The core technology for the growth of SiC epitaxial materials is firstly defect control technology, especially for defect control technology that is prone to device failure or reliability degradati...
Wafer epitaxial growth is achieved through the metal organic chemical vapor deposition (MOCVD) technology, in which ultra-pure gases are injected into the reactor and finely metered, so that they c...
In various industrial applications, the need for reliable and effective sealing solutions is paramount. Graphite sealing rings have emerged as a top choice due to their exceptional performance and ...
Meaning and principle of graphite boat
Meaning of graphite boat:
The graphite boat dish is a groove mold, which comprises a plurality of W-shaped two-way inclined grooves with opposite two gr...
Different from S1C discrete devices which pursue high voltage, high power, high frequency and high temperature characteristics, the research goal of SiC integrated circuit is mainly to obtain high ...
Graphite wafer boat is a key component with excellent performance in the photovoltaic field. As a semiconductor material, graphite wafer boats not only have corrosion resistance and high temperatur...