1. What is a PECVD boat?
1.1 Definition and core functions
PECVD boat (Plasma Enhanced Chemical Vapor Deposition) is a core tool used to carry wafers or substrates in the PECVD process. It...
SiC coated graphite bases are commonly used to support and heat single crystal substrates in metal-organic chemical vapor deposition (MOCVD) equipment. The thermal stability, thermal uniformity and...
Three main types of silicon carbide polymorph
There are about 250 crystalline forms of silicon carbide. Because silicon carbide has a series of homogeneous polytypes with similar crystal structure...
According to a report released by TrendForce Consulting, as Anson, Infineon and other cooperation projects with automobile and energy manufacturers are clear, the overall SiC power component market...
Graphite crucible is a common laboratory appliance, widely used in chemistry, metallurgy, electronics, medicine and other industries. It is made of high purity graphite material and has excellent h...
SiC has excellent physical and chemical properties, such as high melting point, high hardness, corrosion resistance and oxidation resistance. Especially in the range of 1800-2000 ℃, SiC has good ab...