I-Silicon Carbide Coated Graphite Substrate yeSemiconductor, i-MOCVD Susceptor

Inkcazo emfutshane:

I-VET Energy SiC Coated Susceptor yimveliso esebenza kakuhle kakhulu eyenzelwe ukubonelela ngokusebenza okuzinzileyo nokuthembekileyo ixesha elide. Inokumelana okuhle kakhulu nobushushu kunye nokufana kobushushu, ubunyulu obuphezulu, ukumelana nokukhukuliseka, nto leyo eyenza ukuba ibe sisisombululo esifanelekileyo sokusetyenziswa kwe-wafer.

Indawo Yokuqala:E-Zhejiang, eTshayina (eMaphandleni)

Ukwenziwa kweekhemikhali:I-graphite egqunywe yi-SiC

Amandla okugobeka:470Mpa

Ukuqhuba kobushushu:300 W/mK

Umgangatho:Igqibelele

Umsebenzi:I-CVD-SiC

Isicelo:I-semiconductor / i-Photovoltaic

Uxinano:3.21 g/cc

Ukwandiswa kobushushu:4 10-6/K

Uthuthu: <5ppm

Isampuli:Iyafumaneka

Ikhowudi ye-HS:6903100000

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Iinkcukacha zeMveliso

Iithegi zeMveliso

I-VET Energy SiC Coated Susceptorsisisombululo esisebenza kakuhle kakhulu esenziwe ngobuchule ukuze sinikezele ngokusebenza okuthembekileyo nokungaguquguqukiyo kubomi obude, sihlangabezana neemfuno eziqatha zokwenziwa kwee-semiconductor. Esi sixhobo sifanelekile kubathwali bee-wafer ze-MOCVD kunye nezinye izicelo zokucubungula ii-wafer ezifuna uzinzo kunye nokuchaneka. Ukumelana kwayo nokukhukuliseka okuqinileyo kwenza ukuba ibe lukhetho oluphezulu kwiindawo apho ukuqina kunye nokuqina kweekhemikhali kubalulekile.

ZethuI-SiC Coated Graphite SusceptorIsebenza njengecandelo elibalulekileyo kwinkqubo yokwenziwa kwee-semiconductor, isebenzisa ubuchwepheshe obukhethekileyo be-VET Energy obunelungelo lobunikazi ukuze kufezekiswe ubunyulu obuphezulu kakhulu, ukufana okuphezulu kokugquma, kunye nokuzinza okumangalisayo kobushushu. Olu gquma luphucula i-graphite substrate ngokumelana okuphezulu kweekhemikhali kunye nobomi benkonzo obongezelelekileyo. Ukuzinikela kwe-VET Energy kumgangatho kubangele i-susceptor egqumayo ye-SiC ehlangabezana neemfuno eziguqukayo zemarike yokuthwala i-graphite wafer, ibeka umgangatho ophezulu wee-susceptors ze-graphite ezigqumayo ze-SiC ezisetyenziswa kwiIinkqubo ze-MOCVD.

Iimpawu eziphambili zeSiC Coated Susceptors:

1. Ukumelana ne-Oxidation yoBushushu obuphezulu:Yimelane namaqondo obushushu afikelela kwi-1700℃, nto leyo eyenza ifaneleke kwiimeko ezinzima zokucubungula.

2. Ubunyulu obuphezulu kunye nokufana kobushushu:Iqinisekisa iziphumo ezihambelanayo, ezibalulekileyoAbaxhasi be-MOCVDkunye nezinye izicelo zokuchaneka.

3. Ukumelana nokugqwala okugqwesileyo:Iyanyamezela kwi-asidi, i-alkali, ityuwa, kunye nezinye izinto eziphilayo ezahlukeneyo.

4. Ukuqina Komphezulu Ophuculweyo:Umphezulu oxineneyo onamasuntswana amancinci anika ukuqina okuphezulu kunye nobude obude.

5. Ubomi beNkonzo eyongeziweyo:Yenzelwe ukusebenza kakuhle, iphumelela ngakumbi kwii-susceptors ezisemgangathweni ezine-silicon carbide ezigqunywe ziimeko ezinzima zokucubungula.

Njengomvelisi okhokelayo, iVET Energy igxile kwigrafiti eyenzelwe wena kunyeiimveliso ze-silicon carbidengeendlela ezahlukeneyo zokugquma, kuqukaUkwaleka kweSiC, Ukwaleka kweTaC, ugqubuthelo lwekhabhoni olufana neglasikunye ne-pyrolytic carbon coating. Sikhonza ngokuzingca amashishini e-semiconductor kunye ne-photovoltaic, sinikezela nge-silicon carbide coated graphite susceptors ezihlangabezana neemfuno ezithile zokusebenza.

Iqela lethu lobuchwephesha, elinamava avela kumaziko ophando aphambili asekhaya, lizinikele ekuphuhliseni izisombululo zezinto eziphathekayo kwiimfuno eziguqukayo zeI-SiC-coated graphite susceptorImarike. Ngenkqubo yethu enelungelo lobunikazi, i-VET Energy iphuhlise ubuchwepheshe obukhethekileyo obuphucula kakhulu amandla okubopha phakathi kwe-silicon carbide coating kunye ne-substrate, kunciphisa umngcipheko wokuqhekeka kunye nokuphucula ukuthembeka kwexesha elide.

Izicelo kunye neeNzuzo kwi-Semiconductor Processing

IIngubo yeSiC yeMOCVDyenza ukubaumxhasi wegrafayithiIzixhobo zokugcina ukuthembeka phantsi kweemeko ezishushu kakhulu nezirhabaxa, nto leyo ibalulekileyo kwimveliso ye-semiconductor echanekileyo. Ezi zixhobo ze-graphite ezine-SiC zixatyiswa kakhulu kwiinkqubo ezifuna ii-susceptors ezine-silicon carbide ukuzeabathwali be-grafayithi esisigqubuthelo, ezifuna uzinzo oluphezulu lobushushu, ubunyulu, kunye nokumelana nokukhukuliseka kweekhemikhali.

Ngeendlela zethu eziphambili zokugquma i-silicon carbide, i-VET Energy iyaqhubeka nokuxhasa imakethi yokuthwala i-graphite wafer ngokubonelela ngeenkonzo ezenzelwe wena, ezisebenza kakuhle.Ii-susceptors ze-graphite ezigqunywe yi-SiCezijongana nemingeni ethile kushishino, ukusuka kwiinkqubo ze-MOCVD ukuya kwizicelo ezicocekileyo kakhulu kwicandelo le-semiconductor.