Graphite Boat

PECVD graphite boat is a key part for carrying silicon wafers in the plasma enhanced chemical vapor deposition (PECVD) process. It is mainly used in the passivation and anti-reflection film preparation process of solar cells.

VET Energy provide high-quality PECVD graphite boats and related services. Our products feature long service life, excellent temperature uniformity, and optimized gas flow distribution. Through innovative design and strict quality control, we have become a leading solution provider for graphite boats in the industry. We have a professional technical team from CAS and our own labortatory, which bring us core advantages as below: ▪ Independent R&D capability ▪ Precision manufacturing ▪ Professional technical team ▪ Comprehensive quality system ▪ Rapid response service ▪ Customization capability