Kusarudzwa kweCVD Coating Material: Kuenzanisa Kwekushanda uye Kushandiswa kweTiN, Al2O3, SiC

Kusarudza zvinhu zveCVD coating zvakakodzera kwakakosha pakuvandudza mashandiro ezvikamu uye kugara kwenguva refu. Chinyorwa ichi chinoenzanisa zvakananga Titanium Nitride (TiN), Aluminum Oxide (Al2O3), uye Silicon Carbide (SiC) CVD coatings kuti zvitungamirire kusarudzwa kwezvinhu zvekushandisa mumaindasitiri. Kunzwisisa mashandiro akasiyana echinhu chimwe nechimwe kwakakosha pakuita sarudzo dzakarongeka. Musika wepasi rose weCVD coating wasvika.Mabhiriyoni makumi maviri nemakumi matatu nemasere emadhora ($20.38 bhiriyoni) mugore ra2023, nefungidziro dzinoratidza kukura kusvika kumadhora mabhiriyoni makumi mana nemana nemazana maviri emadhora ($44.2 bhiriyoni) panosvika gore ra2032, zvichiratidza kukura kwegore negore kwe7.58% panguva yekufanotaura.

Zvinhu Zvinokosha Zvaunofanira Kuziva

• Kupfeka kweCVDseTiN, Al2O3, uye SiC zvinoita kuti zvikamu zvive zvakasimba uye zvinogara kwenguva refu.
• Mapendi eTiN akanakira zvishandiso nekushongedza; akaomarara uye haaparadzi kupfekwa.
• Mapendi eAl2O3 anoshanda zvakanaka munzvimbo dzinopisa zvikuru uye anodzivirira makemikari; anodzivirira zvikamu kubva kungura.
• Mapendi eSiC akanakira kupisa kwakanyanya uye makemikari, semukugadzira machipisi emakombiyuta; akachena uye akasimba.
• Kusarudza pendi chaiyo kunoenderana nezvinofanira kuitwa nechikamu chacho uye kuti chichashandiswa kupi.

Kunzwisisa Tekinoroji yeCVD Coating

Chii chinonzi Chemical Vapor Deposition (CVD)?

Kubviswa kweChemical Vapor Deposition (CVD) inzira yakaoma inoisa mafirimu matete ezvinhu zvakasimba pa substrate kubva muchikamu chegasi. Iyi nzira inosanganisira kutevedzana kwemakemikari anoitika pamusoro pe substrate kana pedyo nayo. Kugadziriswa kwemakemikari makuru muCVD kunosanganisirakuora kwekupisa, kuderedza, oxidation, uye kuumbwa kwemakomputa. Maitiro aya anowanzo sanganisira magasi-phase reactions, uko mhando dzepakati dzinoumbwa kuburikidza ne precursor chemical reactions. Zvadaro, maitiro epamusoro ane chekuita nekupararira uye maitiro emhando idzi pamusoro pe substrate, zvichitungamira kukura kwefirimu inodiwa. Mamwe marudzi emaitiro akajairika anosanganisirahydrolysis, pyrolysis, uye displacement.

Nei CVD Coatings Yakakosha Pakuvandudza Zvinhu

Kuputira CVD kwakakosha pakuvandudza hunhu hwezvinhu mumaindasitiri akasiyana-siyana. Kunopa mabhenefiti makuru kupfuura mamwe matekinoroji ekuputira. Semuenzaniso, kuputira CVD kunodzivirira kubvaoxidation uye ngura, kuwedzera hupenyu hwezvikamu. Vagadziri vanogona kugadzirisa machira aya kuti aenderane nezvinangwa zvekushanda, zvakaita sekuwana kusashanda kwemakemikari. Iyi tekinoroji inovandudza zvakanyanya mashandiro uye hunhu hwemachira ekurapa, ichivandudza kuenderana kwemuviri, kuramba kupfeka, kuomarara, uye kugara kwenguva refu. CVD inopfuura pakuenderana, ichipa ganda rakafanana kunyangwe munzvimbo dzakaoma dzemukati nedzekunze. Izvi zvinobvumira kuiswa kwechikamu chimwe chete chezvinhu panzvimbo dzese dzemachira. Zvikamu zvegasi zvemhando yepamusoro zvinovimbisa machira akachena zvakanyanya. Kusiyana nemaitiro mazhinji ePVD, maitiro eCVD ndeechokwadi.hazvingogumiri pakushandisa nzira yekuona zviri kuitika, zvichiita kuti nzvimbo dzese dzechikamu dzipfekerwe, kusanganisira shinda nemaburi asingaonekwe. Kupfekedzwa uku kunobatana pamusoro panguva yekuita, zvichiita kuti pave nekunamatira kwakanyanya kana tichienzanisa nePVD yakajairika kana machira ekupfapfaidza ane tembiricha yakaderera. Kugadziriswa kwegasi rekutanga kunobvumira machira ane resistance yakawedzerwa yekupfeka, lubricity yakanyanya, resistance corrosion, kana kuchena kwakanyanya.

Kupfeka kweTitanium Nitride (TiN) CVD: Kushanda uye Mashandisirwo

Hunhu Hukuru hweKushanda kweTiN CVD Coating

Mapendi eTitanium Nitride (TiN) CVD ane hunhu hwakasiyana-siyana hwekushanda. Ane kuomarara kwakanyanya, kazhinji kunobva pa2000 kusvika 2500 HV, izvo zvinowedzera zvakanyanya kuramba kupfeka. Kuomarara uku kwakanyanya kunoita kuti zvikamu zvigare kwenguva refu kubva pakugumburwa uye kupwanyika. TiN inopawo kusagadzikana kwakanaka kwemakemikari, ichidzivisa maitiro nezvinhu zvakawanda zvinoparadza. Kukwana kwayo kushoma kwekukweshana kunobatsira kuderedza kugadzirwa kwekupisa uye kuvandudza kushanda zvakanaka. Uyezve, mapendi eTiN ane ruvara rwegoridhe runoyevedza, zvichiita kuti akwanise kushongedza. Pendi iyi inochengetedza kunaka kwayo uye kushanda kwayo pakupisa kwakakwira, kunyangwe kuramba kwayo kuoxidation kusiri kwakakwira sezvimwe zvinhu.

Maitiro Akajairika eTiN CVD Coating

Maindasitiri anoshandisa zvakanyanya TiN CVD coating pakushandiswa kwakasiyana-siyana kwakakosha nekuda kwehunhu hwayo hwakasimba. Vagadziri vanowanzoisa TiN pamaturusi ekucheka, akadai semabhora, zvigayo zvekupedzisira, uye mashizha ekucheka, kuwedzera hupenyu hwadzo uye kuvandudza mashandiro ekucheka. Zvigadzirwa zvekurapa zvinobatsirawo kubva kuTiN coatings, izvo zvinowedzera kuenderana kwemuviri uye kuramba kupfeka. Zvikamu zvemuchadenga zvinoshandisa TiN nekuda kwekugara kwayo kwenguva refu uye dziviriro kubva mumamiriro ekushanda akaomarara. Pamusoro pezvo, kupenya kwakanaka kwegoridhe kunoita kuti TiN ive sarudzo yakakurumbira yekushongedza zvinhu zvakaita sezvishongo nemawachi.

Zvakanakira uye Zvisingakwanisike zveTiN CVD Coating

Mapendi eTiN CVD ane mabhenefiti makuru. Anowedzera zvakanyanya hupenyu hwebasa rezvishandiso nezvikamu, zvichideredza mari yekutsiva uye nguva yekushanda. Mapendi aya anopa simba rakanaka rekudzivirira kupfeka nekukwesha, zvakakosha kune zvikamu zvinogara zvichikweshana. Kunamatira kwawo kwakanaka kune akasiyana-siyana kunoita kuti pave nechisungo chakavimbika uye chinogara kwenguva refu. Zvisinei, mapendi eTiN ane miganhu. Anoratidza kugadzikana kwekupisa kuri pakati nepakati kana tichienzanisa nedzimwe ceramics dzepamusoro, nekuoxidation kunoitika patembiricha dziri pamusoro pe500°C mumhepo. Kunyange zvazvo dzakaoma, dzinogona kupwanyika, izvo zvinogona kutungamira mukupwanyika pasi pemitoro yakakomba. Maitiro ekuisa zvinhu anowanzoda tembiricha yakakwira, izvo zvinogona kuganhurira kushandiswa kwayo kune zvimwe zvinhu zve substrate.

Kuputira Aluminium Oxide (Al2O3) CVD: Kushanda uye Mashandisirwo

Hunhu Hukuru hweKushanda kweAl2O3 CVD Coating

Mapurasitiki eAluminium Oxide (Al2O3) CVD anozivikanwa nehunhu hwawo hwakanaka, zvichiita kuti ave akakosha zvikuru munzvimbo dzakasiyana dzemaindasitiri. Anoratidza kuomarara kwakanyanya uye kugadzikana kwakanyanya pakupisa.

Mapendi aya anopawo kusashanda zvakanaka kwemakemikari, achidzivirira kurwiswa nemakemikari akawanda ane hukasha. Kudzivirira kwawo magetsi zvakanyanya kunoita kuti ave ma insulators akanaka emagetsi. Uyezve, mapendi eAl2O3 anopa kudzivirira kukuru kwe oxidation, kunyanya pakupisa kwakanyanya, zvichidzivirira zvinhu zviri pasi kuti zvisaparare.

Maitiro Akajairika eAl2O3 CVD Coating

Mapendi eAl2O3 anoshandiswa zvakanyanya munzvimbo dzinoda kushandiswa zvakanyanya uko kupfeka nengura zviri zvinhu zvinonetsa zvikuru.mhinduro dzakasimbiswakudzivirira mukushandiswa kwakasiyana-siyana. Vagadziri vanoisa machira eAl2O3 kumachira etungsten kuti vawedzere kusimba kwe oxidation patembiricha iri pamusoro pe800 °C, kunyanya inodarika 1000 °C, uko tungsten inowanzo gadzira uye inosimudzira WO3. Machira aya anoderedzawo mwero we oxidation we γ-TiAl alloys pakati pe900–1000 °C.Al2O3 inzira yekare yekuputira maturusi ecarbide akagadzirwa nesimende, iyo inoshanda mumamiriro ezvinhu anoda kuomarara kwakanaka, kuramba kupera, kubatana kwakasimba, uye kugadzikana kwekupisa. Pamusoro pezvo, vaongorori vanofunga nezvekuputira kweAl2O3 kutikuchengetedza mafuta akafukidzwa muma "reactors" anokurumidza kutonhora ne lead (LFRs)nekuda kwekudzivirira kwavo ngura zvakanyanya munzvimbo dzenyukireya.

Zvakanakira uye Zvisina Kukodzera zveAl2O3 CVD Coating

Mapendi eAl2O3 ane mabhenefiti akakosha, anosanganisira kuomarara kwakanyanya, kugadzikana pakupisa kwakanyanya, uye kuramba kwakanyanya kwemakemikari uye oxidation. Hunhu uhwu hunowedzera hupenyu hwechikamu mumamiriro ezvinhu akaoma. Zvisinei, mapendi eAl2O3 anewo zvimwe zvipingamupinyi.

• Tembiricha yechikamu chepasi cheCVD, kazhinji inenge yakakomberedza700 °C, yakakwirira zvakakwana kuti inyungudise alloys dzearuminiyamu. Izvi zvinoderedza mhando dzezvinhu zvinogona kugamuchira pendi.
• Kupisa kwakanyanya uku hakubatsiri pakuputira zvikamu zvemakanika, kunyanya izvo zvakagadzirwa nesimbi dzakareruka dzine nzvimbo shoma dzekunyunguduka, dzakadai sealuminium alloy, iyo inoshandiswa kuderedza huremu hwemuchina.
• Tembiricha yepamusoro yekuisa zvinhu mudenga inosvika1050°CKupfeka kweAl2O3 kwakaderedza zvakanyanya kugadzirwa kwemhando dzakasiyana dzema "hybrid coatings", dzakadai seTiC/TiN/TiCN/Al2O3.
• Kuderedza tembiricha yeAl2O3 deposition kunogonawo kuderedza kushushikana kuripo mu coating iyo inowanzo kukonzera kutsemuka.

Kuputira Silicon Carbide (SiC) CVD: Kushanda uye Mashandisirwo

Hunhu Hukuru hweKushanda kweSiC CVD Coating

Mapendi eSilicon Carbide (SiC) CVD ane hunhu hwakasiyana-siyana, zvichiita kuti akwanise kushandiswa munzvimbo dzakaoma. Mapendi aya anoratidza kuomarara kwakanyanya, kazhinji kubva2000 to 2800 HV(Kuomarara kwaVickers). Kuomarara uku kwakanyanya kunoita kuti pave nekusakura uye kuramba kukwesha. SiC inewo mafambiro akanaka ekupisa, kazhinji inowira pakati pe116 W/mK ne300 W/mK. Hunhu uhwu hunobvumira kupisa kunopisa zvakanaka. Uyezve, machira eSiC anopa kusashanda zvakanaka kwemakemikari uye kuchena kwakanyanya. Anodzivirira kusangana nemaacid, alkalis, nemamwe makemikari ane hukasha, zvichiita kuti SiC ive yakasimba munzvimbo dzinopisa. Kusashanda kwemakemikari uku, pamwe chete nekugadzikana kwekupisa kwakanyanya, kunoita kuti SiC ive sarudzo yakasimba yezvinhu.

Maitiro Akajairika eSiC CVD Coating

Maindasitiri anoshandisa zvakanyanya SiC coating muzvishandiso zvinoda kushanda kwepamusoro uye kuvimbika. Mundege, vagadziri vanoshandisa SiC kutizvikamu zveinjini, zvipingamupinyi zvekupisa, mashizha eturbine, zvidziviriro zvekupisa, ma thruster, uye ma rocket nozzles. Izvi zvinoshanda mumamiriro ekunze ekudziya kwakanyanya uye mamiriro ekunze akaoma. Indasitiri ye semiconductor inovimbawo zvakanyanya neSiC. Inodzivirira michina yekugadzira wafer, kusanganisira ma wafer carriers, etching chambers, uye deposition chambers mu LED ne semiconductor manufacturing. SiC inoshandiswawo muma semiconductor ane simba guru uye mafrequency akakwirira, maRF amplifiers, uye zvishandiso zvekuchinja, uko hunhu hwayo hwemagetsi nekuchena kwayo zvakakosha.

Zvakanakira uye Zvisingakwanisike zveSiC CVD Coating

Mapendi eSiC ane mabhenefiti akakosha.kuchena kwakanyanya kwakakosha pakuchengetedza nzvimbo dzisina kusvibiswa, kunyanya mukugadzira zvinhu zve semiconductor. Zvinopa kugara kwenguva refu munzvimbo dzakaoma, zvichidzivirira michina yakaita sezviyero zvinochinja-chinja kupisa uye zvinogadzirisa simba muindasitiri yesimba kubva kumakemikari anoparadza uye kupisa kwakanyanya.Kusashanda kweSiC kwemakemikari kunovimbisa kugadzikana, kuwedzera hupenyu hwemidziyo uye kuderedza zvinodiwa pakugadzirisa. Kuchena kwakanyanya kunoderedza kusvibiswa, zvichiwedzera kushanda zvakanaka mukushandiswa kwakaoma. Zvisinei, machira eSiC ane miganhu. Kupisa kwakanyanya kunodiwa paCVD SiC kunogona kudzikamisa kushandiswa kwayo kune zvimwe zvinhu zve substrate. Maitiro aya anogonawo kuva akaoma uye anodhura zvichienzaniswa nedzimwe nzira dzekuputira.

Kuenzanisa Kwakananga Kwekushanda KweCVD Coatings: TiN vs. Al2O3 vs. SiC

Kuenzanisa Kuongorora Kwekuoma Uye Kuramba Kupfeka

CVD Coating yega yega ine zvakanakira zvakasiyana pakuomarara uye kuramba kupfeka. Mapendi eTitanium Nitride (TiN) anowanzo kuratidza kuomarara kweVickers kubva pa2000 kusvika 2500 HV. Izvi zvinopa dziviriro yakanaka kubva pakuomarara. TiN inoratidzawoma coefficients ekukweshana ari pakati pe0.4 ne0.9. Zvisinei, kuenzanisa kwakananga kwehuwanduyehuwandu hwekupfekwa kana ma coefficients ekukweshana pakati peTiN, Al2O3, uye SiC CVD coatings hazvina kunyorwa zvakanyanya muongororo imwe chete yakazara. Ma coating eAluminium Oxide (Al2O3) anowanzo kuve nekuomarara kweVickers kweinenge 1800 HV 0.5, zvichipa kudzivirira kupfeka kwakanaka, kunyanya mukushandiswa kwekupisa kwakanyanya. Ma coating eSilicon Carbide (SiC) anoonekwa nekuomarara kwakanyanya, kazhinji kubva pa2000 kusvika 2800 HV. Izvi zvinoita kuti SiC irambe yakasimba pakupfekwa kwekukwesha uye kwekukukurwa, kazhinji ichipfuura TiN neAl2O3 mumamiriro ezvinhu akaipisisa.

Kuenzanisa Kuongorora kweKugadzikana kweThermal uye Kuramba kweOxidation

Kugadzikana kwekupisa uye kuramba kuoxidation zvinhu zvakakosha pakushandiswa kwekupisa kwakanyanya. Kupfeka kweTiN kunoratidza kugadzikana kwekupisa kuri pakati nepakati. Kunotanga kuoxidation mumhepo pakupisa kuri pamusoro pe500°C. Mumamiriro ezvinhu ane oxygen, kupfekedzwa kweTiNoxidize zvizere uye spall mukati memaawa mashomakana yakaputirwa munzvimbo dzinopisa zvakanyanya mumvura. Izvi zvinoratidza hunhu husina kunaka hwekudzivirira mumamiriro ezvinhu akadaro. Mapendi eAluminium Oxide (Al2O3), zvakasiyana, anopa kugadzikana kwakanyanya kwekupisa uye kuramba kuoxidation. Anodzivirira zvinobudirira zvinhu zviri pasi pekupisa kunodarika 1000°C, zvichiita kuti zvive zvakanaka munzvimbo dzinopisa zvakanyanya. Mapendi eSilicon Carbide (SiC) anoratidzawo kugadzikana kwakanyanya kwekupisa uye kuramba kuoxidation. Vaongorori vakaitawo saizvozvo.yakaenzanisa maitiro ekuora kwemvura inodziya yeSiC neAl2O3, zvichiratidza kushanda kwakasimba kweSiC munzvimbo dzine kupisa kwakanyanya uye makemikari. SiC inochengetedza hunhu hwayo hwekudzivirira pakupisa kwakanyanya, kazhinji kupfuura uko TiN yaizoderera.

Kuenzanisa Kuongorora kweKusagadzikana kweMakemikari uye Zvivakwa zveMagetsi

Kusashanda kwemakemikari uye hunhu hwemagetsi hwemachira aya zvinosiyana zvakanyanya, zvichikanganisa kukodzera kwawo kushandiswa kwakanangana. Machira eTiN anopa kusashanda zvakanaka kwemakemikari, achidzivirira zvinhu zvakawanda zvinoparadza. Pamagetsi, TiN yakawanda ine simba rekudzivirira magetsi pakati pe1.0 × 10⁻⁷ uye 4.0 × 10⁻⁷ Ω·m. PVD TiN inoratidza simba rekudzivirira kubva pa3.0 × 10⁻⁷ kusvika 1.0 × 10⁻⁶ Ω·m. CVD TiN inoratidza simba rekudzivirira kubva pa2.0 × 10⁻⁶ kusvika 1.0 × 10⁻⁴ Ω·m. Izvi zvinoisa TiN muchikamu che semiconductor kana semi-metallic.

Mapendi eAluminium Oxide (Al2O3) haana makemikari akawanda, anodzivirira kurwiswa nemaacids akawanda, alkalis, nemamwe makemikari ane hukasha. Al2O3 isimbi yemagetsi yakasimba. Mafirimu matete eAl2O3 anokura kuburikidza neAtomic Layer Deposition (ALD) anoratidza dielectric constant ye6.7 yemafirimu 120 Å gobvu. Kuwanda kwemafuta anobuda muAl2O3 kunoderera sezvo ukobvu hwemafirimu huchiwedzera, nehukuru hunosvika 1 nA/cm² yemafirimu akakora. Fowler-Nordheim (FN) tunneling beginning voltage mumafirimu eAl2O3 inowedzera neukobvu, kubva pa3 V yemafirimu 60 Å kusvika pa5.5 V yemafirimu 184 Å. Mapendi eSilicon Carbide (SiC) anewo makemikari asina kusimba uye kuchena kwakanyanya. Anodzivirira kuita zvinhu zvakasiyana-siyana. SiC inogona kushanda se semiconductor kana insulator zvichienderana ne doping yayo uye crystalline structure. Kudzivirira kwayo magetsi kwakakosha pakushandiswa muma semiconductor ane simba guru uye high-frequency.

Kufunga Nezvemitengo Nemabhenefiti Echinhu Chega Chega Chekuputira CVD

Kuongorora chiyero chemutengo nebhenefiti yechinhu chega chega cheCVD coating kwakakosha pakuita sarudzo neruzivo. Mapendi eTitanium Nitride (TiN) anowanzo kuve sarudzo inodhura zvishoma. Anopa chiyero chakasimba chekuomarara, kuramba kupfeka, uye kupenya kwegoridhe kunoyevedza. Izvi zvinoita kuti TiN ive sarudzo inodhura zvishoma kune zvishandiso zvinoda hupenyu hwakavandudzwa hwezvishandiso uye dziviriro iri pakati nepakati pasina kudiwa kwakanyanya kwekupisa kana kemikari. Kushandiswa kwayo kwakapararira mukucheka zvishandiso nezvinhu zvekushongedza kunoratidza chiyero chayo chakanaka chekushanda-nemutengo kune zvakawanda zvinodiwa mumaindasitiri.

Mapendi eAluminium Oxide (Al2O3) anowanzo sanganisira mari yekutanga yakawanda kana tichienzanisa neTiN. Zvisinei, kugadzikana kwawo kwakanyanya kwekupisa, kuramba kuoxidation, uye kusagadzikana kwemakemikari zvinowanzo ruramisa mutengo uyu wakakwira. Pakushandiswa munzvimbo dzinopisa zvakanyanya, dzakadai sezvikamu zvechoto kana zvimisikidzo zvekucheka zvepamusoro, Al2O3 inowedzera hupenyu hwezvikamu zvakanyanya. Izvi zvinoderedza mari yekutsiva uye yekugadzirisa nekufamba kwenguva. Kugara kwenguva refu uye dziviriro yakawedzerwa Al2O3 inopa kuchengetedza kwenguva refu, zvichiita kuti ive sarudzo inobatsira pasinei nemari yakakwira yekutanga.

Machira eSilicon Carbide (SiC) anowanzo takura mutengo wepamusoro wekushandisa pakati pezvinhu zvitatu. Maitiro akaomarara ekuisa uye kudiwa kwekuchena kwakanyanya zvinopa mari iyi. Pasinei nemutengo wakakwira, SiC inopa mashandiro asina kuenzana munzvimbo dzinonyanya kuoma. Kuoma kwayo kwakanyanya, kusagadzikana kwemakemikari, uye kufambisa kwekupisa kunoita kuti ive yakakosha mukushandiswa kwakakosha mukugadzirisa semiconductor, aerospace, uye maindasitiri enyukireya. Muzvikamu izvi, mutengo wekukundikana kwezvikamu kana kusvibiswa kunodarika zvakanyanya mari yekutanga yekuvhara. Kugara kwenguva refu kweSiC uye dziviriro inoita kuti kushanda kwayo kuve kwakavimbika uye kuchengetedzeka, zvichipa kudzoka kwakakosha pakudyara kune zvinodiwa zvepamusoro, zvine simba.

Zvinhu Zvinokanganisa Kusarudzwa Kwakanaka Kwezvinhu Zvekuputira zveCVD

Kusarudza chipfeko cheCVD chakakodzera kunoda kunzwisisa kwakakwana kwezvinodiwa zvechishandiso. Zviyero zvakakosha zvakawanda zvinosarudza sarudzo iyi. Kugara kwenguva refu uye kuramba kupfeka zvakakosha kune zvikamu zvinogara zvichikweshana kana kukweshana. SiC inobudirira munzvimbo idzi, ichipa kuramba kwakanyanya kubvaruka, kukurwa, uye kukweshana nekuda kwechimiro chayo chakasimba, chisina maburi uye kubatana kwakasimba. Al2O3 inopawo kuramba kupfeka kwakanaka, kunyanya pakupisa kwakanyanya, nepo TiN ichipa dziviriro yakanaka kune mamiriro asina kunyanya kuoma.

Kufukidzwa kwepamusoro uye kuomarara kwenzvimbo kunoitawo basa rakakosha. Mapendi eCVD anowanzo budirira mukufukidza ma geometri akaomarara uye nzvimbo dzemukati dzine ukobvu hwakafanana. Dzinopa kufukidza kwakasimba munzvimbo dzisingaonekwe. Hunhu uhwu hwakakosha kune zvikamu zvakaoma uko kunodiwa dziviriro yakafanana. Kusapindirana kwezvakatipoteredza uye makemikari kwejira iri chimwe chinhu chakakosha. Kune zvinhu zvinokasira zvakaita seH₂S uye maasidhi akasimba, SiC neAl2O3 zvinopa kupindirana kwakanyanya nekuda kwechimiro chazvo chisina maburi, zvichigadzira chipingamupinyi chakasimba.

Ukobvu hwekuputira, hunowanzova pakati pe25-75 microns, hwakafanana zvakanyanya mumashandisirwo eCVD. Ukobvu uhwu hwakafanana hunobatsira kuti pamusoro payo pave pakachena uye panogona kupukutwa. Kupisa kwekushandisa kwekushandisa kunokanganisa zvakanyanya kusarudzwa kwezvinhu. Al2O3 neSiC zvakakodzera tembiricha yakakwira, zvichidzivirira zvinhu zvakasimba zvinobudirira. Chekupedzisira, mutengo wekushandisa, kunyange zvazvo wakakwira kune zvimwe zvinhu zvekuputira zveCVD, unowanzo ratidza kugara kwenguva refu uye dziviriro. Izvi zvinoita kuti mari yekutanga ive yakakosha pakuwedzera hupenyu hwezvikamu uye kuve nechokwadi chekuti mashandiro akavimbika munzvimbo dzakaoma dzemaindasitiri.

Mamiriro Ekushandisa Chaiwo: Kusarudza Yakanakisisa CVD Coating

Kuputira CVD yeMachina Anomhanya Nekukurumidza uye Zvishandiso Zvekucheka

Zvishandiso zvekugadzira nekucheka zvinomhanya zvakanyanya zvinoda kugara kwenguva refu uye kuramba kupfeka. Zvishandiso izvi zvinoshanda kana paine kukweshana kwakanyanya uye kupisa, izvo zvinokurumidza kushatisa nzvimbo dzisina kudzivirirwa. Kusarudza kukweshana kwakakodzera kunowedzera hupenyu hwezvishandiso uye kunovandudza mashandiro ekugadzira. Kukweshana kweTitanium Nitride (TiN) kwagara kuri tsika yekushandiswa kwezvishandiso zvekucheka zvinoshandiswa pabasa rese. Zvinopa kuomarara kwakanaka uye zvinoderedza kukweshana, izvo zvinobatsira kudzivirira kusakara kwezvishandiso nguva isati yakwana. Zvisinei, mashandisirwo akanyanya, kunyanya anosanganisira simbi dzakaoma, anoda kukweshana kwakasimba uye kuramba kupisa uye kukwesha.

Pakucheka simbi nekukurumidza, machira eAluminium Oxide (Al₂O₃) anopakugadzikana kwakanyanya kwekupisa uye kwemakemikaripakupisa kwakakwirira. Kugadzikana uku kunoita kuti zvive zvakanaka pakuchengetedza kuvimbika kwezvishandiso panguva yekushanda nesimba kwemashini. Imwe makwikwi akasimba munzvimbo iyi iTitanium Carbonitride (TiCN). Kana ikashandiswa kuburikidza neCVD, TiCN inopa kudzivirira kupfeka kwakanyanya. Hunhu uhwu hunobatsira zvikuru mumashini esimbi, uko zvinhu zvakaoma zviri mumashini zvinogona kukurumidza kubvisa pamusoro pechishandiso. Mapendi aya epamusoro anobvumira maturusi kushanda nekukurumidza uye kudyisa, zvichikonzera kuwedzera kwekubudirira uye kupera kwepamusoro kwenzvimbo dzakagadzirwa nemashini.

Kuputira CVD yeMakemikari Anoparadza Nzvimbo

Zvikamu zvinoshanda munzvimbo dzine makemikari anoparadza zvinosangana nematambudziko anogara achikonzerwa nekurwiswa nemakemikari, izvo zvinogona kukonzera kuora kwezvinhu uye kutadza kushanda zvakanaka. Mapurasitiki anodzivirira anoshanda akakosha pakuona kuti zvinhu zvinogara kwenguva refu uye zvakavimbika mumamiriro ezvinhu akaoma aya. Mapurasitiki eAluminium Oxide (Al₂O₃) neSilicon Carbide (SiC) CVD anomiririra kusashanda zvakanaka kwemakemikari.

Kuputira kweAl₂O₃ kunoshanda zvikuru munzvimbo dzine mvura yakaoma (SCW). Mamiriro aya ane tembiricha yakakwira, kazhinji panosvika500 °C, kumanikidzwa kwakanyanya kwe25 MPa, uye zvinhu zvine simba re oxidizing. Ma oxide scales eAlumina-based oxide anozivikanwa nekuderedza mhando dzakasiyana dzengura mumamiriro eSCW. Izvi zvinosanganisira stress corrosion cracking, pitting, uye general corrosion, izvo zvinowedzera hupenyu hwezvikamu.

Mapendi eSiC anodzivirira zvakanyanya carbon/carbon (C/C) composites kubva mukuoxidation pakupisa kwakanyanya, kunyanyapamusoro pe723 K, munzvimbo dzine okisijeni. Dziviriro iyi yakakosha kune C/C composites, sezvo kushandiswa kwayo sezvinhu zvekuvaka zvinopisa zvakanyanya kunogumira nekuoxidation. SiC ceramic coatings inodzivirirawo C/C composites kubva mukuoxidation munzvimbo dzine utsi hwemvura.pa1773 KKunyange zvazvo mhute yemvura ichigona kukurumidzisa kuoxidation kweSiC ceramics, inobatsirawo kuumbwa kwegirazi. Iri girazi rinobatsira kuvhara nekudzivirira C/C matrix nekukurumidza, zvichiita kuti ishande zvakanaka kunyangwe mumamiriro ekunze ane hunyoro uye tembiricha yakakwira.

Kuputira kweCVD kweKuramba Kupisa Kwekupisa

Zvinhu zvinoiswa pakupisa kwakanyanya uye mhepo inoodza okisijeni zvinoda machira anokwanisa kutsungirira mamiriro akaoma asingaderedzi kuora. Kuramba okisijeni kwenguva refu patembiricha dzinopfuura 1000°C chinhu chakakosha pakushandiswa kwakawanda kwemuchadenga, simba, uye maindasitiri.

Mapendi eNiAl akagadzirwa neCVD anoratidza kubatana kwakasimba ne substrate uye kuwanda kwakanyanya. Hunhu uhwu hunobatsira pakudzivirira kupisa kwakanyanya.pamusoro pe1100°C, nickel aluminide coatings inokurumidza kugadzira chikero cheα-Al₂O₃ chakasimba mukupisa kwemhepo. Chikero ichi chakakosha pakudzivirira oxidation kwenguva refu kune zvinhu zviri pasi.

Mapendi eSilicon Carbide (SiC) anoratidzawo kudzivirira kuoxidation kwakanyanya. Anoita izvi nekugadzira girazi reSiO₂ rinodzivirira. Rutivi urwu rwakaita segirazi runogona kugadzirisa zvikanganiso zvakaita sekutsemuka nemaburi, zvichichengetedza kusimba kwependi. Semuenzaniso, pendi yeSiC yakaratidza kudzikira kwehuremu kwega kwega.0.48 wt%mushure menguva pfumbamwe dzekupisa pakati pe1873 K (1600°C) netembiricha yemukamuri. Izvi zvinoratidza kuti kupisa kunodzivirira oxidation kunyangwe paine shanduko huru dzekupisa. Uyezve, machira eSiC/B/SiC akawanda anopadziviriro yepamusoro ye oxidationyeC/SiC composites zvichienzaniswa neSiC coatings ine layer three-layer. Aya ma multilayer systems anoshanda zvakanaka pamhando dzakasiyana dzekupisa, kubva pa700°C kusvika 1500°C. ZrB₂-SiC inozivikanwawo se baselineceramic inodziya zvakanyanya (UHTC)Inopa simba rakanaka rekudzivirira oxidation uye ablation mumhepo inopisa zvakanyanya, zvichiita kuti ive yakakodzera kushandiswa kwakaoma.

Kuputira CVD Yekudzivirira Kupfeka Nekudzivirira Kupfeka Kwemagetsi

Zvikamu zvinowanzoda zvese kuputira magetsi uye dziviriro yakasimba yekupfeka, kunyanya munzvimbo dzinoda kushanda nesimba. Mapendi eSilicon Carbide (SiC) anobudirira mumabasa aya maviri. Anopa manejimendi yepamusoro yekupisa uye kuputira magetsi, zvakakosha pakuvimbika uye kugara kwenguva refu kwemasisitimu mumotokari dzemagetsi nedzehybrid. Semuenzaniso, mapendi eSiC akakosha mumasisitimu ekugadzirisa mabhatiri uye magetsi ane simba remagetsi ane simba gurumukati mechikamu chemotokari. Mashandisirwo aya anoda kuti kupisa kuparadzwe zvakanaka ukuwo achichengetedza magetsi ari ega.

Mapendi eSiC anoshandiswawo zvakanyanya mukushandiswa kwemagetsi pakupisa kwakanyanya. Anopa manejimendi yakanaka yekupisa uku achivimbisa kuti magetsi anoparadzaniswa mumagetsi emagetsi, kurongedza zvishandiso zvemagetsi, uye power module substrates. SiC inoshanda sechinhu chakanakira mainsulators emagetsi munzvimbo dzinoda kupisa kwakanyanya uko mapolymer insulators emazuva ano anogona kuora. Inopa simba re dielectric rakawanda, rinowanzo tangira pa15-25 kV/mm. Kunze kwehunhu hwemagetsi, machira eSiC anodzivirira kupfeka zvakanyanya mumaindasitiri. Zvikamu zvakachengetedzwa nemachira eSiC zvinoratidza hupenyu hwebasa hwakavandudzwa zvakanyanya, kazhinji hurefu hwakapetwa katatu kusvika kashanu pane zvinhu zvemazuva ese, mukushanda kwekupomba slurry. Kuvandudzwa uku kunobva muhunhu hwavo hwakakora, husina maburi uye kukweshana kwakaderera. Saizvozvowo, machira eSiC anowedzera kuramba kupfeka munzvimbo dzinokwesha zvakanyanya senge mabasa ekuputika kwejecha. Zvikamu zvevharuvhu, zvisimbiso zvepombi, ma nozzles, uye nzvimbo dzemabheyaringi zvinobatsirawo kubva mukupfeka kwakanaka kweSiC, zvichigadzirisa kupfeka kwemuchina senzira yekutanga yekukundikana.

Kuputira CVD Yekugadzirisa Semiconductor uye Zvido Zvekuchena Kwakanyanya

Indasitiri ye semiconductor inoda zvinhu zvine kuchena kwakanyanya uye kusagadzikana kwemakemikari kwakanyanya kudzivirira kusvibiswa uye kuona kuti maitiro acho akarurama. Solid Silicon Carbide (CVD SiC) ndiyo sarudzo huru yezvikamu mumidziyo yekugadzirisa semiconductor. Izvi zvinosanganisira zvikamu zvakaita seRTP/EPI rings and bases, uye zvikamu zve plasma etch cavity. Vagadziri vanofarira CVD SiC nekuda kwekuchena kwayo kwakanyanya,kupfuura 99.9995%. Inopawo kusimba kwakanyanya kumakemikari. Uyezve, CVD SiC inoderedza kugadzirwa kwezvikamu nekuti haina zvikamu zvechipiri pamipendero yezviyo. Chinhu ichi chinogona kucheneswa zvinobudirira neHF/HCl inopisa pasina kuora kwakanyanya. Hunhu uhwu hunobatsira kuti igare kwenguva refu uye zvidimbu zvishoma, izvo zvakakosha pakuchengetedza mamiriro ekunze anodiwa mukugadzira semiconductor.

Kuputira CVD yeMasisitimu Akawanda uye Kushanda Kwakavandudzwa

Masisitimu ekuputira akawanda anosanganisa zvinhu zvakasiyana kuti awane kushanda kwakawedzerwa kupfuura zvingaitwa nechikamu chimwe chete. Masisitimu aya anoshandisa hunhu hwakasiyana hwechikamu chimwe nechimwe kuti agadzire simba rekubatana. Semuenzaniso, chikamu chimwe chinogona kupa kuomarara kwakanaka, nepo chimwe chichipa simba rekudzivirira ngura kana kugadzikana kwekupisa. Iyi nzira inobvumira mainjiniya kugadzirisa machira zvichienderana nezvinodiwa zvekushandisa. Masisitimu echikamu chimwe nechimwe anogona kukunda zvipingamupinyi zvechinhu chimwe nechimwe. Semuenzaniso, chikamu chakaoma asi chisina kusimba chinogona kusanganiswa nechikamu chakasimba, chine ductile yakawanda kuti chivandudze kuramba kwekupwanyika. Saizvozvowo, chikamu chine simba rekudzivirira oxidation yakawanda chinogona kuchengetedza chikamu chiri pasi chinopa simba rekudzivirira kupfeka zvakanaka asi chinogona kuora zvakanyanya. Kusanganiswa uku kwezvinhu kunotungamira kumachira anogara kwenguva refu, hupenyu hwakareba, uye kushanda zvakanaka munzvimbo dzakaoma dzemaindasitiri.

Kusarudzwa kwemhando yepamusoro yeCVD coating kunoenderana nezvinodiwa pakushandiswa kwacho. TiN, Al2O3, uye SiC CVD coating imwe neimwe inopa zvakanakira zvakasiyana pamatambudziko akasiyana emaindasitiri. Kusarudza neruzivo zvichibva pamaitiro avo akasiyana kunoita kuti zvikamu zvirambe zvichishanda zvakanaka uye kushanda zvakanaka. Mainjiniya anofanirwa kunyatsofunga nezvezvinhu zvese kuti asarudze zvinhu zvakanakira zvavanoda. Izvi zvinoita kuti zvikamu zvakakosha zvidzivirirwe zvakanyanya uye kuti zvive nenguva yakareba sei yekushanda.

Mibvunzo Inowanzo bvunzwa

Ndeipi mukana mukuru weTiN CVD coating?

Mapendi eTiN anopa kuomarara kwakanaka uye kudzivirira kupfekwa. Anopawo kusashanda zvakanaka kwemakemikari. Maindasitiri mazhinji anoshandisa TiN pakucheka maturusi uye pakushongedza. Inoenzanisa mashandiro uye mutengo wayo zvinobudirira.

Ndeipi CVD coating inopa resistance yakanakisa ye oxidation pakupisa kwakanyanya?

Mapendi eAl2O3 neSiC CVD ese anopa simba rekudzivirira oxidation. Al2O3 inodzivirira zvinhu zviri pamusoro pe1000°C. SiC inoumba girazi reSiO2 rinodzivirira, rinoshanda kunyangwe pa1600°C. Anobudirira zvikuru kana papisa zvakanyanya.

Sei SiC CVD coating ichinyanya kufarirwa pakugadzirisa semiconductor?

Mapendi eSiC anopa kuchena kwakanyanya, anodarika 99.9995%. Anodzivirira makemikari zvakanyanya uye anoderedza kugadzirwa kwezvikamu. Hunhu uhwu hwakakosha pakudzivirira kusvibiswa munzvimbo dzinogadzirwa zvinhu zve semiconductor.

Ko machira eCVD ane miganhu here maererano nezvinhu zve substrate?

Ehe, maitiro eCVD anowanzoda tembiricha yepamusoro yekuisa zvinhu muvhu. Izvi zvinoderedza kushandiswa kwawo kune zvimwe zvinhu zve substrate. Semuenzaniso, tembiricha yepamusoro inogona kunyungudutsa simbi dzine nzvimbo shoma yekunyunguduka senge aruminiyamu.