Iimfuno zezinto zegrafiti kwishishini le-semiconductor ziphezulu kakhulu, ubukhulu be-graphite obuncinci buchanekile kakhulu, ukumelana nobushushu obuphezulu, amandla aphezulu, ilahleko encinci kunye nezinye iingenelo, ezinje: ukungunda kweemveliso zegrafiti ezisinki.Ngenxa yokuba izixhobo zegrafiti ezisetyenziswa kwishishini le-semiconductor (kuquka izifudumezi kunye nee-sintered dies zazo) ziyafuneka ukuze zimelane neenkqubo zokufudumeza nokupholisa eziphindaphindwayo, ukuze kwandiswe ubomi benkonzo yezixhobo zegrafiti, kudla ngokufuneka ukuba izixhobo zegrafiti ezisetyenziswayo zibe nokusebenza okuzinzileyo kunye nomsebenzi wokuchasana nobushushu.
Izixhobo zeGraphite zokukhulisa ikristale ye-semiconductor
Zonke iinkqubo ezisetyenziselwa ukukhulisa iikristale ze-semiconductor zisebenza phantsi kobushushu obuphezulu kunye nendawo ebolileyo. Indawo eshushu yesithando sokukhulisa iikristale idla ngokuxhotyiswa ngezinto zegrafiti ezimsulwa kakhulu nezimelana nobushushu, ezifana neheater, crucible, insulation cylinder, guide cylinder, electrode, crucible holder, electrode nut, njl.njl.
Singavelisa zonke iindawo zegrafiti kwizixhobo zemveliso yekristale, ezinokubonelelwa ngokwahlukeneyo okanye ngokweeseti, okanye iindawo zegrafiti ezenziwe ngokwezifiso zobukhulu obahlukeneyo ngokweemfuno zabathengi. Ubungakanani beemveliso bunokulinganiswa kwindawo, kwaye umxholo wothuthu lweemveliso ezigqityiweyo unokuba mncinci.ngaphezu kwe-5ppm.
Izixhobo zeGraphite ze-semiconductor epitaxy 02
Inkqubo ye-Epitaxial ibhekisa ekukhuleni komaleko wezinto zekristale enye enelungiselelo elifanayo le-lattice njenge-substrate kwi-substrate enye yekristale. Kwinkqubo ye-epitaxial, i-wafer ilayishwa kwidiski yegrafiti. Ukusebenza kunye nomgangatho wediski yegrafiti kudlala indima ebalulekileyo kumgangatho womaleko we-epitaxial we-wafer. Kwicandelo lokuveliswa kwe-epitaxial, kufuneka igrafiti eninzi ecocekileyo kakhulu kunye nesiseko segrafiti ecocekileyo ephezulu kunye ne-SIC coating.
Isiseko segrafiti senkampani yethu se-semiconductor epitaxy sinoluhlu olubanzi lwezicelo, sinokulingana nezona zixhobo zisetyenziswa kakhulu kushishino, kwaye sicocekile kakhulu, sigqunywe ngokulinganayo, sisebenza ubomi obugqwesileyo, kwaye sinokumelana okuphezulu kweekhemikhali kunye nozinzo lobushushu.
Izixhobo zeGraphite zokufakelwa kwe-ion
Ukufakelwa kwe-ion kubhekisa kwinkqubo yokukhawulezisa umqadi we-plasma we-boron, i-phosphorus kunye ne-arsenic kumandla athile, uze emva koko uwufake kumaleko womphezulu wezinto ze-wafer ukuze utshintshe iipropati zezinto zomaleko womphezulu. Izinto ezikwisixhobo sokufakelwa kwe-ion mazibe zenziwe ngezinto ezicocekileyo kakhulu ezinokumelana nobushushu obuhle kakhulu, ukuqhuba kobushushu, ukugqwala okuncinci okubangelwa ngumqadi we-ion kunye nomxholo wokungcola okuphantsi. I-graphite ecocekileyo kakhulu ihlangabezana neemfuno zesicelo, kwaye ingasetyenziselwa ityhubhu yokubhabha, iindawo ezahlukeneyo zokuqhekeka, ii-electrode, izigqubuthelo ze-electrode, ii-conduits, ii-terminators ze-beam, njl.njl. zezixhobo zokufakelwa kwe-ion.
Asinakubonelela kuphela ngesigqubuthelo sokukhusela i-graphite kwiimashini ezahlukeneyo zokufakelwa kwee-ion, kodwa sikwabonelela ngee-electrodes ze-graphite ezicocekileyo kakhulu kunye nemithombo ye-ion enokumelana nokugqwala okuphezulu kweenkcukacha ezahlukeneyo. Iimodeli ezisebenzayo: i-Eaton, i-Azcelis, i-Quatum, i-Varian, i-Nissin, i-AMAT, i-LAM kunye nezinye izixhobo. Ukongeza, singabonelela ngeemveliso ze-ceramic ezifanayo, i-tungsten, i-molybdenum, i-aluminium kunye neendawo ezigqunyiweyo.
04 Izixhobo zokukhusela i-Graphite kunye nezinye
Izixhobo zokukhusela ubushushu ezisetyenziswa kwizixhobo zemveliso ye-semiconductor ziquka i-graphite hard felt, i-soft felt, i-graphite foil, iphepha le-graphite, kunye ne-graphite rope.
Zonke izinto zethu eziluhlaza ziyigrafiti engeniswa kwamanye amazwe, enokunqunyulwa ngokweemfuno zomthengi okanye ithengiswe iyonke.
Itreyi yekhabhoni-khabhoni isetyenziswa njengesithwali sokugquma ifilimu kwinkqubo yokuvelisa iiseli ze-silicon ze-monocrystalline zelanga kunye neeseli ze-silicon ze-polycrystalline. Umgaqo osebenzayo ngulo: faka i-silicon chip kwitreyi ye-CFC uze uyithumele kwityhubhu yesithando ukuze kucutshungulwe ukugquma ifilimu.
