Silicon is an atomic crystal, whose atoms are connected to each other by covalent bonds, forming a spatial network structure. In this structure, the covalent bonds between atoms are very directiona...
The growth process of monocrystalline silicon is completely carried out in the thermal field. A good thermal field is conducive to improving the quality of crystals and has a higher crystallization...
In modern semiconductor manufacturing, thermal management is one of the most influential factors affecting crystal quality, epitaxial uniformity, and overall process stability. Whether producing mo...
2 Experimental results and discussion
2.1 Epitaxial layer thickness and uniformity
Epitaxial layer thickness, doping concentration and uniformity are one of the core indicators for judging the...