Ua ib hom khoom siv semiconductor tshiab, SiC tau dhau los ua cov khoom siv semiconductor tseem ceeb tshaj plaws rau kev tsim cov khoom siv optoelectronic luv luv, cov khoom siv kub siab, cov khoom siv tiv thaiv hluav taws xob thiab cov khoom siv hluav taws xob muaj zog / muaj zog siab vim nws cov khoom siv lub cev thiab tshuaj lom neeg zoo heev thiab cov khoom siv hluav taws xob. Tshwj xeeb tshaj yog thaum siv rau hauv qhov xwm txheej hnyav thiab hnyav, cov yam ntxwv ntawm SiC cov khoom siv ntau dua li cov khoom siv Si thiab GaAs. Yog li ntawd, SiC cov khoom siv thiab ntau hom sensors tau maj mam dhau los ua ib qho ntawm cov khoom siv tseem ceeb, ua lub luag haujlwm tseem ceeb dua.
Cov khoom siv SiC thiab cov voj voog tau tsim kho sai sai txij li xyoo 1980, tshwj xeeb tshaj yog txij li xyoo 1989 thaum thawj SiC substrate wafer nkag mus rau hauv kev ua lag luam. Hauv qee qhov chaw, xws li lub teeb-emitting diodes, cov khoom siv high-zaus high-power thiab high-voltage, cov khoom siv SiC tau siv dav hauv kev lag luam. Kev txhim kho yog sai. Tom qab yuav luag 10 xyoo ntawm kev txhim kho, cov txheej txheem khoom siv SiC tau muaj peev xwm tsim cov khoom siv lag luam. Ntau lub tuam txhab sawv cev los ntawm Cree tau pib muab cov khoom lag luam ntawm SiC cov khoom siv. Cov koom haum tshawb fawb hauv tsev thiab cov tsev kawm ntawv qib siab kuj tau ua tiav zoo hauv kev loj hlob ntawm cov khoom siv SiC thiab cov cuab yeej tsim khoom siv. Txawm hais tias cov khoom siv SiC muaj cov khoom siv lub cev thiab tshuaj zoo heev, thiab cov cuab yeej siv SiC kuj paub tab, tab sis kev ua tau zoo ntawm cov khoom siv SiC thiab cov voj voog tsis zoo dua. Ntxiv nrog rau cov txheej txheem khoom siv SiC thiab cov cuab yeej yuav tsum tau txhim kho tas li. Yuav tsum muaj kev siv zog ntau ntxiv rau yuav ua li cas kom siv tau zoo ntawm cov khoom siv SiC los ntawm kev ua kom zoo dua cov qauv khoom siv S5C lossis thov cov qauv khoom siv tshiab.
Tam sim no. Kev tshawb fawb ntawm cov khoom siv SiC feem ntau tsom mus rau cov khoom siv sib cais. Rau txhua hom qauv khoom siv, kev tshawb fawb thawj zaug yog tsuas yog hloov cov qauv khoom siv Si lossis GaAs sib xws rau SiC yam tsis tau kho qhov qauv khoom siv. Txij li thaum txheej oxide intrinsic ntawm SiC zoo ib yam li Si, uas yog SiO2, nws txhais tau tias feem ntau cov khoom siv Si, tshwj xeeb tshaj yog cov khoom siv m-pa, tuaj yeem tsim tau ntawm SiC. Txawm hais tias nws tsuas yog kev hloov pauv yooj yim, qee cov khoom siv tau txais tau ua tiav cov txiaj ntsig zoo, thiab qee cov khoom siv twb nkag mus rau hauv kev lag luam Hoobkas.
Cov khoom siv optoelectronic SiC, tshwj xeeb tshaj yog cov teeb ci xiav (BLU-ray leds), tau nkag mus rau hauv kev ua lag luam thaum ntxov xyoo 1990 thiab yog thawj cov khoom siv SiC uas tsim tawm ntau. Cov diodes SiC Schottky hluav taws xob siab, SiC RF fais fab transistors, SiC MOSFETs thiab mesFETs kuj muaj nyob rau hauv kev lag luam. Tau kawg, kev ua tau zoo ntawm tag nrho cov khoom SiC no tsis yog qhov ua si ntawm cov yam ntxwv zoo ntawm cov ntaub ntawv SiC, thiab kev ua haujlwm muaj zog thiab kev ua tau zoo ntawm cov khoom siv SiC tseem yuav tsum tau tshawb fawb thiab tsim. Cov kev hloov pauv yooj yim no feem ntau tsis tuaj yeem siv tag nrho cov txiaj ntsig ntawm cov ntaub ntawv SiC. Txawm tias nyob rau hauv thaj chaw ntawm qee qhov zoo ntawm cov khoom siv SiC. Qee cov khoom siv SiC uas tsim tawm thawj zaug tsis tuaj yeem phim cov kev ua tau zoo ntawm cov khoom siv Si lossis CaAs sib xws.
Yuav kom hloov pauv qhov zoo ntawm cov yam ntxwv ntawm cov khoom siv SiC mus rau qhov zoo ntawm cov khoom siv SiC, tam sim no peb tab tom kawm txog yuav ua li cas los txhim kho cov txheej txheem tsim khoom siv thiab cov qauv khoom siv lossis tsim cov qauv tshiab thiab cov txheej txheem tshiab los txhim kho kev ua haujlwm thiab kev ua tau zoo ntawm cov khoom siv SiC.
Lub sijhawm tshaj tawm: Lub Yim Hli-23-2022