Buku Lothandiza Kwambiri la Ma Susceptor Oyera Kwambiri a Graphite

Mu kupanga zida zamakono za semiconductor ndi kupanga ma semiconductor a m'badwo wachitatu (monga Silicon Carbide [SiC] ndi Gallium Nitride [GaN]), zokambirana zamakampani nthawi zambiri zimayang'ana pa makina apamwamba kwambiri a EUV lithography, ma plasma etchers, kapena kuyera kwa mpweya woyambirira. Komabe, mkati mwa malo oyera kwambiri, owononga kwambiri, komanso otentha kwambiri a chipinda chochitirapo kanthu muli ngwazi yofunika kwambiri yosayamikiridwa: Graphite susceptor.

1. Kodi Graphite Susceptor ndi chiyani?

A Chotsukira cha graphitendi chinthu chonyamulira chogwira ntchito bwino chomwe chimapangidwa kuchokera ku graphite yopangidwa ndi iso-molded kapena extruded yoyera kwambiri, nthawi zambiri imakhala ndi mawonekedwe a disk, m'thumba, kapena mwamakondama geometri amitundu itatu okonzedwa kuti agwirizane ndi zipinda zinazake zochitirapo kanthu.

Mu zipangizo monga Chemical Vapor Deposition (CVD), Metal-Organic Chemical Vapor Deposition (MOCVD), ndi Rapid Thermal Processing (RTP) reactors, ntchito yayikulu ya nsanja yonyamulira ndi kusunga bwino ma wafer a semiconductor pamene akugwira ntchito ngati chosinthira kutentha chachikulu. Pogwiritsa ntchito njira zotenthetsera za Graphite susceptor induction, gawoli limatenga mwachangu mphamvu ya Radio Frequency (RF) kapena microwave electromagnetic ndikuisintha kukhala mphamvu yofanana ya kutentha, zomwe zimathandiza kuti kutentha kuyende bwino pamlingo wa millisecond pamwamba pa wafer.

2. Kapangidwe ka Zinthu & Kapangidwe ka Micro: Chifukwa Chiyani Isostatic Graphite + CVD SiC Coating?

Graphite yosaphika yosaphimbidwa singathe kupirira mlengalenga wa mankhwala amphamvu komanso zofunikira kwambiri zaukhondo wa opanga semiconductor. Ma susceptor amakono a Graphite opambana kwambiri amagwiritsa ntchito njira yapadera yopangira zinthu ziwiri:

(1) Chotsukidwa Kwambiri Chosasinthika cha Graphite Substrate

Chigawo chapakati chimapangidwa pogwiritsa ntchito graphite yosindikizidwa ndi isostatically. Mwa kukonza bwino graphite micro crystalline alignment, imakwaniritsa mawonekedwe a isotropic physical, porosity yochepa, komanso mphamvu yayikulu yosinthasintha, zomwe zimapangitsa kuti pakhale maziko abwino kwambiri opangira ma wafer pocket geometries ovuta kwambiri.

(2) Chophimba Choteteza cha CVD Silicon Carbide (SiC)

Pogwiritsa ntchito Chemical Vapor Deposition, gawo lolimba kwambiri la poly-crystalline B-SiC (nthawi zambiri limakhala ndi makulidwe a 10 mpaka 100 um ndi kuyera kwa 99.999%) limamera pamwamba pa graphite substrate. Chophimbachi chimatseka kwathunthu ma micro-pores pamwamba pa graphite, chimaletsa kutayika kwa tinthu tating'onoting'ono, ndipo chimapereka chotchinga chosalowa madzi ku mpweya wowononga monga HCI, NH,, ndi mankhwala opangidwa ndi fluorinated.

3. Katundu Wofunika Kwambiri ndi Zofunikira Zake

Kutengera mayeso okhwima a labotale ndi miyezo yovomerezeka yamakampani, ma susceptor a Graphite okhala ndi utoto woyera kwambiri amawonetsa magawo ofunikira awa:

Ubwino wa Uinjiniya Wapakati:

1. Kukana Kwambiri Kutenthedwa ndi Kutentha: Yokhoza kupirira kutentha ndi kuzizira mofulumira kosalekeza (kupitirira 1500°C) popanda kusweka kapena kulekanitsidwa.

2. Kusagwira Ntchito kwa Mankhwala: Sizimawonongeka ndi H2, NH3, mpweya wa silane, ndi mankhwala oyeretsera mankhwala oopsa.

3. Kufananiza kwa Coefficient of Thermal Expansion (CTE)Njira yodziwika bwino ya VET Energy yoyika SiC imagwirizanitsa momwe kutentha kwa SiC kumakulirakulira ndi graphite core, zomwe zimaletsa kusweka kwa glaze pa kutentha kwambiri.

4. Udindo ndi Ntchito mu Kukonza Semiconductor

Ma susceptor a Graphite odalirika kwambiri amagwira ntchito ngati zigawo zoyambira zothandizira pazigawo zingapo zofunika kwambiri zopangira ma semiconductor:

(1) Kukula kwa Epitaxial (Epi) ndi CVD (MOCVD)

Mu kupanga kwa GaN LED, SiC power device epitaxy, ndi silicon wafer epi-growth, makulidwe a filimu ndi kufanana kwa doping zimadalira kwambiri momwe kutentha kumakhalira. Ma graphite susceptors amagawa kutentha mofanana pa ma configurations amodzi kapena ambiri a wafer panthawi yozungulira, kuletsa ma wafer omwe amayendetsedwa ndi kutentha chifukwa cha kupsinjika kapena kutsetsereka.

(2) Kukula kwa Makristalo Amodzi (Njira ya PVT)

Pa nthawi ya kukula kwa Silicon Carbide (SiC) ndi Sapphire crystal kudzera mu Physical Vapor Transport (PVT), susceptor imafotokoza momwe kutentha kumayendera, kutsogolera mwachindunji kupangika kwa single-crystal ingot ndikuchepetsa kuchuluka kwa dislocation.

(3) Kukonza Kutentha Mwachangu (RTP) & Kuyika

Pogwiritsa ntchito kutentha koyenera kwa Graphite susceptor induction, nsanjayi imalola kuti kutentha kukhale kofulumira kwambiri kuti pakhale nthawi yokwanira yoyankhira ma lattice ndi ma junction pambuyo pa implantation.

5. N’chifukwa Chiyani Muyenera Kusankha Mphamvu ya VET?

Ndi zofunikira zofunika kuti unyolo woperekera zinthu ukhale wolimba, ukhondo wochuluka, komanso nthawi yayitali yogwirira ntchito,Mphamvu ya VETimadziwika bwino ngati bwenzi lodalirika la mainjiniya padziko lonse lapansi:

1. Makina Opangira Makina Ang'onoang'ono Olondola: Malo opangira makina a CNC okhala ndi axis yambiri amathandiza matumba ovuta a wafer, ma micro-grooves, ndi njira zapadera za gasi zomwe zimakhala ndi mphamvu zoyendera mpweya mpaka pamlingo wa micrometer.

2. Advanced Dense CVD SiC Deposition: Njira yathu ya CVD imakwaniritsa zophimba za SiC zokhuthala kwambiri, zomwe zimawonjezera nthawi yogwira ntchito ya kutentha ndi zoposa 30%.

3. Malo Otsukira Kwambiri: Kuyeretsa kwathunthu ndi kusamalira chipinda choyera kumatsimikizira kuti phulusa lonse limasungidwa pansi pa 5 ppm nthawi zonse, zomwe zimakwaniritsa semiconductor yolimba ya OEMMiyezo ya Fab.

4. Mtengo Wokwanira wa Umwini (CoO): VET Energy imapereka nthawi yofulumira yopezera ndalama pamodzi ndi mitengo yopikisana poyerekeza ndi magwiridwe antchito, zomwe zimathandiza opanga ma chip kuchepetsa ndalama zomwe zingagwiritsidwe ntchito.