Phunziro la Nkhani: Zigawo za Graphite Zoyera Kwambiri za Magawo Otentha a Monocrystalline a 32-Inch mu Kukula kwa Silikoni ya Mtundu wa N

Chiyambi: Vuto la Kutentha kwa Mainchesi 32 pa Kukula kwa Silikoni ya Mtundu wa N Wogwira Ntchito Kwambiri

Pamene makampani opanga ma photovoltaics akusintha mwachangu kuchoka pa P-type PERC kupita ku N-type TOPCon ndi Heterojunction (HJT) solar cells, kufunikira kwa ma silicon wafers apamwamba kwambiri kwakwera kwambiri. Ma substrates a silicon a mtundu wa N amafuna moyo wautali kwambiri wonyamula zinthu zochepa (nthawi zambiri >300 μs) ndi kuipitsidwa kwa zitsulo zosasinthika pafupifupi zero.

Pofuna kuonjezera mphamvu yamagetsi, opanga ma silicon wafer akukulitsa kukula kwa ma crucible mpaka mainchesi 32 kapena kupitirira apo. Komabe, kugwira ntchito kutentha kopitilira 1,450°C m'munda wotentha wa mainchesi 32 kumabweretsa mavuto akulu aukadaulo:

1. Kuwonongeka kwa Kutentha ndi Kusafanana:Kutentha kwakukulu kumayambitsa kusintha kwa kapangidwe kake ndi ming'alu m'ma heater ndi ma pedestals okhazikika a graphite.
2. Kuipitsidwa ndi Chitsulo Chosasinthasintha:Zinthu zosafunikira (Fe, Ni, Cu, V) zomwe zili mkati mwa graphite yachikhalidwe zimaphwanyika panthawi yokoka kristalo kwa nthawi yayitali, kusamukira mwachindunji mu silicon yosungunuka ndikupangitsa kuwonongeka kwakukulu kwa moyo wonse wa chonyamulira chaching'ono.

Yankho la Uinjiniya: Ultra-Pured Isostatic Graphite & CVD SiC Shielding

Pofuna kuthana ndi mavutowa, VeTek Semiconductor idagwiritsa ntchito njira yosinthira zinthu zonse pa malo onse otentha a mainchesi 32, kuphatikizapo graphite ya isostatic yokhala ndi kuchuluka kwakukulu komwe kumayeretsedwa ndi kutentha kwambiri komanso zophimba za CVD Silicon Carbide (SiC).

1. Kuyeretsa kwa Halogen Yozama (Kuchuluka kwa Phulusa ≤ 2-5 ppm)

Graphite wamba wa mafakitale uli ndi phulusa lochuluka pakati pa 50 ppm ndi 200 ppm. Pa 1,450°C pansi pa vacuum, zinthu izi zimasinthasintha. Njira yathu yoyeretsera mpweya wa Halogen yotenthetsera kwambiri imasintha zinthu zonyansa zachitsulo kukhala zinthu zosasunthika za halogen (chlorides/fluorides) pa kutentha kopitilira 2,400°C.

• Kuyesa kwa Glow Discharge Mass Spectrometry (GDMS)imatsimikizira kuti zonyansa zonse zachitsulo (Fe, Cr, Ni, Cu, V) zachepetsedwa kufika pansi pa 0.5 ppm, zomwe zimapangitsa kuti phulusa lonse likhale ≤ 2 ppm.
• Zotsatira:Zimachotsa kusintha kwa mpweya wachitsulo wakumbuyo, kuteteza dziwe la silicon losungunuka kuti lisaipitsidwe ndi zinthu zina mkati mwa maola 120+ okoka mosalekeza.

2. Kapangidwe ka Graphite Yosasinthasintha Kwambiri Yokhala ndi Kuchuluka Kwambiri Kuti Kutentha Kukhale Kokhazikika

Zigawo monga chotenthetsera cha graphite, chotenthetsera chotenthetsera, ndi mbiya yotenthetsera zimapangidwa kuchokera ku graphite yopyapyala kwambiri (1.85 g/cm³), graphite yopyapyala (kukula kwa tirigu <10 μm). Kukanikiza kwa isostatic kumatsimikizira kukula kwa kutentha kwa isotropic (CTE) kofanana, kuteteza kupsinjika kwa kutentha komwe kumachitika m'malo osiyanasiyana, kupindika, ndi kusweka kwa makina pansi pa kutentha kobwerezabwereza.

3. Chophimba Choteteza cha CVD Silicon Carbide (SiC)

Zinthu zofunika kwambiri zomwe zimakhudzidwa ndi nthunzi ya silicon ndi mpweya woyeretsa wowononga zimakutidwa ndi wosanjikiza wokhuthala wa 50–80 μm wa Chemical Vapor Deposition (CVD) Silicon Carbide (SiC).

• Chotchinga cha Dzimbiri:Zimaletsa kuchitapo kanthu mwachindunji pakati pa nthunzi ya silikoni yosasunthika (SiO2) ndi graphite substrate (SiO2 + 2C → SiC2 + CO2), kuthetsa kukokoloka kwa pamwamba ndi kupanga fumbi la kaboni.
• Kulondola kwa Jiyometri:Imasunga mawonekedwe enieni a malo otentha kuposa nthawi yotalikirapo ya 30%.

Deta Yoyezedwa Yogwira Ntchito & Kutsimikizira Kuyesa Kwamunda

Kuyesa koyerekeza kwa miyezi 6 kunachitika pa zitofu 50 za mainchesi 32 za CZ pa fakitale yopanga ma wafer a silicon ya tier-1 ya TOPCon. Pansipa pali muyezo woyerekeza magwiridwe antchito poyerekeza zigawo za graphite zokhazikika ndi yankho la VeTek Semiconductor loyeretsedwa la thermal field:

Mafunso Ofunsidwa Kawirikawiri (Mafunso Ofunsidwa Kawirikawiri)

Mapeto & Uphungu waukadaulo

Kusintha kukhala zigawo za graphite zoyeretsedwa kwambiri zokhala ndi chitetezo cha CVD SiC kumapereka njira yolunjika komanso yoyezeka yothetsera mavuto okhudzana ndi kukolola ndi kusayera mu kukula kwa silicon ya monocrystalline ya mainchesi 32 N. Ndi kusintha kwa 18% mu prime yield ndi moyo wautali wa 30% wa thermal field, opanga ma solar wafer amatha kupeza phindu lalikulu.