Ukukhethwa kwezinto zokugquma zeCVD: Uthelekiso lokusebenza kunye nokusetyenziswa kweTiN, Al2O3, SiC

Ukukhetha izinto zokugquma zeCVD ezifanelekileyo kubalulekile ekuphuculeni ukusebenza kwecandelo kunye nobude bexesha. Eli nqaku lithelekisa ngokuthe ngqo iTitanium Nitride (TiN), iAluminium Oxide (Al2O3), kunye neSilicon Carbide (SiC) CVD coatings ukuze kukhokele ukukhethwa kwezinto kwizicelo ezithile zoshishino. Ukuqonda iiprofayili zokusebenza ezahlukeneyo zesixhobo ngasinye kubalulekile ekwenzeni izigqibo ezinolwazi. Imarike yehlabathi yokugquma yeCVD ifikelelekile.I-USD 20.38 yezigidigidi ngo-2023, kunye noqikelelo olubonisa ukukhula ukuya kwi-USD 44.2 yeebhiliyoni ngo-2032, okubonisa izinga lokukhula lonyaka elidibeneyo le-7.58% ngexesha lexesha eliqikelelweyo.

Izinto ezibalulekileyo ekufuneka ziqwalaselwe

• Iingubo zeCVDnjengeTiN, iAl2O3, kunye neSiC zenza iindawo zibe namandla kwaye zihlale ixesha elide.
• Iingubo zeTiN zilungele izixhobo kunye nokuhombisa; ziqinile kwaye azigugi.
• Iingubo ze-Al2O3 zisebenza kakuhle kwiindawo ezishushu kakhulu kwaye ziyamelana neekhemikhali; zikhusela iindawo kwi-rust.
• Iingubo zeSiC zilungele ubushushu obugqithisileyo kunye neekhemikhali, njengakwindlela yokwenza iitshiphusi zekhompyutha; zicocekile kwaye zinamandla.
• Ukukhetha i-coating efanelekileyo kuxhomekeke kwinto ekufuneka yenziwe yiloo nto kunye nendawo eza kusetyenziswa kuyo.

Ukuqonda iTekhnoloji yokuCoating yeCVD

Yintoni iChemical Vapor Deposition (CVD)?

Ukususwa komphunga wekhemikhali (i-CVD) yinkqubo entsonkothileyo ebeka iifilimu ezincinci zezinto eziqinileyo kwi-substrate evela kwisigaba segesi. Le ndlela ibandakanya uthotho lweempendulo zeekhemikhali ezenzeka kumphezulu we-substrate okanye kufutshane nayo. Iimpendulo zekhemikhali ezisisiseko kwi-CVD ziqukaukubola kobushushu, ukunciphisa, ukuxinana, kunye nokwakheka kwe-compoundEzi mpendulo zihlala ziquka iimpendulo zesigaba segesi, apho iintlobo eziphakathi zenzeka ngokusebenzisa iimpendulo zeekhemikhali zangaphambili. Emva koko, iimpendulo zomphezulu ziphathelele ukusasazwa kunye nokusabela kwezi ntlobo kumphezulu wesiseko, okukhokelela ekukhuleni kwefilimu okufunekayo. Ezinye iintlobo zempendulo eziqhelekileyo ziqukai-hydrolysis, i-pyrolysis, kunye nokufuduka.

Kutheni ii-CVD Coatings zibalulekile ekuphuculeni izinto

Iingubo ze-CVD zibalulekile ekuphuculeni iipropati zezinto ezibonakalayo kumashishini ahlukeneyo. Zibonelela ngeenzuzo ezibalulekileyo kunezinye iiteknoloji zokugquma. Umzekelo, iingubo ze-CVD zikhuselai-oxidation kunye nokugqwala, ukwandisa ubomi bezinto ezisetyenzisiweyo. Abavelisi banokwenza ezi ngubo zilungele iinjongo ezithile zokusebenza, njengokufikelela ekungangeni kweekhemikhali. Le teknoloji iphucula kakhulu ukusebenza kunye neempawu zee-implants ze-biomedical, iphucula ukuhambelana kwezinto eziphilayo, ukumelana nokuguguleka, ubulukhuni, kunye nokuqina. I-CVD ingcono kakhulu ngokuhambelana, ibonelela ngesakhiwo sefilimu esifanayo nakwiindawo ezintsonkothileyo zangaphakathi nangaphandle. Oku kuvumela ukufakwa komaleko wezinto ezifanayo kuzo zonke iindawo ezifakiweyo. Izinto eziluhlaza zegesi ezisemgangathweni ophezulu ziqinisekisa ukuba iingubo zicocekile kakhulu. Ngokungafaniyo neenkqubo ezininzi ze-PVD, inkqubo ye-CVD ayisebenzi.akuphelelanga kwisicelo sokujonga umgca, okuvumela ukugqunywa kwazo zonke iindawo zenxalenye, kuquka imisonto kunye nemingxunya engaboniyo. Ukugqunywa kubophana nomphezulu ngexesha lokusabela, kudala ukunamathela okuphezulu xa kuthelekiswa nePVD eqhelekileyo okanye ukutshizwa okuphantsi kobushushu. Ukulungiswa kwegesi kwangaphambili kuvumela ukugqunywa okunamandla okuguguleka, ukuthambisa okuphezulu, ukumelana nokugqwala, okanye ubumsulwa obuphezulu.

Ukwaleka kweTitanium Nitride (TiN) CVD: Ukusebenza kunye nezicelo

Iimpawu eziphambili zokusebenza kweTiN CVD Coating

Iingubo ze-Titanium Nitride (TiN) CVD zibonisa iimpawu ezininzi zokusebenza ezibalaseleyo. Zinobunzima obungaqhelekanga, obuhlala buqala kwi-2000 ukuya kwi-2500 HV, nto leyo ephucula kakhulu ukumelana nokuguguleka. Obu bunzima buphezulu benza ukuba izinto zihlale ixesha elide ngokuchasene namandla arhabaxa nawokukhukulisa. I-TiN ikwabonelela ngokungangeni kakuhle kweekhemikhali, ixhathisa iimpembelelo zezinto ezininzi ezirhabaxa. I-coefficient yayo ephantsi yokungqubana inceda ekunciphiseni ukuveliswa kobushushu kunye nokuphucula ukusebenza kakuhle. Ngaphezu koko, iingubo ze-TiN zinombala wegolide onomtsalane, okwenza zifaneleke kwiinjongo zokuhombisa. Ingubo igcina ukuthembeka kwayo kunye nokusebenza kwayo kumaqondo obushushu aphezulu, nangona ukumelana kwayo ne-oxidation kungabi phezulu njengezinye izinto.

Izicelo eziqhelekileyo zeTiN CVD Coating

Amashishini asebenzisa kakhulu ii-TiN CVD coatings kwiindlela ezahlukeneyo ezibalulekileyo ngenxa yeempawu zazo eziqinileyo. Abavelisi badla ngokufaka iTiN kwiizixhobo zokusika, ezinje ngee-drill, ii-end mills, kunye nee-saw blades, ukwandisa ubomi bazo kunye nokuphucula ukusebenza kokusika. Izinto ezifakelweyo kwezonyango nazo ziyazuza kwiingubo zeTiN, eziphucula ukuhambelana kwezinto eziphilayo kunye nokumelana nokuguguleka. Izinto zeenqwelo-moya zisebenzisa iTiN ngenxa yokuqina kwayo kunye nokukhusela kwiimeko ezinzima zokusebenza. Ukongeza, ukugqitywa kwegolide okukhangayo kwenza iTiN ibe lukhetho oludumileyo lweengubo zokuhombisa kwizinto ezifana nobucwebe kunye neewotshi.

Iingenelo kunye nokuNciphisa kweTiN CVD Coating

Iingubo ze-TiN CVD zibonelela ngeenzuzo ezibalulekileyo. Ziyandisa kakhulu ubomi benkonzo yezixhobo kunye nezinto, zinciphisa iindleko zokutshintshwa kunye nexesha lokungasebenzi. Ezi ngubo zibonelela ngokumelana okuhle kakhulu nokuguguleka, okubalulekileyo kwiindawo ezihlala zingqubana. Ukunamathela kwazo kakuhle kwii-substrates ezahlukeneyo kuqinisekisa ukubopha okuthembekileyo nokuhlala ixesha elide. Nangona kunjalo, iingubo ze-TiN zinemida. Zibonisa uzinzo oluphakathi lobushushu xa kuthelekiswa nezinye iiceramics eziphambili, kunye ne-oxidation eyenzekayo kumaqondo obushushu angaphezu kwama-500°C emoyeni. Nangona ziqinile, zinokuba buthathaka, nto leyo enokubangela ukuqhekeka phantsi kwemithwalo enzima. Inkqubo yokufaka idla ngokufuna amaqondo obushushu aphezulu, anokunciphisa ukusetyenziswa kwayo kwizinto ezithile ze-substrate.

I-Aluminium Oxide (Al2O3) CVD Coating: Ukusebenza kunye nezicelo

Iimpawu eziphambili zokusebenza kwe-Al2O3 CVD Coating

Iingubo ze-Aluminium Oxide (Al2O3) CVD zaziwa ngeempawu zazo ezibalaseleyo, nto leyo ezenza zibe luncedo kakhulu kwiindawo ezahlukeneyo zoshishino. Zibonisa ubulukhuni obubalaseleyo kunye nozinzo oluhle kakhulu kubushushu.

Ezi ngubo zikwabonelela ngokungangeni kakuhle kweekhemikhali, zixhathisa ukuhlaselwa ziikhemikhali ezininzi ezirhabaxa. Ukumelana kwazo nombane okuphezulu kuzenza zibe zi-insulators zombane ezibalaseleyo. Ngaphezu koko, iingubo ze-Al2O3 zibonelela ngokumelana okumangalisayo kwe-oxidation, ngakumbi kumaqondo obushushu aphezulu, zikhusela izinto ezingaphantsi ekuwohlokeni.

Usetyenziso oluqhelekileyo lwe-Al2O3 CVD Coating

Iingubo ze-Al2O3 zisetyenziswa kakhulu kwiindawo ezifuna kakhulu ukuguga nokugqwala.izisombululo ezimiselweyoukhuseleko kwiindawo ezahlukeneyo zokusebenza. Abavelisi bafaka ii-Al2O3 coatings kwi-tungsten substrates ukuphucula ukumelana ne-oxidation kumaqondo obushushu angaphezu kwama-800 °C, ingakumbi adlula i-1000 °C, apho i-tungsten ihlala idala kwaye inyuse i-WO3. Ezi coatings zikwanciphisa ngempumelelo izinga le-oxidation yee-alloys ze-γ-TiAl phakathi kwama-900–1000 °C.I-Al2O3 yinkqubo yokugquma eqhelekileyo yezixhobo ze-carbide ezifakwe isamente, ezisebenza phantsi kweemeko ezifuna ubulukhuni obuhle, ukumelana nokuguguleka, ukubopha okuqinileyo, kunye nokuzinza kobushushu. Ukongeza, abaphandi bacinga nge-Al2O3 coatings njenge-ukukhusela ukugqunywa kwepetroli kwii-reactors ezikhawulezayo ezipholileyo nge-lead (ii-LFR)ngenxa yokumelana kwazo nokugqwala okuphezulu kwiindawo zenyukliya.

Iingenelo kunye nokuNciphisa kweAl2O3 CVD Coating

Iingubo ze-Al2O3 zibonelela ngeenzuzo ezibalulekileyo, kubandakanya ubulukhuni obuhle kakhulu, uzinzo kumaqondo obushushu aphezulu, kunye nokumelana okuphezulu kweekhemikhali kunye ne-oxidation. Ezi mpawu zandisa ubomi bezinto kwiimeko ezinzima. Nangona kunjalo, iingubo ze-Al2O3 zikwabonisa imida ethile.

• Ubushushu be-substrate ye-CVD, ngokuqhelekileyo malunga700 °C, iphezulu ngokwaneleyo ukuba inyibilikise ii-alloys ze-aluminium. Oku kunciphisa iintlobo zezinto ezinokufumana uqweqwe.
• Olu bushushu benkqubo luphezulu alulungele ukugquma iindawo zoomatshini, ingakumbi ezo zenziwe ngeentsimbi ezikhaphukhaphu ezinamaqondo okunyibilika aphantsi, njenge-aluminium alloy, ezisetyenziselwa ukunciphisa ubunzima bomatshini.
• Ubushushu obuqhelekileyo bokubeka i-deposit ephezulu malunga1050°CKwi-Al2O3 coatings, i-Al2O3 coatings ithintele kakhulu uphuhliso lwee-hybrid coatings ezininzi, ezifana ne-TiC/TiN/TiCN/Al2O3.
• Ukunciphisa ubushushu bokubekwa kwe-Al2O3 kuya kunciphisa uxinzelelo olushiyekileyo kwi-coating oludla ngokubangela ukuqhekeka.

Ukwaleka kwe-Silicon Carbide (SiC) CVD: Ukusebenza kunye nosetyenziso

Iimpawu eziphambili zokusebenza kwe-SiC CVD Coating

Iingubo ze-Silicon Carbide (SiC) CVD zineempawu ezininzi ezintle, nto leyo ezenza zilungele iimeko ezishushu kakhulu. Ezi ngubo zibonisa ubulukhuni obungaqhelekanga, obuhlala buqala kwi2000 to 2800 HV(Ubulukhuni bukaVickers). Obu bulukhuni buphezulu bubonelela ngokumelana nokuguguleka okuphezulu. I-SiC ikwanomoya ongcono wokuqhuba ubushushu, odla ngokuhla phakathi kwe-116 W/mK kunye300 W/mK. Le propati ivumela ukutshatyalaliswa kobushushu ngokufanelekileyo. Ngaphezu koko, ii-SiC coatings zibonelela ngokungangeni kakuhle kweekhemikhali kunye nobunyulu obuphezulu kakhulu. Zimelana neempendulo ezinee-asidi, ii-alkalis, kunye nezinye iikhemikhali ezirhabaxa, ziqinisekisa uzinzo kwiindawo ezirhabaxa. Olu xhathiso lweekhemikhali, kunye nozinzo lobushushu obuphezulu, lwenza iSiC ibe lukhetho oluqinileyo lwezinto.

Izicelo eziqhelekileyo zeSiC CVD Coating

Amashishini asebenzisa kakhulu ii-SiC coating kwizicelo ezifuna ukusebenza okuphezulu kunye nokuthembeka. Kwi-aerospace, abavelisi basebenzisa iSiC kwi-iindawo zenjini, izithintelo zobushushu, iiblade zeturbine, izikhuselo zobushushu, ii-thrusters, kunye nee-rocket nozzles. Ezi zinto zisebenza phantsi kobushushu obugqithisileyo kunye neemeko ezinzima. Ishishini le-semiconductor likwaxhomekeke kakhulu kwi-SiC. Ikhusela izixhobo zokucubungula ii-wafer, kubandakanya ii-wafer carriers, ii-etching chambers, kunye nee-deposition chambers kwi-LED kunye ne-semiconductor manufacture. I-SiC ikwasetyenziswa nakwi-ii-semiconductors ezinamandla aphezulu kunye nee-frequency eziphezulu, ii-RF amplifier, kunye nezixhobo zokutshintsha, apho iimpawu zayo zombane kunye nobunyulu bayo zibaluleke kakhulu.

Iingenelo kunye nokuNciphisa kweSiC CVD Coating

Iingubo zeSiC zibonelela ngeenzuzo ezibalulekileyo.Ubunyulu obuphezulu kakhulu bubalulekile ekugcineni iindawo ezingenangcoliseko, ingakumbi kwimveliso ye-semiconductor. Zibonelela ngokuqina kwiindawo ezinzima, zikhusela izixhobo ezifana nezitshintshi zobushushu kunye nee-reactors kwishishini lamandla kwiikhemikhali ezibolayo kunye nobushushu obugqithisileyo.Ukungangeni kweekhemikhali zeSiC kuqinisekisa uzinzo, ukwandisa ubomi bezixhobo kunye nokunciphisa iimfuno zokugcinwa. Amanqanaba aphezulu okucoceka anciphisa ukungcola, okuphucula ukusebenza kwizicelo ezinobuzaza. Nangona kunjalo, iingubo zeSiC zinemida. Amaqondo obushushu aphezulu okufakwa kwe-CVD SiC anokuthintela ukusetyenziswa kwayo kwizixhobo ezithile ze-substrate. Le nkqubo inokuba nzima ngakumbi kwaye ibize kakhulu xa ithelekiswa nezinye iindlela zokufaka.

Uthelekiso oluthe ngqo lwe-CVD Coatings: TiN vs. Al2O3 vs. SiC

Uhlalutyo oluthelekisayo loBulukhuni kunye nokuxhathisa ukunxiba

I-CVD Coating nganye ineenzuzo ezahlukeneyo zokuqina kunye nokumelana nokuguguleka. Iingubo zeTitanium Nitride (TiN) zihlala zibonisa ubunzima beVickers obuqala kwi-2000 ukuya kwi-2500 HV. Oku kubonelela ngokhuseleko oluhle ekugugulekeni okurhabaxa. I-TiN ikwabonisaii-coefficients zokungqubana phakathi kwe-0.4 kunye ne-0.9. Nangona kunjalo, uthelekiso oluthe ngqo lobungakananiamanqanaba okuguguleka okanye ii-coefficients zokungqubana phakathi kwe-TiN, i-Al2O3, kunye ne-SiC CVD coatings azibhalwanga ngokubanzi kwisifundo esinye esibanzi. Ii-coating ze-Aluminium Oxide (Al2O3) zihlala zinobunzima be-Vickers obumalunga ne-1800 HV 0.5, obubonelela ngokumelana nokuguguleka okugqwesileyo, ngakumbi kwizicelo zobushushu obuphezulu. Ii-coating ze-Silicon Carbide (SiC) zibonakala zinobunzima obukhethekileyo, obuhlala buqala kwi-2000 ukuya kwi-2800 HV. Oku kwenza i-SiC imelane kakhulu nokuguguleka okurhabaxa nokukhukulekayo, okuhlala kudlula i-TiN kunye ne-Al2O3 kwiimeko ezimandundu.

Uhlalutyo oluthelekisayo lokuZinza koBushushu kunye nokuxhathisa i-Oxidation

Uzinzo lobushushu kunye nokumelana ne-oxidation zizinto ezibalulekileyo kwizicelo zobushushu obuphezulu. Iingubo ze-TiN zibonisa uzinzo oluphakathi lobushushu. Ziqala uku-oxidation emoyeni kumaqondo obushushu angaphezu kwama-500°C. Kwiimeko ezine-oxygen, iingubo ze-TiNi-oxidize ngokupheleleyo kwaye ichithe kwiiyure ezingamakhulu ambalwaxa zibekwe kwindawo enamanzi ashushu kakhulu. Oku kubonisa iimpawu zokuzikhusela ezingalunganga phantsi kweemeko ezinjalo. Iingubo ze-Aluminium Oxide (Al2O3), ngokuchaseneyo, zibonelela ngozinzo oluphezulu lobushushu kunye nokumelana ne-oxidation. Zikhusela ngokufanelekileyo izinto ezingaphantsi kobushushu obungaphezulu kwe-1000°C, nto leyo ezenza zibe zilungele iindawo ezinobushushu obugqithisileyo. Iingubo ze-Silicon Carbide (SiC) nazo zibonisa uzinzo olubalaseleyo lobushushu kunye nokumelana ne-oxidation. Abaphandi baye babonisa uzinzo olubalaseleyo lobushushu kunye nokumelana ne-oxidation.uthelekise ukuziphatha kokugqwala kwe-hydrothermal ye-SiC kunye ne-Al2O3, igxininisa ukusebenza kakuhle kweSiC kwiindawo ezishushu kakhulu nezinobushushu obuphezulu. I-SiC igcina ukuthembeka kwayo kunye neempawu zayo zokukhusela kumaqondo obushushu aphezulu kakhulu, idla ngokudlula lawo apho iTiN ibiya konakala khona.

Uhlalutyo oluthelekisayo lwe-Chemical Inertness kunye nePropathi zoMbane

Ukungangeni kweekhemikhali kunye neempawu zombane zezi ngubo zahluka kakhulu, nto leyo echaphazela ukufaneleka kwazo kwizicelo ezithile. Iingubo zeTiN zibonelela ngokungangeni kweekhemikhali okuhle, zimelana nezinto ezininzi ezibolayo. Ngombane, iTiN eninzi inokumelana nombane phakathi kwe-1.0 × 10⁻⁷ kunye ne-4.0 × 10⁻⁷ Ω·m. I-PVD TiN ibonisa ukunganyangeki ukusuka kwi-3.0 × 10⁻⁷ ukuya kwi-1.0 × 10⁻⁶ Ω·m. I-CVD TiN ibonisa uluhlu lokunganyangeki oluyi-2.0 × 10⁻⁶ ukuya kwi-1.0 × 10⁻⁴ Ω·m. Oku kubeka iTiN kudidi lwe-semiconductor okanye lwe-semi-metallic.

Iingubo zeAluminium Oxide (Al2O3) azinazo iikhemikhali ezininzi, zimelana nohlaselo oluvela kwiiasidi ezininzi, iialkali, kunye nezinye iikhemikhali ezirhabaxa. I-Al2O3 sisigqubuthelo sombane esinamandla. Iifilimu ze-Al2O3 ezincinci ezikhuliswe nge-Atomic Layer Deposition (ALD) zibonisa i-dielectric constant ye-6.7 kwiifilimu ze-120 Å ubukhulu. Uxinano lwangoku lokuvuza kwiifilimu ze-Al2O3 luyancipha njengoko ubukhulu befilimu bukhula, kunye namaxabiso ajikeleze i-1 nA/cm² kwiifilimu ezityebileyo. I-voltage yokuqala ye-tunneling ye-Fowler-Nordheim (FN) kwiifilimu ze-Al2O3 iyanda ngobukhulu, ukusuka kwi-3 V kwiifilimu ze-60 Å ukuya kwi-5.5 V kwiifilimu ze-184 Å. Iingubo ze-Silicon Carbide (SiC) nazo zinobungcathu obungaqhelekanga beekhemikhali kunye nobunyulu obuphezulu kakhulu. Zimelana neempendulo ezahlukeneyo zee-arhente ezirhabaxa. I-SiC inokusebenza njenge-semiconductor okanye i-insulator ngokuxhomekeke kwisakhiwo sayo se-doping kunye ne-crystalline. Ukumelana kwayo nombane kubalulekile kwizicelo kwii-semiconductors ezinamandla aphezulu kunye ne-frequency ephezulu.

Izinto zokuQwalasela iindleko kunye neenzuzo kwizixhobo zokugquma zeCVD

Ukuvavanya umlinganiselo weendleko-inzuzo kwisixhobo ngasinye sokugquma seCVD kubalulekile ekwenzeni izigqibo ezinolwazi. Iingubo zeTitanium Nitride (TiN) ngokubanzi zimela ukhetho olungabizi kakhulu. Zibonelela ngokulinganisela okuqinileyo kobulukhuni, ukumelana nokuguguleka, kunye nokugqitywa kwegolide okubonakalayo okukhangayo. Oku kwenza iTiN ibe lukhetho olungabizi kakhulu kwizicelo ezifuna ubomi bezixhobo obuphuculweyo kunye nokhuseleko oluphakathi ngaphandle kweemfuno ezigqithisileyo zobushushu okanye zeekhemikhali. Ukusetyenziswa kwayo ngokubanzi kwizixhobo zokusika kunye nezinto zokuhombisa kubonisa umlinganiselo wayo olungileyo wokusebenza-kwixabiso kwiimfuno ezininzi zoshishino.

Iingubo ze-Aluminium Oxide (Al2O3) zihlala zifuna utyalo-mali lokuqala oluphezulu xa kuthelekiswa ne-TiN. Nangona kunjalo, ukuzinza kwazo okuphezulu kobushushu, ukumelana ne-oxidation, kunye nokungangeni kweekhemikhali kudla ngokuthethelela eli xabiso linyukileyo. Kwizicelo kwiindawo ezinobushushu obuphezulu, ezifana nezixhobo ze-furnace okanye izixhobo zokusika eziphambili, i-Al2O3 yandisa ubomi bezinto. Oku kunciphisa amaxesha okutshintsha kunye neendleko zokulungisa ngokuhamba kwexesha. Ukuqina kunye nokhuseleko oluphuculweyo i-Al2O3 inika ukonga ixesha elide, okwenza kube lukhetho oluluncedo nangona iindleko eziphezulu zangaphambili ziphezulu.

Iingubo zeSilicon Carbide (SiC) zihlala zithwala ixabiso eliphezulu lokusetyenziswa phakathi kwezi zinto zintathu. Iinkqubo zokubeka izinto ezintsonkothileyo kunye nesidingo sobunyulu obuphezulu kakhulu zinegalelo kule ndleko. Nangona ixabiso liphezulu, iSiC inika ukusebenza okungenakuthelekiswa nanto kwiindawo ezifuna kakhulu. Ubulukhuni bayo obungaqhelekanga, ukungangeni kweekhemikhali, kunye nokuqhuba kobushushu kwenza ukuba ibe yinto ebalulekileyo kwizicelo ezibalulekileyo ekucutshungulweni kwee-semiconductor, kwi-aerospace, nakwimizi-mveliso yenyukliya. Kula macandelo, iindleko zokusilela kwecandelo okanye ukungcola zingaphezulu kakhulu kuneendleko zokuqala zokugquma. Ukuphila ixesha elide kunye nokhuseleko oluphezulu lweSiC kuqinisekisa ukuthembeka nokusebenza kunye nokhuseleko, okubonelela ngembuyekezo ebalulekileyo kutyalo-mali kwiimfuno ezizodwa, zokusebenza okuphezulu.

Izinto Ezichaphazela Ukukhethwa Kwezinto Zokugquma zeCVD Ezifanelekileyo

Ukukhetha izixhobo zokugquma zeCVD ezifanelekileyo kufuna ukuqonda ngokupheleleyo iimfuno ezithile zesicelo. Iindlela ezininzi ezibalulekileyo zokulinganisa ezilawula olu khetho. Ukuqina kunye nokumelana nokuguguleka kubaluleke kakhulu kwiindawo ezihlala zingqubana okanye zikrunekile. I-SiC igqwesile kwezi ndawo, inika ukumelana okuphezulu kokuguguleka, ukukhukuliseka, kunye nokukruneka ngenxa yesakhiwo sayo esixineneyo, esingenazimbobo kunye nokunamathela okuqinileyo. I-Al2O3 ikwabonelela ngokumelana nokuguguleka okuhle, ngakumbi kumaqondo obushushu aphezulu, ngelixa i-TiN inika ukhuseleko oluhle kwiimeko ezingembi kangako.

Ukugquma komphezulu kunye nobunzima nako kudlala indima ebalulekileyo. Iingubo ze-CVD zihlala zigqwesileukugquma iijometri ezintsonkothileyo kunye neendawo zangaphakathi ezinobukhulu obufanayoZibonelela ngokugubungela rhoqo kwiindawo ezingabonwayo. Olu phawu lubalulekile kwiindawo ezintsonkothileyo apho kufuneka ukhuseleko olufanayo. Ukumelana nokusingqongileyo kunye neekhemikhali kwengubo yenye into ebalulekileyo. Kwizinto ezinoburhalarhume ezifana ne-H₂S kunye nee-asidi ezinamandla, i-SiC kunye ne-Al2O3 zibonelela ngokuxhathisa okuphezulu ngenxa yesakhiwo sazo esingenazo iimbobo, zenza umqobo oqinileyo.

Ubukhulu bengubo, obuqhele ukuba phakathi kwe-25-75 microns, bufana kakhulu kuzo zonke izicelo ze-CVD. Obu bukhulu buhlala bufana bunegalelo ekugqityweni komphezulu ogudileyo nocolekileyo. Ubushushu bokusebenza bengubo buchaphazela kakhulu ukhetho lwezinto. I-Al2O3 kunye ne-SiC zifanelekile kumaqondo obushushu aphezulu, zikhusela izixhobo eziqinileyo ngokufanelekileyo. Okokugqibela, iindleko zengubo, nangona ziphezulu kwezinye izixhobo zengubo ze-CVD, zihlala zibonisa ubude obuphezulu kunye nokhuseleko. Oku kwenza utyalo-mali lokuqala lube luncedo ekwandiseni ubomi benxalenye kunye nokuqinisekisa ukusebenza okuthembekileyo kwiindawo zoshishino ezinzima.

Iimeko zokusetyenziswa kwehlabathi lokwenyani: Ukukhetha eyona CVD Coating ilungileyo

I-CVD Coating yezixhobo zoomatshini kunye nokusika ezikhawulezayo

Izixhobo zokusika nokulungisa ezikhawulezayo zifuna ukuqina okugqwesileyo kunye nokumelana nokuguguleka. Ezi zixhobo zisebenza phantsi kokuguguleka okukhulu kunye nobushushu, nto leyo etshabalalisa ngokukhawuleza iindawo ezingakhuselekanga. Ukukhetha ukuguguleka okuchanekileyo kwandisa ubomi bezixhobo kwaye kuphucula ukusebenza kakuhle kokulungisa. Iingubo zeTitanium Nitride (TiN) bezisebenza ixesha elide njengomgangatho wezixhobo zokusika ezisetyenziswa ngokubanzi. Zibonelela ngobunzima obuhle kwaye zinciphisa ukuguguleka, nto leyo enceda ekuthinteleni ukuguguleka kwangaphambi kwexesha kwezixhobo. Nangona kunjalo, izicelo ezikhethekileyo ngakumbi, ingakumbi ezibandakanya iintsimbi eziqinileyo, zifuna ukuguguleka okunamandla okumelana nobushushu kunye nokurhawuzelela.

Ukuze kusetyenziswe isinyithi esinqunqiweyo ngesantya esiphezulu, kukho izinto zokugquma ze-Aluminium Oxide (Al₂O₃).uzinzo olukhethekileyo lobushushu kunye neekhemikhalikumaqondo obushushu aphezulu. Olu zinzo lubenza babe ngabafanelekileyo ekugcineni ukuthembeka kwezixhobo ngexesha lemisebenzi yoomatshini enamandla. Omnye umchasi onamandla kule ndawo yiTitanium Carbonitride (TiCN). Xa isetyenziswa ngeCVD, iTiCN inika ukumelana nokuguguleka okugqwesileyo. Olu phawu lubonakala luluncedo kakhulu kwimishini yentsimbi, apho ukufakwa okuqinileyo kwindawo yokusebenza kunokukrazula ngokukhawuleza umphezulu wesixhobo. Ezi ngubo ziphucukileyo zivumela izixhobo ukuba zisebenze ngesantya esiphezulu kunye nokutya, okukhokelela ekukhuleni kwemveliso kunye nokugqitywa komphezulu okuphezulu kwiindawo ezenziwe ngomatshini.

Ukufakwa kwe-CVD kwiindawo ezinobungozi kwiikhemikhali

Izinto ezisebenza kwiindawo zeekhemikhali ezirhabaxa zijongene nosongelo oluqhubekayo lokuhlaselwa ziikhemikhali, nto leyo enokukhokelela ekuwohlokeni kwezinto kunye nokusilela kwangethuba. Iingubo zokukhusela ezisebenzayo zibalulekile ukuqinisekisa ukuhlala ixesha elide kunye nokuthembeka kwezi meko zinzima. Iingubo ze-Aluminium Oxide (Al₂O₃) kunye neSilicon Carbide (SiC) CVD zibalaseleyo ngokungasebenzi kakuhle kweekhemikhali.

Iingubo ze-Al₂O₃ zisebenza kakuhle kwiindawo ezishushu zamanzi anzima (SCW). Ezi meko zibonisa amaqondo obushushu aphezulu, ahlala ejikeleze500 °C, uxinzelelo oluphezulu lwe-25 MPa, kunye nee-oxidizing agents ezinamandla. Izikali ze-oxide ezisekelwe kwi-alumina zaziwa kakhulu ngokunciphisa iintlobo ezahlukeneyo zokugqwala kwiimeko ze-SCW. Ezi ziquka ukuqhekeka kokugqwala koxinzelelo, ukugalela imingxuma, kunye nokugqwala ngokubanzi, okwandisa kakhulu ubomi bezinto.

Iingubo zeSiC zikhusela ikakhulu izinto ezidityanisiweyo zekhabhoni/khabhoni (C/C) kwi-oxidation kumaqondo obushushu aphezulu, ngakumbingaphezulu kwe-723 K, kwiindawo eziqulethe ioksijini. Olu khuseleko lubalulekile kwi-C/C composites, njengoko ukusetyenziswa kwazo njengezinto zokwakha ezishushu kakhulu kuthintelwa yi-oxidation. Iingubo ze-ceramic ze-SiC zikwakhusela i-C/C composites kwi-oxidation kwiindawo eziqulethe umphunga wamanzi.ngo-1773 KNangona umphunga wamanzi unokukhawulezisa i-oxidation ye-SiC ceramics, ikwanceda ekwakhiweni komaleko ofana neglasi. Lo maleko ofana neglasi unceda ukuvala nokukhusela i-C/C matrix ngokukhawuleza, ukuqinisekisa ukusebenza okuqinileyo nakwiimeko ezinzima zomswakama, kunye nobushushu obuphezulu.

I-CVD Coating yokumelana ne-Oxidation yobushushu obuphezulu

Izinto ezivezwa kubushushu obugqithisileyo kunye neemeko ezibangela i-oxidation zifuna iingubo ezinokumelana neemeko ezinzima ngaphandle kokuwohloka. Ukumelana ne-oxidation ixesha elide kumaqondo obushushu angaphezulu kwe-1000°C yimfuneko ebalulekileyo kwiindlela ezininzi zomoya, amandla, kunye nezicelo zoshishino.

Iingubo zeNiAl ezilungiselelwe yiCVD zibonisa ukubopha okuqinileyo kwi-substrate kunye noxinano oluphezulu. Ezi mpawu zinegalelo ekuchaseni ngcono i-oxidation kumaqondo obushushu aphezulu.ngaphezulu kwe-1100°C, iingubo ze-nickel aluminide zenza ngokukhawuleza isikali se-α-Al₂O₃ esizinzileyo ngokwe-thermodynamically. Esi sikali sibalulekile ekuboneleleni ngokhuseleko lwe-oxidation lwexesha elide kwizinto ezingaphantsi.

Iingubo zeSilicon Carbide (SiC) nazo zibonisa ukumelana okuhle kakhulu ne-oxidation. Ziyakwenza oku ngokwenza umaleko weglasi weSiO₂ okhuselayo. Lo maleko ufana neglasi unokulungisa ngempumelelo iziphene ezifana nemingxunya kunye neembobo, ugcine ukuthembeka kwengubo. Umzekelo, i-SiC coating ibonise ukwehla kobunzima kuphela0.48 wt%emva kwemijikelo elithoba yobushushu phakathi kwe-1873 K (1600°C) kunye nobushushu begumbi. Esi siphumo sibonisa ukumelana okusebenzayo kwe-oxidation nokuba phantsi kokuguquguquka okukhulu kobushushu. Ngaphezu koko, iingubo ze-SiC/B/SiC ezininzi zibonelelaukhuseleko oluphezulu lwe-oxidationkwi-C/SiC composites xa kuthelekiswa neengubo ze-SiC ezineeleya ezintathu. Ezi nkqubo zineeleya ezininzi zisebenza kakuhle kumanqanaba obushushu ahlukeneyo, ukusuka kwi-700°C ukuya kwi-1500°C. I-ZrB₂-SiC ikwabonwa njengesisekoi-ceramic yobushushu obuphezulu kakhulu (UHTC)Inika ukumelana okuhle kakhulu nokunganyibiliki kwamanzi kunye nokunganyibiliki kwamanzi kwiindawo ezishushu kakhulu, nto leyo eyenza ukuba ifaneleke kakhulu kwiindawo ezisetyenziswa kakhulu.

I-CVD Coating yokukhusela umbane kunye nokunxiba

Izinto ezisetyenziswayo zihlala zifuna zombini ubushushu bombane kunye nokhuseleko oluqinileyo lokuguguleka, ingakumbi kwiindawo ezixineneyo. Iingubo zeSilicon Carbide (SiC) zigqwesile kwezi ndima zimbini. Zibonelela ngolawulo oluphezulu lobushushu kunye nobushushu bombane, nto leyo ebalulekileyo ekuthembekeni nasekuhlaleni ixesha elide kweenkqubo kwizithuthi zombane kunye neze-hybrid. Umzekelo, iingubo zeSiC zibalulekile kwiiinkqubo zolawulo lwebhetri kunye nezixhobo ze-elektroniki ezinamandla aphezulungaphakathi kwicandelo leemoto. Ezi zicelo zifuna ukususwa kobushushu ngokufanelekileyo ngelixa zigcina ukwahlulwa kombane.

Iingubo zeSiC zikwasetyenziswa kakhulu kwizicelo ze-elektroniki ezishushu kakhulu. Zibonelela ngolawulo oluhle kakhulu lobushushu ngelixa ziqinisekisa ukwahlulwa kombane kwii-elektroniki zamandla, ukupakishwa kwezixhobo ze-elektroniki, kunye ne-substrates ze-power module. I-SiC isebenza njengesixhobo esifanelekileyo kwii-insulators zombane kwiindawo ezifuna ubushushu apho ii-insulators ze-polymer eziqhelekileyo ziya konakala khona. Inika amandla aphezulu e-dielectric, ahlala eqala kwi15-25 kV/mm.Ngaphandle kweempawu zombane, ii-SiC coatings zibonelela ngokhuseleko olukhethekileyo lokuguguleka kwizicelo zoshishino. Izinto ezikhuselweyo ngee-SiC coatings zibonisa ubomi benkonzo obuphucukileyo kakhulu, obuhlala bude ngokuphindwe kathathu ukuya kahlanu kunezixhobo eziqhelekileyo, kwimisebenzi yokupompa ngodaka. Olu phuculo luvela kwindalo yazo exineneyo, engenamibhobho kunye nokungqubana okunciphileyo. Ngokufanayo, ii-SiC coatings zonyusa ukumelana nokuguguleka kwiindawo ezirhabaxa kakhulu ezifana nemisebenzi yokuqhumisa isanti. Izinto zevalve, izitywino zepompo, ii-nozzles, kunye neendawo zokuthwala nazo ziyazuza ekusebenzeni okugqwesileyo kokuguguleka kwee-SiC coatings, zijongana ngempumelelo nokuguguleka koomatshini njengendlela yokuqala yokusilela.

I-CVD Coating yoLungiselelo lweSemiconductor kunye neemfuno zoBumsulwa obuPhezulu

Ishishini le-semiconductor lifuna izixhobo ezinobunyulu obuphezulu kakhulu kunye nokungasebenzi kakuhle kweekhemikhali ukuthintela ungcoliseko kunye nokuqinisekisa ukuthembeka kwenkqubo. I-Solid Silicon Carbide (CVD SiC) imele njengokhetho oluphambili lwezixhobo kwizixhobo zokucubungula i-semiconductor. Oku kuquka iindawo ezifana neeringi kunye neziseko ze-RTP/EPI, kunye nezixhobo ze-plasma etch cavity. Abavelisi bakhetha i-CVD SiC ngenxa yobunyulu bayo obuphezulu kakhulu,idlula i-99.9995%. Ikwanika ukumelana okumangalisayo neekhemikhali. Ngaphezu koko, i-CVD SiC inciphisa ukuveliswa kweesuntswana kuba ayinazo iinqanaba zesibini kwimiphetho yeenkozo. Le nto inokucocwa ngempumelelo nge-HF/HCl eshushu ngaphandle kokuwohloka okukhulu. Olu phawu lunegalelo kubomi benkonzo ende kunye neesuntswana ezimbalwa, ezibalulekileyo ekugcineni iimeko ezintle ezifunekayo kwimveliso ye-semiconductor.

Ukufakwa kweCVD kwiinkqubo zeMultilayer kunye nokusebenza okuphuculweyo

Iinkqubo zokugquma ezinee-multilayer zidibanisa izinto ezahlukeneyo ukuze kufezekiswe ukusebenza okuphuculweyo ngaphaya koko kunokunikezelwa lileya elinye. Ezi nkqubo zisebenzisa iipropati ezizodwa zeleya nganye ukudala isiphumo sokusebenzisana. Umzekelo, elinye ileya linokubonelela ngobulukhuni obugqwesileyo, ngelixa elinye libonelela ngokumelana nokugqwala okuphezulu okanye uzinzo lobushushu. Le ndlela ivumela iinjineli ukuba zilungelelanise ii-coating ngokuchanekileyo kwiimfuno ezithile zesicelo. Iinkqubo ze-multilayer zinokoyisa imida yezixhobo ngazinye. Umzekelo, ileya eqinileyo kodwa ebuthathaka ingadityaniswa neleya eqinileyo, ethambileyo ngakumbi ukuphucula ukumelana nokuqhekeka ngokubanzi. Ngokufanayo, ileya enokumelana nokuxinana okuphezulu kwe-oxidation ingakhusela ileya engaphantsi ebonelela ngokumelana nokuguguleka okuhle kodwa isengozini yokuwohloka kobushushu obuphezulu. Olu dibaniso lwezixhobo olucwangcisiweyo lukhokelela kwii-coating ezinokuqina okuphezulu, ubomi obude, kunye nokusebenza kakuhle okuphuculweyo kwiindawo zoshishino ezinzima.

Ukhetho olufanelekileyo lwezinto zokugquma zeCVD luxhomekeke ngokupheleleyo kwiimfuno ezithile zesicelo. Iingubo zeCVD zeTiN, Al2O3, kunye neSiC nganye inika iingenelo ezikhethekileyo kwimingeni eyahlukeneyo yemizi-mveliso. Ukwenziwa kwezigqibo ezinolwazi ngokusekelwe kwiiprofayili zazo zokusebenza ezahlukeneyo kwandisa ixesha elide lezinto kunye nokusebenza kakuhle. Iinjineli kufuneka ziqwalasele ngononophelo zonke izinto ukuze zikhethe izinto ezifanelekileyo kwiimfuno zazo ezithile. Oku kuqinisekisa ukhuseleko oluphezulu kunye nobomi benkonzo ende kwiindawo ezibalulekileyo.

FAQ

Yintoni eyona nzuzo iphambili yokwaleka kwe-TiN CVD?

Iingubo zeTiN zibonelela ngokuqina okugqwesileyo kunye nokumelana nokuguguleka. Zikwabonelela ngokungasebenzi kakuhle kweekhemikhali. Amashishini amaninzi asebenzisa iTiN kwizixhobo zokusika kunye nokusetyenziswa kokuhombisa. Ilinganisa ukusebenza kunye neendleko ezifanelekileyo.

Yeyiphi i-CVD coating enika ukuxhathisa okungcono kwe-oxidation kumaqondo obushushu aphezulu kakhulu?

Iingubo ze-Al2O3 kunye ne-SiC CVD zombini zibonelela ngokumelana okuphezulu kwe-oxidation. I-Al2O3 ikhusela izinto ezingaphezulu kwe-1000°C. I-SiC yenza umaleko weglasi ye-SiO2 okhuselayo, osebenza kakuhle nokuba kwi-1600°C. Zibalasele kubushushu obugqithisileyo.

Kutheni i-SiC CVD coating ikhethwa kakhulu xa kusetyenzwa nge-semiconductor?

Iingubo zeSiC zibonelela ngobunyulu obuphezulu kakhulu, obudlula i-99.9995%. Zibonelela ngokumelana okugqwesileyo kweekhemikhali kwaye zinciphisa ukuveliswa kweesuntswana. Ezi mpawu zibalulekile ekuthinteleni ungcoliseko kwiindawo zokwenziwa kwee-semiconductor ezinobuthathaka.

Ngaba ii-CVD coatings zinemida malunga nezinto ze-substrate?

Ewe, iinkqubo zeCVD zihlala zifuna amaqondo obushushu aphezulu okufakwa kwezinto. Oku kunciphisa ukusetyenziswa kwazo kwizinto ezithile ze-substrate. Umzekelo, amaqondo obushushu aphezulu anokunyibilikisa iintsimbi ezinamaqondo aphantsi okunyibilika njengee-aluminium alloys.