Zofunikira pa mafakitale a semiconductors pazinthu za graphite ndizokwera kwambiri, kukula kwa tinthu tating'onoting'ono ta graphite kumakhala kolondola kwambiri, kukana kutentha kwambiri, mphamvu yayikulu, kutayika pang'ono ndi zabwino zina, monga: zinthu za graphite zopukutidwa ndi sintered.Popeza zida za graphite zomwe zimagwiritsidwa ntchito mumakampani opanga ma semiconductor (kuphatikiza zotenthetsera ndi ma die awo osinjidwa) zimafunika kuti zipirire kutentha ndi kuzizira mobwerezabwereza, kuti ziwonjezere moyo wa zida za graphite, nthawi zambiri zimafunika kuti zida za graphite zomwe zimagwiritsidwa ntchito zikhale ndi magwiridwe antchito okhazikika komanso ntchito yolimbana ndi kutentha.
01 Zowonjezera za Graphite zokulitsa makristalo a semiconductor
Njira zonse zomwe zimagwiritsidwa ntchito popanga makristalo a semiconductor zimagwira ntchito pansi pa kutentha kwambiri komanso malo owononga. Malo otentha a ng'anjo yokulirapo ya kristalo nthawi zambiri amakhala ndi zida za graphite zoyera kwambiri zomwe sizimatentha komanso sizimatentha, monga chotenthetsera, chophimbira, silinda yoteteza kutentha, silinda yotsogolera, electrode, chogwirira chophimbira, nati ya electrode, ndi zina zotero.
Tikhoza kupanga zida zonse zopangira kristalo, zomwe zingaperekedwe payekhapayekha kapena m'maseti, kapena zida za graphite zomwe zasinthidwa kukula kwake malinga ndi zosowa za makasitomala. Kukula kwa zinthu kumatha kuyezedwa pamalopo, ndipo kuchuluka kwa phulusa la zinthu zomalizidwa kumatha kukhala kochepa.kuposa 5ppm.
02 Graphite zowonjezera za semiconductor epitaxy
Njira ya Epitaxial imatanthauza kukula kwa wosanjikiza wa chinthu chimodzi cha kristalo chokhala ndi mawonekedwe ofanana ndi a substrate pa substrate imodzi ya kristalo. Mu njira ya epitaxial, wafer imayikidwa pa graphite disk. Kagwiridwe ka ntchito ndi mtundu wa graphite disk zimagwira ntchito yofunika kwambiri pa ubwino wa epitaxial wosanjikiza wa wafer. Pakupanga epitaxial, graphite yambiri yoyera kwambiri komanso maziko a graphite yoyera kwambiri yokhala ndi SIC coating amafunika.
Maziko a graphite a kampani yathu a epitaxy ya semiconductor ali ndi ntchito zosiyanasiyana, amatha kufanana ndi zida zambiri zomwe zimagwiritsidwa ntchito kwambiri mumakampani, ndipo ali ndi chiyero chapamwamba, zokutira zofanana, nthawi yabwino kwambiri yogwirira ntchito, komanso kukana mankhwala ambiri komanso kukhazikika kwa kutentha.
03 Zowonjezera za Graphite zoyika ma ion
Kuyika ma ion kumatanthauza njira yofulumizitsa kuwala kwa boron, phosphorous ndi arsenic m'magazi kupita ku mphamvu inayake, kenako n’kuikamo pamwamba pa zinthu za wafer kuti zisinthe mawonekedwe a pamwamba pa zinthuzo. Zigawo za chipangizo choyika ma ion ziyenera kupangidwa ndi zinthu zoyera kwambiri zomwe zimakhala ndi kukana kutentha bwino, kutentha kwambiri, dzimbiri lochepa lomwe limayambitsidwa ndi kuwala kwa ma ion komanso kuchuluka kochepa kwa zinthu zodetsedwa. Graphite yoyera kwambiri imakwaniritsa zofunikira zogwiritsidwa ntchito, ndipo ingagwiritsidwe ntchito pa chubu chowuluka, mipata yosiyanasiyana, ma electrode, zophimba ma electrode, ma conduits, ma beam terminators, ndi zina zotero.
Sitingathe kungopereka chivundikiro cha graphite pamakina osiyanasiyana oyika ma ion, komanso kupereka ma electrode a graphite oyera kwambiri ndi magwero a ion okhala ndi kukana dzimbiri kwamitundu yosiyanasiyana. Mitundu yogwiritsidwa ntchito: Eaton, Azcelis, Quatum, Varian, Nissin, AMAT, LAM ndi zida zina. Kuphatikiza apo, tithanso kupereka zinthu zofanana za ceramic, tungsten, molybdenum, aluminiyamu ndi zida zophimbidwa.
04 Zipangizo zotetezera kutentha za Graphite ndi zina
Zipangizo zotetezera kutentha zomwe zimagwiritsidwa ntchito popanga zida za semiconductor ndi monga graphite hard felt, soft felt, graphite foil, graphite paper, ndi graphite rope.
Zipangizo zathu zonse zopangira ndi graphite yochokera kunja, yomwe imatha kudulidwa malinga ndi kukula kwake kwa kasitomala kapena kugulitsidwa yonse.
Thireyi ya kaboni-kaboni imagwiritsidwa ntchito ngati chonyamulira chophimba filimu popanga maselo a silicon ya monocrystalline ya dzuwa ndi ma cell a silicon a polycrystalline. Mfundo yogwira ntchito ndi iyi: ikani silicon chip mu thireyi ya CFC ndikuyitumiza mu chubu cha uvuni kuti igwiritse ntchito chophimba filimu.
