Iinqanawa zeGraphite, ezaziwa ngokuba ziibhothi zegrafiti, zidlala indima ebalulekileyo kwiinkqubo ezintsonkothileyo zokwenza iiseramikhi ze-semiconductor. Ezi nqanawa zikhethekileyo zisebenza njengabathwali abathembekileyo bee-wafer ze-semiconductor ngexesha lonyango olushushu kakhulu, ziqinisekisa ukucutshungulwa ngokuchanekileyo nangokulawulwayo. Ngeempawu zazo ezizodwa kunye nokusetyenziswa kwazo okuguquguqukayo,Iinqanawa zegrafitiziye zaba zizixhobo eziyimfuneko kakhulu kwishishini le-semiconductor. Makhe sihlolisise iimpawu eziphambili ezenzaIinqanawa zegrafitiizinto ezibalulekileyo kwimveliso yeeseramikhi ze-semiconductor.
1. Ukunyamezelana nobushushu obuphezulu:
Iinqanawa zegrafitiZenziwe ngezinto zegrafiti ezikumgangatho ophezulu ezidumileyo ngokumelana kwazo nobushushu ngendlela engaqhelekanga. Olu phawu luvumela iinqanawa zeGraphite ukuba zikwazi ukumelana nobushushu obugqithisileyo obufunyanwa ngexesha leenkqubo zokwenza i-semiconductor, ezifana ne-chemical vapor deposition (CVD) kunye ne-silicon carbide coating. Ukukwazi ukugcina ukuqina kwesakhiwo kunye nozinzo olulinganayo phantsi kweemeko zobushushu obukhulu kubalulekile ekuqinisekiseni imveliso ye-semiconductor eqhubekayo nethembekileyo.
2. Ukungasebenzi kakuhle kweekhemikhali:
I-Graphite, izinto eziphambili ezisetyenziswayoIinqanawa zegrafiti, ibonisa ukungangeni kakuhle kweekhemikhali, nto leyo eyenza ukuba imelane nokugqwala kunye neempendulo zeekhemikhali. Olu phawu luluncedo ngakumbi kwimveliso yeeseramikhi ze-semiconductor, apho iikhemikhali eziqatha kunye neegesi ezisabelayo zihlala zisetyenziswa. Iinqanawa zegrafiti zibonelela ngendawo ekhuselekileyo kwiiwafer ze-semiconductor, zithintela ungcoliseko kwaye ziqinisekisa ubunyulu bemveliso yokugqibela.
3. Ulawulo oluchanekileyo lweDimensional:
Iinqanawa zegrafitiZenziwe ngokuchanekileyo ukuze zilungele ii-wafers ze-semiconductor ezinobukhulu obahlukeneyo kunye neemilo. Uyilo lwazo oluhlengahlengiswayo luvumela ulawulo oluchanekileyo lobukhulu, ukuqinisekisa ukulingana kakuhle kwee-wafers kunye nokunciphisa umngcipheko wokonakala ngexesha lokuphathwa kunye nokucutshungulwa. Eli nqanaba lokuchaneka libalulekile ekufezekiseni ubukhulu obufanayo bokugquma kunye nokuchaneka kokubekwa kwiinkqubo zokwenziwa kwee-semiconductor.
4. Ukuguquguquka kwizicelo:
Iinqanawa zegrafitiZisetyenziswa kakhulu kwiinkqubo ezahlukeneyo zokwenza i-semiconductor, kubandakanya i-epitaxy, i-diffusion, i-annealing, kunye ne-thin-film deposition. Nokuba kukuxhasa ii-silicon wafers ngexesha lokucubungula ubushushu okanye ukwenza lula ukukhula kwee-epitaxial layers, ii-Graphite boats zibonelela ngokuguquguquka kunye nokuthembeka kuzo zonke izicelo ezahlukeneyo. Ukukwazi kwazo ukumelana nokuvezwa ixesha elide kumaqondo obushushu aphezulu kunye neendawo ezibolayo kuzenza zibe zizixhobo ezibalulekileyo ekuveliseni ii-semiconductor ceramics.
5. Ukuhambelana kweSilicon Carbide Coating:
Iinqanawa zegrafiti zilungele ukusetyenziswa kwezixhobo ze-silicon carbide (SiC), into ebalulekileyo kwizixhobo ze-semiconductor eziphambili. Ukuhambelana kwegrafiti ne-silicon carbide kwenza kube lula ukufakwa kweengqimba ze-SiC kwi-substrates ze-semiconductor ngokufanelekileyo nangokulinganayo, nto leyo ephucula ukusebenza kwesixhobo kunye nokuthembeka kwaso. Iinqanawa zegrafiti zidlala indima ebalulekileyo ekwenzeni lula inkqubo yokufaka, ukuqinisekisa ukugqunywa okufanayo kunye nolawulo oluchanekileyo kubukhulu be-coating.
Ukuqukumbela, iinqanawa zeGraphite zisebenza njengezinto ezibalulekileyo ekuvelisweni kweeseramikhi zesemiconductor, zibonelela ngomxube owahlukileyo wokunyamezelana nobushushu obuphezulu, ukungangeni kweekhemikhali, ulawulo oluchanekileyo lobukhulu, kunye nokuhambelana neengubo zesilicon carbide. Ukuguquguquka kwazo kunye nokuthembeka kwazo kuzenza zibe zizixhobo ezibalulekileyo kwiinkqubo zokwenza iisemiconductor, okuvumela ukuveliswa kwezixhobo zesemiconductor ezikumgangatho ophezulu nezisebenza kakuhle. Njengoko iteknoloji yesemiconductor iqhubeka ihambela phambili, iinqanawa zeGraphite ziya kuhlala ziyimpahla ebalulekileyo, ziqhuba ubuchule kunye nenkqubela phambili kushishino lwesemiconductor.
Ixesha lokuthumela: Epreli-22-2024
