Product application and performance Product applications and uses
Si single crystal industry, GaN, AlN, sapphire and other MOCVD pedestals. -Graphite base coating for single crystal silicon epitaxial growth
Main performance: high purity, erosion resistance, high thermal conductivity, - MOCVD process, graphite base coating for GaN epitaxial growth
high temperature resistance, low thermal expansion coefficient.
|Thermal Conductivity||250 W/m °K||Laser flash method, RT|
|Thermal Expansion (CTE)||4.5 x 10-6 °K||Room temp to 950 °C, silica dilatometer|
|Density||3.21 g/cc||Sink-float and dimension|
|Specific heat||0.66 J/g °K||Pulsed laser flash|
|Flexural strength||450 MPa560 MPa||4 point bend, RT4 point bend, 1300°|
|Fracture toughness||2.94 MPa m1/2||Microindentation|
|Hardness||2800||Vicker's, 500g load|
|Elastic ModulusYoung's Modulus||450 GPa430 GPa||4 pt bend, RT4 pt bend, 1300 °C|
|Grain size||2 - 10 µm||SEM|
Purity,SEM Structure,thickness analysis of SiC coating
The purity of SiC coatings on graphite by using CVD is as high as 99.9995%. Its structure is fcc. The SiC films coated on graphite is (111) oriented as shown in the XRD data (Fig.1) indicating its high crystalline quality. The thickness of the SiC film is very uniform as shown in Fig. 2.
SINGLE CRYSTAL SILICON EPITAXIAL BASE
Product performance and application prospects.
Silicon carbide (SiC) coated base is the best base for single crystal silicon and GaN epitaxy, which is the core component of the epitaxy furnace. The base is a key production accessory for monocrystalline silicon for large integrated circuits. It has high purity, high temperature resistance, corrosion resistance, good air tightness and other excellent material characteristics.
Product application and use
Graphite base coating for single crystal silicon epitaxial growthSuitable for Aixtron machines, etcCoating thickness: 90~150umThe diameter of the wafer crater is 55mm.
Why choose us
Professional equipment and team
Class 1000 dust-free workshop
* more than 3000 square meters of 1000 class dust-free workshop
* Cooperative R & D team of Chinese Academy of Sciences
* Specialized production and precision testing equipment
For before-order tage,our professional sales team could respond your inquiry within 50-100 minutes during working hours and within 12 hours during close time. Quick and professional reply will help you win your client with perfect option at high efficiency.
For order-running stage, our professional service team will take pictures every 3 to 5 days for your 1st hand information update of the production and provide documents within 36 hours to update shipping progress. We pay high attention to after-sale service.
For after-sale stage, our service team always keep close contact with you and always stand by at your service. Our professional after sale service even include fly our engineers to help you solving problems on site. Our warranty is 12 months after delivery.