsis Tau Zoo thiab Lawv Cov Kev Cuam Tshuam Crystal
| Hom Kev Ua Tsis Tau Zoo ntawm Crucible | Tej Yam Yuav Tshwm Sim |
|---|---|
| Qhov (Pinhole) → Kev tso pa roj carbon tawm hauv zos | Kev tso tawm tsis raug tswj → Muaj qhov tsis zoo ntau |
| Kev tawg ntawm txheej | SiC flake contamination → Cov khoom me me tsis zoo, parasitic nucleation |
| Kev tsim cov phab ntsa sab hauv | Kev ntxhov siab kub → Kev tawg hauv zos, kev tawg ntawm ntug |
| Kev hloov xim ntawm qhov chaw / greying | Kev sib sau ua ke ntawm cov khoom seem → Kev suav nrog cov khoom tsis huv, kev hloov pauv xim |
Thaum lub crucible ua tsis tau zoo, qhov cuam tshuam feem ntau tsis yog ob peb ppm xwb, tab sis ua rau poob tag nrho thiab ua rau muaj kev cuam tshuam ntau lub lis piam. Qhov no tsis yog qhov teeb meem tseem ceeb xwb - nws yog qhov teeb meem ruaj khov ntawm lub cev.
Lub sijhawm tshaj tawm: Lub Ib Hlis-21-2026