SiC coated graphite bases are commonly used to support and heat single crystal substrates in metal-organic chemical vapor deposition (MOCVD) equipment. The thermal stability, thermal uniformity and...
The basic process of SiC crystal growth is divided into sublimation and decomposition of raw materials at high temperature, transportation of gas phase substances under the action of temperature gr...
1. Acknowledgement before cleaning
1) When the PECVD graphite boat/carrier is used more than 100 to 150 times, the operator needs to check the coating condition in time. If there is an abnormal coa...
Silicon carbide crystal boat is a material with excellent properties, showing extraordinary heat and corrosion resistance in high temperature environments. It is a compound composed of carbon and s...
Non-uniformity of ion bombardment
Dry etching is usually a process that combines physical and chemical effects, in which ion bombardment is an important physical etching method. During the etchin...
Why do graphite crucibles crack? How to solve it?
The following is a detailed analysis of the causes of cracks:
1. After the crucible is used for a long time, the crucible wall presents longitudin...