The basic process of SiC crystal growth is divided into sublimation and decomposition of raw materials at high temperature, transportation of gas phase substances under the action of temperature gr...
With the gradual mass production of conductive SiC substrates, higher requirements are put forward for the stability and repeatability of the process. In particular, the control of defects, the sma...
1. What is a PECVD boat?
1.1 Definition and core functions
PECVD boat (Plasma Enhanced Chemical Vapor Deposition) is a core tool used to carry wafers or substrates in the PECVD process. It...
Graphite suppliers in Africa are increasing production to meet China’s growing demand for battery materials. According to data from Roskill, in the first half of 2019, natural graphite export...
The 2020-2024 Global “Flexible Graphite Sheet Market” research report is a historical review and in-depth study of the current and future markets of the flexible graphite sheet industry...
SiC coated graphite bases are commonly used to support and heat single crystal substrates in metal-organic chemical vapor deposition (MOCVD) equipment. The thermal stability, thermal uniformity and...