Mocheso oa MOCVD Substrate, Lisebelisoa tsa ho Futhumatsa Bakeng sa MOCVD

Sehatsetsi sa MOCVD Substrate, Dikarolo tsa ho Futhumatsa Bakeng sa MOCVD Setšoantšo se Hlahisitsoeng

Tlhaloso e Khutšoanyane:

Likarolo tsa heater ea graphite li sebelisoa ka ontong ea mocheso o phahameng 'me mocheso o fihlile likhato tse 2200 tikolohong ea vacuum le likhato tse 3000 tikolohong ea khase e hloekisitsoeng le e kentsoeng.
Likarolo tse ka sehloohong tsa heater ea graphite:
1. ho tšoana ha sebopeho sa ho futhumatsa.
2. motlakase o motle le mojaro o phahameng oa motlakase.
3. ho hanyetsa ho bola.
4. ho se kgone ho ntsha oksideishene.
5. bohloeki bo phahameng ba lik'hemik'hale.
6. matla a phahameng a mechini.
Molemo ke ho boloka matla hantle, boleng bo holimo le tlhokomelo e tlase.
Re ka hlahisa anti-oxidation le bophelo bo bolelele ba graphite crucible, hlobo ea graphite le likarolo tsohle tsa heater ea graphite.
Litekanyetso tse ka sehloohong tsa hitara ea graphite:

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Sehatsetsi sa MOCVD Substrate, Lisebelisoa tsa ho Futhumatsa Bakeng sa MOCVD,
hitara ea graphite, hitara, Sehatsetsi sa MOCVD Substrate,

Heater ea Graphite e koahetsoeng ka SIC e telele bakeng sa MOCVD K465i

Thehitara ea graphiteLikarolo li sebelisoa ka ontong ea mocheso o phahameng moo mocheso o fihlang ho likhato tse 2200 tikolohong ea vacuum le likhato tse 3000 tikolohong ea khase e hloekisitsoeng le e kentsoeng.
Likarolo tse ka sehloohong tsa graphitehitara:
1. ho tšoana ha sebopeho sa ho futhumatsa.
2. motlakase o motle le mojaro o phahameng oa motlakase.
3. ho hanyetsa ho bola.
4. ho se kgone ho ntsha oksideishene.
5. bohloeki bo phahameng ba lik'hemik'hale.
6. matla a phahameng a mechini.
Molemo ke ho boloka matla hantle, boleng bo holimo le tlhokomelo e tlase.
Re ka hlahisa anti-oxidation le bophelo bo bolelele ba graphite crucible, hlobo ea graphite le likarolo tsohle tsa heater ea graphite.
Litekanyetso tse ka sehloohong tsa hitara ea graphite:

Tlhaloso ea Tekheniki	VET-M3
Bongata ba Bongata (g/cm3)	≥1.85
Dikahare tsa Molora (PPM)	≤500
Ho tiea ha lebōpo	≥45
Khanyetso e Ikhethang (μ.Ω.m)	≤12
Matla a ho Kobeha (Mpa)	≥40
Matla a Khatello (Mpa)	≥70
Boholo ba Thollo (μm)	≤43
Katoloso ea Thermal e lekanang le karolelano ea Mm/°C	≤4.4*10-6

Sehatsetsi sa grafiti bakeng sa onto ea motlakase se na le litšobotsi tsa ho hanyetsa mocheso, ho hanyetsa oxidation, ho tsamaisa motlakase hantle le matla a mechini a betere. Re ka sebelisa mefuta e fapaneng ea sehatsetsi sa grafiti ho latela meralo ea bareki.

Heater ea Graphite e koahetsoeng ka SIC e telele bakeng sa MOCVD K465i