Zigawo Zophimbidwa ndi CVD SiC za Silicon Epitaxy (Si Epi)
Yopangidwa mwaluso kwambiri kuti igwiritsidwe ntchito pa single-wafer ndi batch Silicon Epitaxial deposition systems, ma CVD SiC coated susceptors, satellite disks, ndi zigawo za thermal field zimapereka kutentha kofanana kwambiri komanso kusakhala ndi mpweya woipa. Chophimba cha cubic β-SiC chokhala ndi kuchuluka kwakukulu chimaphimba bwino gawo la graphite loyera kwambiri, kuletsa reactive gas etching (SiH₄, SiH₂Cl₂, HCl) ndikutsimikizira kuchuluka kwa zinthu zodetsedwa zachitsulo (<5 ppm) panthawi yokonza Si Epi yotentha kwambiri (1000°C - 1200°C).
Kutulutsa kwamphamvu kwa filimuyo kumatsimikizira kuti makulidwe ake ndi ofanana ndi a wafer m'mphepete mpaka pakati.
Amapereka chitetezo champhamvu ku mankhwala oyeretsera m'chipindamo komanso kutentha komwe kumawotchedwa.
Makina a CNC opangidwa bwino kuti agwirizane ndi zida zazikulu za 200mm/300mm za Epi zokhala ndi wafer imodzi (Zipangizo Zogwiritsidwa Ntchito, ASM).
| Chizindikiro chaukadaulo | Mtengo Wofotokozera | Njira Yoyenera / Yoyesera |
|---|---|---|
| Zopangira Zophimba | CVD β-SiC (Gawo la Cubic) | Kapangidwe ka Makristalo Okhala ndi Kachulukidwe Kakakulu |
| Zinthu Zoyambira | Graphite Yoyera Kwambiri Yopanda Chisokonezo | Kuchuluka: 1.82 - 1.88 g/cm³ |
| Kuyera kwa Mankhwala | Zonyansa Zonse < 5 ppm | Kuyesedwa kwa GDMS |
| Kuphimba makulidwe | 80 μm - 150 μm | Kufanana ≤ ± 5% |
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