Cov khoom siv SiC graphite epitaxial zoo hauv xyoo 2026 muaj cov khoom siv huv si zoo dua, kev ruaj khov ntawm qhov ntev, kev ua kom zoo ntawm cov txheej txheem, thiab kev ua haujlwm thermal zoo tshaj plaws. Cov qauv tseem ceeb no tsav cov lus qhia tshwj xeeb ntawm tiam tom ntej SiC epitaxy. Kev lag luam xav tias yuav muaj kev loj hlob tseem ceeb, nrog rau 200mm lub peev xwm rau lub zog thiab cov khoom siv semiconductor hauv tsheb, suav nrog SiC cov khoom siv, nce ntxiv los ntawm34% ntawm xyoo 2023 thiab 2026Qhov kev nthuav dav no qhia txog qhov xav tau tseem ceeb rau kev nce qibgraphite susceptorthev naus laus zis los txhawb cov kev xav tau tsim khoom yav tom ntej.
Cov Ntsiab Lus Tseem Ceeb
- Cov khoom siv zoo xav tau graphite ntshiab heev thiab txheej SiC zoo meej. Qhov no tiv thaiv cov khoom phem kom tsis txhob nkag mus rau hauv cov txheej SiC.
- LubSiC txheejyuav tsum muaj zog thiab sib npaug. Nws yuav tsum lo rau zoo thiab tsis yooj yim puas. Qhov no ua rau cov txheej txheem huv si thiab sib xws.
- Cov khoom siv tiv thaiv yuav tsum muaj qhov loj thiab zoo li qub. Lawv yuav tsum nyob tiaj tus txawm tias kub heev los xij. Qhov no pab kom SiC loj hlob sib npaug.
- Cov khoom siv tiv thaiv yuav tsum kis tau cua sov zoo thiab tswj qhov kub kom ruaj khov. Qhov no ua kom cov txheej SiC loj hlob zoo thiab zoo.
- Cov chaw tsim khoom siv cov kev kuaj xyuas nruj kom paub tseeb tias txhua tus neeg raug mob zoo. Lawv sim lawv kom zoo thiab taug qab txhua yam. Qhov no ua kom ntseeg tau tias lawv ua haujlwm tau zoo.
Kev Huv Huv thiab Cov Khoom Siv rau Xyoo 2026 Epitaxial Susceptors
Zoo heevSiC graphite epitaxial susceptorsxyoo 2026 xav tau cov khoom siv huv si thiab cov khoom sib xyaw ua ke zoo heev. Cov yam no cuam tshuam ncaj qha rau kev ua tau zoo thiab kev ntseeg siab ntawm cov txheej txheem SiC epitaxy. Cov chaw tsim khoom yuav tsum ua tau raws li cov qauv nruj kom txhawb nqa kev tsim khoom semiconductor siab heev.
Cov Qauv Txheej Txheem Graphite Uas Muaj Kev Ntshiab Siab Tshaj Plaws
Lub graphite substrate tsim lub hauv paus ntawm epitaxial susceptors. Nws qhov kev dawb huv ncaj qha cuam tshuam rau qhov zoo ntawm cov txheej SiC loj hlob. Xyoo 2026, cov qauv xav tau graphite nrog cov ntsiab lus tshauv tsawg heev, feem ntau qis dua 5 ppm. Cov chaw tsim khoom kuj tseem ua kom muaj qhov sib xws ntawm cov khoom loj thiab cov qauv noob zoo. Cov khoom no tiv thaiv kev tawm pa tawm thaum lub sijhawm ua haujlwm kub siab. Lawv kuj tswj hwm qhov kev ua haujlwm ntawm cov susceptor. Kev ua tiav qhov kev dawb huv siab no suav nrog cov txheej txheem ntxuav siab heev.
SiC Txheej Stoichiometry thiab Crystal Quality
Cov txheej silicon carbide (SiC) tiv thaiv cov graphite substrate thiab muab qhov chaw loj hlob. Kev ua tau zoo tshaj plaws xav tau kev ua kom meejSiC txheejstoichiometry. Qhov no txhais tau tias qhov sib piv ntawm silicon-rau-carbon yuav tsum yog 1: 1. Txhua qhov kev hloov pauv tuaj yeem ua rau muaj qhov tsis zoo rau hauv SiC epitaxial txheej. Ntxiv mus, qhov zoo ntawm cov siv lead ua ntawm SiC txheej yog qhov tseem ceeb. Nws yuav tsum ua kom pom cov qauv siv lead ua uas muaj qhov tsis zoo tsawg kawg nkaus, xws li kev sib sau ua ke lossis kev tawg. Ib txheej zoo ua kom muaj kev loj hlob ntawm SiC thiab tiv thaiv kev ua qias tuaj.
Kev Txwv ntawm Cov Khoom Siv Uas Muaj Kab Mob
Kev ua qias ntawm cov khoom me me ua rau muaj kev phom sij rau kev ua haujlwm ntawm SiC. Txawm tias cov khoom me me ntawm cov khoom tsis huv kuj tuaj yeem ua rau cov khoom tsis zoo lossis tsim cov qhov tsis xav tau hauv zaj duab xis SiC. Rau xyoo 2026, cov chaw tsim khoom teeb tsa cov kev txwv qis heev rau cov khoom siv hlau thiab cov khoom tsis yog hlau. Piv txwv li, cov hlau, nickel, thiab chromium yuav tsum nyob hauv qhov ntau ntawm ib billion (ppb). Cov kev txwv nruj no tiv thaiv kev ua haujlwm hluav taws xob hauv cov khoom siv SiC kawg. Cov txheej txheem tshuaj xyuas siab heev lees paub cov qib kev ua qias tuaj tsawg heev no.
Kev Ncaj Ncees thiab Kev Ruaj Khoov Siab ntawm Epitaxial Susceptors
Lub durability thiab kev ncaj ncees ntawm cov khoomSiC txheej rau ntawm graphite epitaxial susceptorsyog qhov tseem ceeb rau kev sib xws thiab zoo SiC epitaxy. Cov chaw tsim khoom tsom mus rau cov txheej txheem ruaj khov uas tiv taus cov chaw ua haujlwm hnyav thiab tswj lawv cov khoom dhau ntau lub voj voog.
Kev Sib Xws ntawm Txheej Thickness
Cov txheej tuab sib xws yog qhov tseem ceeb rau kev ua tiav cov qauv thermal thiab kev loj hlob thoob plaws lub wafer. Cov epitaxial susceptors zoo muaj cov txheej tuab sib txawvhauv qab ± 2%hla tag nrho cov wafer nto. Qhov kev ua kom raug no ua kom txhua feem ntawm wafer muaj kev loj hlob zoo sib xws. Ntxiv mus, cov chaw tsim khoom siv zog rau qhov tsis zoo tsawg kawg nkaus. Qhov tsis zoo yuav tsum tsis pub tshaj 0.1 qhov tsis zoo / cm² rau cov khoom me me loj dua 0.3μm. Qhov kev tswj hwm nruj no tiv thaiv qhov tsis zoo los ntawm kev hloov mus rau cov txheej SiC uas loj hlob.
Kev Tiv Thaiv Kev Sib Txuas Thiab Kev Tshem Tawm
Kev sib txuas zoo ntawm SiC txheej thiab graphite substrate yog qhov tseem ceeb rau kev ua haujlwm ntev. Kev sib txuas tsis zoo tuaj yeem ua rau delamination, uas ua rau cov txheej txheem paug thiab ua puas rau lub wafer. Cov chaw tsim khoom siv ntau txoj hauv kev los ntsuas kev sib txuas. Lawv ntsuas kev sib txuas los ntawmtsim cov nplaim tawg los ntawm cov phaj kuajTxoj kev rhuav tshem no qhia tau tias tsis muaj kev sib txuas los ntawm kev tawg ntawm cov txheej ntawm thaj chaw tawg. Tsis tas li ntawd, lawv ntsuas kev sib txuas los ntawmsiv kev ntxhov siab rau qhov chaw coatedlos xyuas seb puas tev tawm lossis tawg. Kev ntsuam xyuas kev ruaj khov ua piv txwv rau cov xwm txheej tiag tiag. Cov kev ntsuam xyuas no ntsuas qhov tsis kam rau kev hnav, kev ntxhov siab thermal, thiab kev raug tshuaj lom neeg. Kev ntsuam xyuas kev ruaj khov thermal yuav tsum tau cov txheej txheem kom tswj tau qhov ruaj khov ntawm cov qauv los ntawm kev hloov pauv kub ntawm -65 ° C txog 600 ° C yam tsis muaj kev tawg lossis tawg.
Qhov Roughness thiab Morphology
Qhov roughness thiab morphology ntawm SiC txheej ncaj qha cuam tshuam rau qhov zoo ntawm epitaxial txheej. Ib qho du, tsis muaj qhov tsis zoo nto txhawb nqa kev sib xws nucleation thiab kev loj hlob ntawm SiC zaj duab xis. Cov chaw tsim khoom tsom rau qhov qis heev roughness nto, feem ntau nyob rau hauv nanometer ntau yam. Lawv kuj xyuas kom meej tias lub txheej qhia txog ib qho crystalline morphology sib xws. Qhov no tiv thaiv kev tsim ntawm cov crystal orientations tsis xav tau lossis qhov tsis zoo hauv cov khoom SiC loj hlob. Ib qho zoo tswj nto txo cov khoom me me thiab txhim kho tag nrho cov txiaj ntsig ntawm epitaxy txheej txheem.
Kev Tiv Thaiv Kev Yaig Thiab Kev Sib Tsoo
Cov txheej SiC zoo yuav tsum ua kom pom tseeb tias tiv taus kev yaig thiab xeb. Lub peev xwm no ua kom lub susceptor lub neej ntev thiab tswj cov txheej txheem huv. Cov chaw muaj tshuaj lom neeg hnyav thiab qhov kub siab ntawm SiC epitaxy xav tau kev tiv thaiv zoo.
Cov kev tshawb fawb lees paub qhov kev tiv thaiv corrosion siab ntawm CVD SiC coatings. Cov coatings no tiv thaiv tau zoo graphite susceptors los ntawm cov neeg sawv cev corrosive xws liammonia (NH3) thiab chlorine (Cl2) ntawm qhov kub siabQhov kev tiv thaiv no tso cai rau tus neeg raug mob kom tswj tau nws txoj kev ncaj ncees thoob plaws hauv txoj kev loj hlob ntawm epitaxial. Qhov kev ua kom ruaj khov no tiv thaiv cov khoom puas tsuaj thiab kev ua qias tuaj ntawm cov txheej SiC uas loj hlob.
Cov chaw tsim khoom sim ua tib zoo ntsuas qhov ruaj khov ntawm cov txheej. Lawv soj ntsuam qhov poob ntawm cov khoom loj thiab kev hloov pauv ntawm qhov roughness ntawm qhov chaw tom qab raug rau cov xwm txheej hnyav. Piv txwv li, qee cov qauv txheej SiC qhia tau tiasCov nqi poob phaus tsawg li 0.72% thiab qhov roughness ntawm qhov chaw hloov pauv li ntawm 11.3%. Lwm cov kev hloov pauv ntawm cov txheej txheem yuav ua rau muaj kev poob ntau dua, ncav cuag 1.2%, lossis ntau dua qhov kev hloov pauv ntawm qhov chaw roughness, tshaj 50%. Cov ntsuas no pab cov engineers ua kom zoo dua cov qauv txheej txheem rau qhov siab tshaj plaws.
Cov txheej txheem SiC tau lees paub rau lawv qhov kev tiv thaiv corrosion zoo heevnyob rau hauv cov chaw muaj zog heev, suav nrog cov kua qaub thiab alkalis muaj zog. Lawv tiv thaiv cov substrate los ntawm kev puas tsuaj ntawm cov tshuaj lom neeg thiab tswj kev ua haujlwm ruaj khov txawm tias nyob rau hauv cov xwm txheej hnyav, pab txhawb kev ua haujlwm ntawm cov khoom thiab lub neej ntev dua.
Qhov kev tsis muaj zog ntawm SiC no ua kom lub susceptor tseem ruaj khov. Nws tiv thaiv cov tshuaj lom neeg uas yuav ua rau muaj cov khoom tsis huv lossis hloov qhov chaw ntawm lub susceptor. Thaum kawg, kev tiv thaiv kev yaig thiab kev xeb zoo dua pab txhawb rau qhov zoo ntawm wafer thiab lub neej ua haujlwm ntev rau lub susceptor.
Kev Ntsuas Qhov Ntev thiab Kev Ruaj Ntseg ntawm Epitaxial Susceptors
Zoo heevSiC graphite epitaxial susceptorsxyoo 2026 xav tau qhov tseeb ntawm qhov ntev thiab kev ruaj khov ntawm lub tshuab. Cov cwj pwm no cuam tshuam ncaj qha rau qhov sib xws thiab kev ntseeg tau ntawm cov txheej txheem SiC epitaxy. Cov chaw tsim khoom tsom mus rau cov cheeb tsam no kom ua tau raws li qhov xav tau ntawm kev tsim khoom semiconductor siab heev.
Kev Tawm Tsam Ntev
Qhov ntev yog qhov tseem ceeb rau kev ua haujlwm zoo tshaj plaws ntawm cov khoom siv susceptor. Cov chaw tsim khoom ua kom muaj kev kam rau siab heev rau cov yam ntxwv xws li txoj kab uas hla, tuab, thiab qhov tiaj tus. Piv txwv li, qhov tiaj tus hla qhov chaw susceptor yuav tsum nyob hauv ob peb micrometers. Cov kev tswj hwm nruj no lav qhov cua sov sib xws thiab cov pa roj ntws sib xws thoob plaws tag nrho cov wafer. Txhua qhov kev hloov pauv hauv qhov ntev tuaj yeem ua rau qhov kub thiab txias tsis sib xws. Qhov no ua rau SiC txheej loj hlob tsis sib xws thiab txo cov khoom siv. Cov txheej txheem ua haujlwm siab heev thiab kev ntsuas ua tiav cov qauv nruj no.
Kev Sib Tw Nthuav Dav Thermal
Tus coefficient ntawm kev nthuav dav thermal ntawm SiC txheej yuav tsum sib xws nrog cov graphite substrate. Qhov kev sib dhos tseem ceeb no tiv thaiv kev ntxhov siab thaum lub sijhawm cua sov thiab txias sai. Yog tias cov coefficients sib txawv ntau, kev ntxhov siab thermal tuaj yeem ua rau SiC txheej tawg lossis delaminate ntawm graphite. Cov qhov tsis zoo no ua rau lub susceptor tsis muaj zog thiab ua rau cov txheej txheem epitaxial tsis huv. Cov kws ua haujlwm ua tib zoo xaiv cov ntaub ntawv thiab ua kom cov txheej txheem txheej txheem zoo dua kom ua tiav qhov kev sib raug zoo thermal nthuav dav tseem ceeb no. Qhov no ua kom ntseeg tau tias lub sijhawm ntev ntawm epitaxial susceptors.
Kev Tiv Thaiv Warpage thiab Deformation
Cov khoom siv Epitaxial susceptors yuav tsum tswj lawv cov duab meej txawm tias nyob rau hauv qhov kub thiab txias heev, feem ntau tshaj 1600 ° C. Yog li ntawd, kev tiv thaiv rau kev warpage thiab deformation yog qhov tseem ceeb. Warpage tuaj yeem ua rau wafer cua sov tsis sib xws, wafer slip, thiab zaj duab xis tsis sib xws. Cov chaw tsim khoom siv cov qib graphite siab, isotropic thiab cov txheej txheem SiC txheej txheem siab heev los txhim kho kev ruaj khov ntawm cov qauv. Cov ntaub ntawv thiab cov txheej txheem no txo qis kev ntxhov siab sab hauv thiab tiv thaiv kev hloov pauv duab thaum lub sijhawm kub ntev. Qhov no ua kom ntseeg tau tias cov txheej txheem sib xws thiab cov txheej txheem SiC epitaxial zoo.
Kev Ua Haujlwm Thermal Zoo Tshaj Plaws ntawm Epitaxial Susceptors
Zoo heevSiC graphite epitaxial susceptorsxyoo 2026 yuav tsum ua kom pom kev ua haujlwm thermal zoo tshaj plaws. Qhov no ua kom muaj kev sib xws thiab ua haujlwm tau zoo ntawm SiC epitaxy. Cov chaw tsim khoom muab qhov tseem ceeb rau cov khoom uas pab tswj qhov kub thiab txias kom meej thiab ruaj khov thaum lub sijhawm loj hlob.
Kev Ua Haujlwm Thermal thiab Kev Sib Xws
Kev ua kom sov zoo heev yog qhov tseem ceeb rau kev hloov pauv cua sov zoo hauv lub susceptor. Cov cuab yeej no tso cai rau kev ua kom sov thiab txias sai. Nws kuj pab tswj kom muaj qhov kub thiab txias ruaj khov thoob plaws lub wafer. CVD 3C-SiC, ib yam khoom siv rau wafer susceptors hauv kev loj hlob semiconductor, ua kom pom kev ua kom sov siab. Kev tshawb fawb ntawm <111>-taw qhia CVD 3C-SiC qhia tias nws cov thermal conductivity sab nraud tuaj yeem txo qis los ntawm146.4 W/m·K txog 122.3 W/m·Kraws li qhov loj ntawm cov noob ze li ntawm 11.04 μm. Lwm txheej β-SiC, tsim los ntawm CVD, qhia txog kev ua kom sov ntawm3.2 W/m·KCov khoom siv no tswj tau qhov tiaj tiaj ntawm ± 0.2 hli txawm tias ntawm 1600 ° C, qhia txog nws qhov ruaj khov ntawm qhov kub siab ntawm cov txheej txheem epitaxy. Kev ua kom sov siab tiv thaiv cov chaw kub thiab cov chaw txias, uas tuaj yeem ua rau cov zaj duab xis tsis sib xws.
Kev Sib Npaug Kub Thoob Plaws Susceptor
Qhov tseem ceeb tshaj plaws yog kom ua tiav thiab tswj tau qhov kub thiab txias sib npaug thoob plaws tag nrho cov nplaim ntawm cov khoom siv. Qhov kub thiab txias tsis sib npaug ua rau muaj kev hloov pauv ntawm cov nqi loj hlob thiab cov khoom siv thoob plaws SiC wafer. Cov chaw tsim khoom tsim cov khoom siv nrog cov qauv geometries thiab cov khoom faib tawm tshwj xeeb los txhawb kev faib tawm cua sov sib npaug. Cov cuab yeej ua qauv thermal thiab simulation siab heev pab ua kom zoo dua cov qauv no. Qhov no ua kom txhua qhov ntawm cov wafer muaj tib qho chaw sov. Kev sib npaug ntawm qhov kub thiab txias sib xws txhais tau tias cov txiaj ntsig wafer siab dua thiab kev ua haujlwm ntawm cov khoom siv zoo dua.
Kev ruaj khov ntawm emissivity
Kev tawg tawm, lub peev xwm ntawm ib qho chaw los tso tawm lub zog thermal, ua lub luag haujlwm tseem ceeb hauv kev tswj qhov kub. Kev ruaj khov emissivity ua kom muaj kev ntsuas kub raug los ntawm pyrometers. Nws kuj tseem pab txhawb rau kev hloov pauv cua sov tas mus li hauv lub reactor. SiC coatings feem ntau qhia txog kev emissivity siab.
| Khoom siv | Kev tawg tawm |
|---|---|
| SiC | 0.8 |
| TaC | 0.3 |
Cov khoom siv zoo tswj tau cov nqi emissivity ruaj khov thoob plaws ntau lub voj voog epitaxy. Qhov no tiv thaiv kev hloov pauv hauv kev nyeem kub thiab ua kom muaj cov txheej txheem rov ua dua. Kev puas tsuaj ntawm cov txheej txheem lossis kev hloov pauv ntawm qhov chaw tuaj yeem hloov pauv emissivity, ua rau muaj kev tsis sib xws ntawm cov txheej txheem. Yog li ntawd, cov chaw tsim khoom tsom mus rau cov txheej txheem ruaj khov uas khaws lawv cov khoom siv kho qhov muag thoob plaws lawv lub neej ua haujlwm.
Kev Tswj Xyuas Kev Tsim Khoom thiab Kev Ruaj Ntseg Zoo rau Epitaxial Susceptors
Cov chaw tsim khoom siv cov kev tswj hwm nruj thiab cov kev ntsuas kom zoo rau qhov zooSiC graphite epitaxial susceptorsCov kev coj ua no ua kom ntseeg tau tias cov khoom muaj kev ntseeg siab thiab kev ua tau zoo tas mus li. Lawv ua tau raws li qhov xav tau ntawm kev tsim cov khoom siv semiconductor siab heev.
Kev ua dua tshiab thiab Kev Sib Xws ntawm Pawg-rau-Pawg
Kev ua dua tshiab yog qhov tseem ceeb rau kev tsim cov khoom siv zoo. Cov chaw tsim khoom tsim kom muaj kev tswj hwm cov txheej txheem nruj. Cov kev tswj hwm no ua kom cov khoom siv thiab kev ua tau zoo sib xws thoob plaws txhua pawg ntau lawm. Lawv siv kev tswj hwm cov txheej txheem suav txheeb (SPC) los saib xyuas cov yam ntxwv tseem ceeb. Qhov no suav nrog cov khoom siv sib xyaw, cov tuab ntawm txheej, thiab qhov ntev. Kev nrhiav cov khoom siv raw tsis tu ncua kuj ua lub luag haujlwm tseem ceeb. Nws txo qis qhov sib txawv ntawm cov khoom kawg. Txoj hauv kev no ua kom ntseeg tau tias txhua tus neeg siv khoom ua tau zoo tib yam.
Cov Txheej Txheem Kev Ntsuas Tsis Ua Rau Puas Tsuaj
Cov txheej txheem kuaj tsis ua puas tsuaj (NDT) xyuas kom meej qhov zoo ntawm cov khoom siv tsis ua puas tsuaj. Kev tshuaj xyuas pom pom qhov tsis zoo ntawm qhov chaw lossis qhov tsis sib xws. Kev kuaj tam sim no eddy pom qhov tsis zoo hauv qab thiab cov teeb meem kev ua tiav ntawm cov txheej txheem. Kev kuaj ultrasonic tuaj yeem qhia tau qhov tsis muaj dab tsi sab hauv lossis qhov tawg. Kev tshuaj xyuas X-ray muab kev tshuaj xyuas cov qauv sab hauv kom ntxaws. Cov kev xeem no ua kom ntseeg tau tias cov khoom siv ua tau raws li cov lus qhia zoo. Lawv tiv thaiv cov khoom tsis zoo kom tsis txhob nkag mus rau hauv cov khoom xa tuaj. Txoj hauv kev ua ntej no tswj tau qhov kev ntseeg siab ntawm cov khoom.
Daim Ntawv Pov Thawj thiab Kev Tshawb Nrhiav Tau
Daim ntawv pov thawj thiab kev taug qab muab kev lees paub zoo tseem ceeb. Cov chaw tsim khoom ua raws li cov qauv thoob ntiaj teb xws li ISO 9001. Qhov no qhia tau tias lawv cog lus rau cov txheej txheem tswj xyuas zoo. Txhua tus neeg siv khoom tau txais tus cim tshwj xeeb. Qhov no tso cai rau kev taug qab tag nrho los ntawm cov khoom siv raw mus rau cov khoom kawg. Cov ntaub ntawv qhia txog cov txheej txheem tsim khoom, cov txiaj ntsig kev tshuaj xyuas, thiab keeb kwm ntawm cov khoom. Cov ntaub ntawv tiav no ua kom muaj kev lav phib xaub. Nws kuj tseem pab daws teeb meem sai yog tias muaj teeb meem tshwm sim. Daim ntawv pov thawj thiab kev taug qab ua rau muaj kev ntseeg siab rau cov khoom zoo thiab kev ua tau zoo.
Cov khoom siv SiC graphite epitaxial susceptors zoo hauv xyoo 2026 yuav ua tau raws li cov qauv nruj rau cov khoom siv huv, kev ua kom zoo ntawm cov txheej, qhov tseeb ntawm qhov ntev, thiab kev ua haujlwm thermal. Cov kev nce qib no ua rau muaj kev nce qib ntawm SiC fais fab electronics thiab lwm yam kev siv tseem ceeb.Cov txheej txheem txheej txheem SiC siab heevtxhim kho kev tiv taus rau qhov kub thiab txias siab thiab cov tshuaj lom neeg thaum lub sijhawm MOCVD, txhim kho kev ua haujlwm zoo thiab kev ruaj khov ntawm cov khoom. Kev tsim qauv zoo tshaj plaws ua kom muaj kev faib tawm kub sib npaug, ncaj qha txhim kho qhov zoo ntawm cov yeeb yaj kiab semiconductor. Qhov no ua rau muaj kev ua tau zoo dua thiab cov txiaj ntsig zoo dua rau cov khoom siv semiconductor.Txhim kho lub zog kho tshuab thiab kev ua kom sov zoo duakuj tseem pab txhawb rau lub neej ua haujlwm ntev dua thiab txo qis kev ua qias tuaj.
Cov Lus Nug Feem Ntau
SiC graphite epitaxial susceptor yog dab tsi?
Nws yog ib qho tseem ceeb hauv SiC epitaxy. Nws tuav lub wafer thaum lub sijhawm kub siab. Nws muaj cov graphite substrate nrog lub txheej SiC tiv thaiv. Qhov kev tsim no ua kom muaj cua sov sib npaug thiab tiv thaiv kev ua qias tuaj.
Vim li cas qhov huv ntawm cov khoom siv thiaj li tseem ceeb rau cov neeg uas raug kev txom nyem no?
Cov khoom siv huv si heev tiv thaiv kev ua qias tuaj ntawm txheej SiC epitaxial. Cov ntsiab lus me me tuaj yeem ua haujlwm ua cov dopants tsis xav tau. Lawv tsim cov qhov tsis zoo hauv cov khoom siv semiconductor. Cov graphite huv si heev thiab cov txheej txheem SiC txheej stoichiometry meej yog qhov tseem ceeb.
Kev ruaj khov ntawm cov txheej txheem cuam tshuam li cas rau kev ua haujlwm ntawm cov susceptor?
Kev ua kom cov txheej txheem ruaj khov ua kom muaj zog thiab ua haujlwm tas li. Kev tuab sib npaug, kev nplaum zoo, thiab qhov tsis sib npaug ntawm qhov chaw tiv thaiv kev puas tsuaj. Nws kuj tiv taus kev yaig thiab xeb. Qhov no tswj tau qhov kev tiv thaiv ntawm tus neeg raug mob dhau sijhawm.
Lub luag haujlwm ntawm kev ua haujlwm thermal ua si li cas rau qhov zoo ntawm cov neeg raug mob?
Kev ua haujlwm thermal zoo tshaj plaws ua kom muaj kev faib tawm kub sib npaug thoob plaws lub wafer. Kev ua haujlwm thermal siab thiab emissivity ruaj khov yog qhov tseem ceeb. Qhov no ua rau muaj kev loj hlob ntawm SiC tas li. Nws kuj tseem txhim kho qhov zoo ntawm cov txheej epitaxial.
Cov chaw tsim khoom ua li cas thiaj xyuas kom meej tias cov epitaxial susceptors zoo li cas?
Cov chaw tsim khoom siv cov txheej txheem tswj hwm nruj thiab kev lees paub zoo. Lawv siv cov txheej txheem kuaj tsis ua puas tsuaj. Lawv kuj tswj hwm daim ntawv pov thawj tag nrho thiab kev taug qab. Cov kev ntsuas no ua kom muaj kev rov ua dua thiab kev ua haujlwm siab tas li rau txhua tus neeg raug mob.
Lub sijhawm tshaj tawm: Kaum Ib Hlis-12-2025