I-MOCVD Substrate Heater, Izinto zokufudumeza ze-MOCVD

Isifudumezi se-MOCVD Substrate, Izinto zokufudumeza ze-MOCVD Umfanekiso obonisiweyo

Inkcazo emfutshane:

Izixhobo ze-graphite heater zisetyenziswa kwi-oven enobushushu obuphezulu apho ubushushu bufikelela kwi-2200 degrees kwindawo yokucoca umoya kunye ne-3000 degrees kwindawo yegesi eyosiweyo nefakwe kuyo.
Iimpawu eziphambili ze-graphite heater:
1. ukufana kwesakhiwo sokufudumeza.
2. Ukuqhuba kakuhle kombane kunye nomthwalo ophezulu wombane.
3. ukumelana nokugqwala.
4. ukungakwazi ukufunxa ioksijini.
5. ubunyulu obuphezulu beekhemikhali.
6. amandla aphezulu oomatshini.
Inzuzo kukuba iyasebenza kakuhle, ixabiso layo liphezulu kwaye ayilungiswa kakhulu.
Singavelisa i-anti-oxidation kunye ne-graphite crucible ehlala ixesha elide, i-graphite mold kunye nazo zonke iindawo ze-graphite heater.
Iiparameter eziphambili ze-graphite heater:

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Iinkcukacha zeMveliso

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I-MOCVD Substrate Heater, Izinto zokufudumeza ze-MOCVD,
isifudumezi segrafayithi, isifudumezi, I-MOCVD Substrate Heater,

Isifudumezi seGraphite esigqunywe yi-SIC esihlala ixesha elide se-MOCVD K465i

Iisifudumezi segrafayithiIzixhobo zisetyenziswa kwi-oven enobushushu obuphezulu apho ubushushu bufikelela kwi-2200 degrees kwindawo yokucoca umoya kunye ne-3000 degrees kwindawo yegesi ecocekileyo nefakwe kuyo.
Iimpawu eziphambili zegraphiteisifudumezi:
1. ukufana kwesakhiwo sokufudumeza.
2. Ukuqhuba kakuhle kombane kunye nomthwalo ophezulu wombane.
3. ukumelana nokugqwala.
4. ukungakwazi ukufunxa ioksijini.
5. ubunyulu obuphezulu beekhemikhali.
6. amandla aphezulu oomatshini.
Inzuzo kukuba iyasebenza kakuhle, ixabiso layo liphezulu kwaye ayilungiswa kakhulu.
Singavelisa i-anti-oxidation kunye ne-graphite crucible ehlala ixesha elide, i-graphite mold kunye nazo zonke iindawo ze-graphite heater.
Iiparameter eziphambili ze-graphite heater:

Iinkcukacha zoBugcisa	I-VET-M3
Ubuninzi bobuninzi (g/cm3)	≥1.85
Umxholo wothuthu (PPM)	≤500
Ukuqina koLwandle	≥45
Ukuchasana Okuthile (μ.Ω.m)	≤12
Amandla okuGuquka (i-Mpa)	≥40
Amandla Oxinzelelo (i-Mpa)	≥70
Ubungakanani obukhulu bengqolowa (μm)	≤43
I-Coefficient yokwandisa ubushushu Mm/°C	≤4.4*10-6

Isifudumezi segrafiti kwisithando sombane sineempawu zokuxhathisa ubushushu, ukumelana neoksijini, ukuqhuba kakuhle kombane kunye nokuqina okungcono koomatshini. Singasebenzisa iintlobo ezahlukeneyo zesifudumezi segrafiti ngokweedizayini zabathengi.

Isifudumezi seGraphite esigqunywe yi-SIC esihlala ixesha elide se-MOCVD K465i